Where physics meets chemistry: Thin film deposition from reactive plasmas

doi:10.1007/s11705-016-1598-7

Front. Chem. Sci. Eng.

2016, Vol. 10

Issue (4) : 441-458 https://doi.org/10.1007/s11705-016-1598-7

REVIEW ARTICLE

Where physics meets chemistry: Thin film deposition from reactive plasmas

Andrew Michelmore^1,^2,^*(

),Jason D. Whittle¹,James W. Bradley³,Robert D. Short^2,^4,^*(

)

¹. School of Engineering, University of South Australia, Mawson Lakes, Australia, SA 5095
². Future Industries Institute, University of South Australia, Mawson Lakes, Australia, SA 5095
³. Department of Electrical Engineering and Electronics, University of Liverpool, Liverpool, L69 3GJ, UK
⁴. Material Science Institute, Lancaster University, Lancaster, LA1 4YW, UK

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Abstract

Functionalising surfaces using polymeric thin films is an industrially important field. One technique for achieving nanoscale, controlled surface functionalization is plasma deposition. Plasma deposition has advantages over other surface engineering processes, including that it is solvent free, substrate and geometry independent, and the surface properties of the film can be designed by judicious choice of precursor and plasma conditions. Despite the utility of this method, the mechanisms of plasma polymer growth are generally unknown, and are usually described by chemical (i.e., radical) pathways. In this review, we aim to show that plasma physics drives the chemistry of the plasma phase, and surface-plasma interactions. For example, we show that ionic species can react in the plasma to form larger ions, and also arrive at surfaces with energies greater than 1000 kJ?mol^–¹ (>10 eV) and thus facilitate surface reactions that have not been taken into account previously. Thus, improving thin film deposition processes requires an understanding of both physical and chemical processes in plasma.

Keywords thin films plasma physics plasma chemistry functionalization polymer

PACS:

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Corresponding Author(s): Andrew Michelmore,Robert D. Short

Issue Date: 29 November 2016

Cite this article:

Andrew Michelmore,Jason D. Whittle,James W. Bradley, et al. Where physics meets chemistry: Thin film deposition from reactive plasmas[J]. Front. Chem. Sci. Eng., 2016, 10(4): 441-458.

URL:

https://academic.hep.com.cn/fcse/EN/10.1007/s11705-016-1598-7
https://academic.hep.com.cn/fcse/EN/Y2016/V10/I4/441

Fig.1 (a) A schematic of an RF plasma polymerisation reactor, and (b) a simplified electrical model showing the sheath regions and the bulk plasma. Adapted with permission from ref. [7]

Fig.2 Maxwellian electron energy distribution function with average electron temperature of 3 eV, and the types of collisions that each energy can cause

Tab.1 Units typically used in measuring plasma pressure and conversions

Fig.3 Plasma phase mass spectra of propionic acid at 1 Pa and 2 W (a) neutral phase and (b) positive ions. Reproduced from ref. [15] with permission from The Royal Society of Chemistry

Fig.4 The net flux of charged particles through an imaginary plane (left) is zero, while the net flux to a solid surface is not due to the higher mobility of electrons (right). Reproduced from ref. [42] with permission from The Royal Society of Chemistry

Fig.5 A schematic of the sheath and pre-sheath regions showing electrons being repelled from the wall which has acquired a negative potential. Reproduced from ref. [42] with permission from The Royal Society of Chemistry

Tab.2 Ion flux to surfaces from 15 W ethanol plasma as a function of pressure. Reproduced with permission from ref. [25]

Fig.6 Ion energy of ethanol plasma as a function of pressure at constant power of 15W. Reproduced with permission from ref [25]

Fig.7 Retention of carboxylic acid groups in acrylic acid plasma polymers, showing high retention of the carboxylic acid peak at 289 eV when the plasma power is kept low. Reproduced from ref [42] with permission from The Royal Society of Chemistry

59	O’Toole L, Short R D, Ameen A P, Jones F R. Mass spectrometry of and deposition-rate measurements from radiofrequency-induced plasmas of methyl isobutyrate, methyl methacrylate and n-butyl methacrylate. Journal of the Chemical Society, Faraday Transactions, 1995, 91(9): 1363–1370 https://doi.org/10.1039/ft9959101363
60	Bohm D. Minimum ionic kinetic energy for a stable sheath. In: Guthrie A,Wakerling R K, eds. The Characteristics of Electrical Discharges in Magnetic Fields. London: McGrawHill, 1949, 77–86
61	Vender D, Boswell R W. Numerical modeling of low-pressure RF plasma. IEEE Transactions on Plasma Science, 1990, 18(4): 725–732 https://doi.org/10.1109/27.57527
62	Jacobs D C. Reactive collisions of hyperthermal energy molecular ions with solid surfaces. Annual Review of Physical Chemistry, 2002, 53(1): 379–407 https://doi.org/10.1146/annurev.physchem.53.100301.131622
63	Titus M J, Nest D, Graves D B. Absolute vacuum ultraviolet flux in inductively coupled plasmas and chemical modifications of 193 nm photoresist. Applied Physics Letters, 2009, 94(17): 171501 https://doi.org/10.1063/1.3125260
64	Truica-Marasescu F, Wertheimer M R. Vacuum-ultraviolet photopolymerisation of amine-rich thin films. Macromolecular Chemistry and Physics, 2008, 209(10): 1043–1049 https://doi.org/10.1002/macp.200800089
1	Chatelier R C, Dai L, Griesser H J, Li S, Zientek P, Lohmann D, Chabrecek P U S. Patent, 6623747, <Date>2003-09-23</Date>
2	Moustafa M, Simpson C, Glover M, Dawson R A, Tesfaye S, Creagh F M, Haddow D, Short R, Heller S, MacNeil S. A new autologous keratinocyte dressing treatment for non-healing diabetic neuropathic foot ulcers. Diabetic Medicine, 2004, 21(7): 786–789 https://doi.org/10.1111/j.1464-5491.2004.01166.x
3	Yasuda H. Plasma Polymerization. New York: Academic Press, 1985
4	Kettle A, Beck A J, O’Toole L, Jones F, Short R. Plasma polymerisation for molecular engineering of carbon-fibre surfaces for optimised composites. Composites Science and Technology, 1997, 57(8): 1023–1032 https://doi.org/10.1016/S0266-3538(96)00162-5
5	Lopattananon N, Kettle A, Tripathi D, Beck A J, Duval E, France R M, Short R D, Jones F R. Interface molecular engineering of carbon-fibercomposites. Composites. Part A, Applied Science and Manufacturing, 1999, 30(1): 49–57 https://doi.org/10.1016/S1359-835X(98)00109-2
6	Beck A J, Jones F R, Short R D. Plasma copolymerization as a route to the fabrication of new surfaces with controlled amounts of specific chemical functionality. Polymer, 1996, 37(24): 5537–5539 https://doi.org/10.1016/S0032-3861(96)00479-X
7	Michelmore A, Whittle J D, Short R D, Boswell R W, Charles C. An Experimental and analytical study of an asymmetric capacitively coupled plasma used for plasma polymerization. Plasma Processes and Polymers, 2014, 11(9): 833–841 https://doi.org/10.1002/ppap.201400026
8	Suzuki K, Nakamura K, Ohkubo H, Sugai H. Power transfer efficiency and mode jump in an inductive RF discharge. Plasma Sources Science & Technology, 1998, 7(1): 13–20 https://doi.org/10.1088/0963-0252/7/1/003
9	Ward R J. Molecular engineering of surfaces by plasma copolymerization and enhanced cell attachment and spreading. Dissertation for the Doctoral Degree. UK: University of Durham, 1989
10	Beyer D, Knoll W, Ringsdorf H, Wang J H, Timmons R B, Sluka P. Reduced protein adsorption on plastics via direct plasma deposition of triethylene glycol monoallyl ether. Journal of Biomedical Materials Research. Part A, 1997, 36(2): 181–189 https://doi.org/10.1002/(SICI)1097-4636(199708)36:2<181::AID-JBM6>3.0.CO;2-G
11	Padron-Wells G, Estrada-Raygoza I C, Thamban P L S, Nelson C T, Chung C W, Overzet L J, Goeckner M J. Understanding the synthesis of ethylene glycol pulsed plasma discharges. Plasma Processes and Polymers, 2013, 10(2): 119–135 https://doi.org/10.1002/ppap.201200066
12	Chen R T, Muir B W, Thomsen L, Tadich A, Cowie B C C, Such G K, Postma A, McLean K M, Caruso F. New insights into the substrate plasma polymer interface. Journal of Physical Chemistry B, 2011, 115(20): 6495–6502 https://doi.org/10.1021/jp200864k
13	Daw R, O’Leary T, Kelly J, Short R D, Cambray-Deakin M, Devlin A J, Brook I M, Scutt A, Kothari S. Molecular engineering of surfaces by plasma copolymerization and enhanced cell attachment and spreading. Plasmas and Polymers, 1999, 4(2-3): 113–132 https://doi.org/10.1023/A:1021844824801
14	Daw R, Candan S, Beck A, Devlin A, Brook I, MacNeil S, Dawson D A, Short R D. Plasma copolymer surfaces of acrylic acid/1,7-octadiene: Surface characterisation and the attachment of ROS 17/2.8-osteoblast-like cells. Biomaterials, 1998, 19(19): 1717–1725 https://doi.org/10.1016/S0142-9612(98)00080-5
15	Michelmore A, Steele D A, Robinson D E, Whittle J D, Short R D. The link between mechanisms of deposition and the physico-chemical properties of plasma polymer films. Soft Matter, 2013, 9(26): 6167–6175 https://doi.org/10.1039/c3sm51039e
16	Whittle J D, Short R D, Douglas C, Davies J. Differences in the aging of allyl alcohol, acrylic acid, allylamine, and octa-1,7-diene plasma polymers as studied by X-ray photoelectron spectroscopy. Chemistry of Materials, 2000, 12(9): 2664–2671 https://doi.org/10.1021/cm0002158
17	Gengenbach T R, Chatelier R C, Griesser H J. Characterization of the ageing of plasma-deposited polymer films: Global analysis of x-ray photoelectron spectroscopy data. Surface and Interface Analysis, 1996, 24(4): 271–281 https://doi.org/10.1002/(SICI)1096-9918(199604)24:4<271::AID-SIA116>3.0.CO;2-J
18	Haddow D B, Steele D, Short R D, Dawson R A, Macneil S. Plasma–polymerized surfaces for culture of human keratinocytes and transfer of cells to an in vitro wound–bed model. Journal of Biomedical Materials Research. Part A, 2003, 64A(1): 80–87 https://doi.org/10.1002/jbm.a.10356
19	Padron-Wells G, Jarvis B C, Jindal A K, Goeckner M J. Understanding the synthesis of DEGVE pulsed plasmas for application to ultra thin biocompatible interfaces. Colloids and Surfaces. B, Biointerfaces, 2009, 68(2): 163–170 https://doi.org/10.1016/j.colsurfb.2008.09.028
20	Michelmore A, Bryant P M, Steele D A, Vasilev K, Bradley J W, Short R D. Role of positive ions in determining the deposition rate and film chemistry of continuous wave hexamethyldisiloxane plasmas. Langmuir, 2011, 27(19): 11943–11950 https://doi.org/10.1021/la202010n
21	Michelmore A, Gross-Kosche P, Al-Bataineh S A, Whittle J D, Short R D. On the effect of monomer chemistry on growth mechanisms of nonfouling PEG-like plasma polymers. Langmuir, 2013, 29(8): 2595–2601 https://doi.org/10.1021/la304713b
22	Choukourov A, Biederman H, Slavinska D, Hanley L, Grinevich A, Boldryeva H, Mackova A. Mechanistic studies of plasma polymerization of allylamine. Journal of Physical Chemistry B, 2005, 109(48): 23086–23091 https://doi.org/10.1021/jp0535691
23	Michelmore A, Charles C, Boswell R W, Short R D, Whittle J D. Defining plasma polymerization: New insight into what we should be measuring. ACS Applied Materials & Interfaces, 2013, 5(12): 5387–5391 https://doi.org/10.1021/am401484b
24	Daunton C, Smith L E, Whittle J D, Short R D, Steele D A, Michelmore A. Plasma parameter aspects in the fabrication of stable amine functionalized plasma polymer films. Plasma Processes and Polymers, 2015, 12(8): 817–826 https://doi.org/10.1002/ppap.201400215
25	Saboohi S, Jasieniak M, Coad B R, Griesser H J, Short R D, Michelmore A. Comparison of plasma polymerization under collisional and collision-less pressure regimes. Journal of Physical Chemistry B, 2015, 119(49): 15359–15369 https://doi.org/10.1021/acs.jpcb.5b07309
26	Zhang Z H, Liu S L, Shi Y, Dou J, Fang S M. DNA detection and cell adhesion on plasma-polymerized pyrrole. Biopolymers, 2014, 101(5): 496–503 https://doi.org/10.1002/bip.22408
27	Wang L, Liu X J, Hao J, Chu L Q. Long-range surface plasmon resonance sensors fabricated with plasma polymerized fluorocarbon thin films. Sensors and Actuators. B, Chemical, 2015, 215: 368–372 https://doi.org/10.1016/j.snb.2015.04.005
28	Jiang Z, Jiang Z J. Plasma techniques for the fabrication of polymer electrolyte membranes for fuel cells. Journal of Membrane Science, 2014, 456: 85–106 https://doi.org/10.1016/j.memsci.2014.01.004
29	Hua J, Zhanga C, Jiangb L, Fanga S, Zhanga X, Wanga X, Menga Y. Plasma graft-polymerization for synthesis of highly stable hydroxide exchange membrane. Journal of Power Sources, 2014, 248: 831–838 https://doi.org/10.1016/j.jpowsour.2013.09.099
30	Zhao X Y, Wang M Z, Ji J Q, Wang T H, Yang F, Du J M. Structural analysis and dielectric property of novel conjugated polycyanurates. Polymer Engineering and Science, 2014, 54(4): 812–817 https://doi.org/10.1002/pen.23628
31	Li P H, Li L M, Wang W H, Jin W H, Liu X M, Yeung K W K, Chu P K. Enhanced corrosion resistance and hemocompatibility of biomedical NiTi alloy by atmospheric-pressure plasma polymerized fluorine-rich coating. Applied Surface Science, 2014, 297: 109–115 https://doi.org/10.1016/j.apsusc.2014.01.092
32	Feng Y E, Liao X P, Wang Y N, Shi B. Improvement in leather surface hydrophobicity through low-pressure cold plasma polymerization. Journal of the American Leather Chemistry Association, 2014, 109(3): 89–95
33	Yang Z L, Xiong K Q, Qi P K, Yang Y, Tu Q F, Wang J, Huang N. Gallic acid tailoring surface functionalities of plasma-polymerized allylamine-coated 316L SS to selectively direct vascular endothelial and smooth muscle cell fate for enhanced endothelialization. ACS Applied Materials & Interfaces, 2014, 6(4): 2647–2656 https://doi.org/10.1021/am405124z
34	Li J W, Wu Z X, Huang C J, Liu H M, Huang R J, Li L F. Mechanical properties of cyanate ester/epoxy nanocomposites modified with plasma functionalized MWCNTs. Composites Science and Technology, 2014, 90: 166–173 https://doi.org/10.1016/j.compscitech.2013.11.009
35	Sun Y Y, Liang Q, Chi H J, Zhang Y J, Shi Y, Fang D N, Li F X. The Application of gas plasma technologies in surface modification of aramid fiber. Fibers and Polymers, 2014, 15(1): 1–7 https://doi.org/10.1007/s12221-014-0001-x
36	Tian M, Yin Y, Yang C, Zhao B, Song J, Liu J, Li X M, He T. CF4 plasma modified highly interconnective porous polysulfone membranes for direct contact membrane distillation (DCMD). Desalination, 2015, 369: 105–114 https://doi.org/10.1016/j.desal.2015.05.002
37	Ma G Q, Liu Y, Wei S, Sheng J. Surface modification of polypropylene by ethylene plasma and its induced β-form in polypropylene. Chinese Journal of Polymer Science, 2015, 33(5): 669–673 https://doi.org/10.1007/s10118-015-1631-1
38	Wan S J, Wang L, Xu X J, Zhao C H, Liu X D. Controllable surface morphology and properties via mist polymerization on a plasma-treated polymethyl methacrylate surface. Soft Matter, 2014, 10(6): 903–910 https://doi.org/10.1039/C3SM52434E
39	Zhang Z G, Zhang T Z, Li J S, Ji Z L, Zhou H M, Zhou X F, Gu N. Preparation of poly(<?A3B2 th=8pt?>L<?A3B2 th?>-lactic acid)-modified polypropylene mesh and its antiadhesion in experimental abdominal wall defect repair. Journal of Biomedical Materials Research Part B, 2014, 102(1): 12–21 https://doi.org/10.1002/jbm.b.32947
40	Denaro A R, Owens P A, Crawshaw A. Glow discharge polymerization—styrene. European Polymer Journal, 1968, 4(1): 93–106 https://doi.org/10.1016/0014-3057(68)90010-4
41	Westwood A R. Glow discharge polymerization—rates and mechanisms of polymer formation. European Polymer Journal, 1971, 7(4): 363–375 https://doi.org/10.1016/0014-3057(71)90007-3
42	Michelmore A, Steele D A, Whittle J D, Bradley J W, Short R D. Nanoscale deposition of chemically functionalised films via plasma polymerisation. RSC Advances, 2013, 3(33): 13540–13557 https://doi.org/10.1039/c3ra41563e
43	Chabert P, Braithwaite N. Physics of Radio-Frequency Plasmas.Cambridge: Academic Press, 2011
44	Lieberman M A, Lichtenberg A J. Principles of Plasma Discharges and Materials Processing.Chichester: John Wiley and Sons, 1994
45	Hulburt E O. Atmospheric ionization by cosmic radiation. Physical Review, 1931, 37(1): 1–8 https://doi.org/10.1103/PhysRev.37.1
46	Blanksby S J, Ellison G B. Bond dissociation energies of organic molecules. Accounts of Chemical Research, 2003, 36(4): 255–263 https://doi.org/10.1021/ar020230d
47	Johnston E E, Beyers J D, Ratner B D. Plasma deposition and surface characterization of oligoglyme, dioxane, and crown ether nonfouling films. Langmuir, 2005, 21(3): 870–881 https://doi.org/10.1021/la036274s
48	Menzies D J, Cowie B, Fong C, Forsythe J S, Gengenbach T R, McLean K M, Puskar L, Textor M, Thomsen L, Tobin M, Muir B W. One-step method for generating PEG-Like plasma polymer gradients: Chemical characterization and analysis of protein interactions. Langmuir, 2010, 26(17): 13987–13994 https://doi.org/10.1021/la102033d
49	Flory P J. Principles of Polymer Chemistry. New York: Cornell University Press, 1953
50	Agarwal S, Quax G W W, van de Senden M C M, Maroudas D, Aydil E S. Measurement of absolute radical densities in a plasma using modulated-beam line-of-sight threshold ionization mass spectrometry. Journal of Vacuum Science and Technology Part A, 2004, 22(1): 71–81 https://doi.org/10.1116/1.1627767
51	Booth J P, Corr C S, Curley G A, Jolly J, Guillon J, Földes T. Fluorine negative ion density measurement in a dual frequency capacitive plasma etch reactor by cavity ring-down spectroscopy. Applied Physics Letters, 2006, 88(15): 151502 https://doi.org/10.1063/1.2194823
52	Whittle J D, Short R D, Steele D A, Bradley J W, Bryant P M, Jan F, Biederman H, Serov A A, Choukurov A, Hook A L, Ciridon W A, Ceccone G, Hegemann D, Korner E, Michelmore A. Variability in plasma polymerization processes—an international round-robin study. Plasma Processes and Polymers, 2013, 10(9): 767–778 https://doi.org/10.1002/ppap.201300029
53	Williams T, Hayes M W. Polymerization in a glow discharge. Nature, 1966, 209(5025): 769–773 https://doi.org/10.1038/209769a0
54	Chapman B. Glow Discharge Processes.Chichester: John Wiley and Sons, 1980
55	Doyle J R. Chemical kinetics in low pressure acetylene radio frequency glow discharges. Journal of Applied Physics, 1997, 82(10): 4763–4771 https://doi.org/10.1063/1.366333
56	O’Toole L, Mayhew C A, Short R D. On the plasma polymerisation of allyl alcohol: An investigation of ion-molecule reactions using a selected ion flow tube. Journal of the Chemical Society, Faraday Transactions, 1997, 93(10): 1961–1964 https://doi.org/10.1039/a608412e
57	Stoykov S, Eggs C, Kortshagen U. Plasma chemistry and growth of nanosized particles in a C2H2 RF discharge. Journal of Physics. D, Applied Physics, 2001, 34(14): 2160–2173 https://doi.org/10.1088/0022-3727/34/14/312
58	Oh J S, Bradley J W. Heavy ion formation in plasma jet polymerization of heptylamine at atmospheric pressure. Plasma Processes and Polymers, 2013, 10(10): 839–842
65	Barton D, Bradley J W, Gibson K J, Steele D A, Short R D. An in situ comparison between VUV photon and ion energy fluxes to polymer surfaces immersed in an RF plasma. Journal of Physical Chemistry B, 2000, 104(30): 7150–7153 https://doi.org/10.1021/jp000618v
66	Haller I, White P. Polymerization of butadiene gas on surfaces under low energy electron bombardment. Journal of Physical Chemistry, 1963, 67(9): 1784–1788 https://doi.org/10.1021/j100803a010
67	Peter S, Graupner K, Grambole D, Richter F. Comparative experimental analysis of the a-C:H deposition processes using CH4 and C2H2 as precursors. Journal of Applied Physics, 2007, 102(5): 053304 https://doi.org/10.1063/1.2777643
68	Shen M, Bell A T. A review of recent advances in plasma polymerization. In: Plasma Polymerization. ACS Symposium Series. Washington, DC: American Chemical Society, 1979, 1–33
69	Friedrich J. Plasma processes and polymers, mechanisms of plasma polymerization—reviewed from a chemical point of view. Plasma Processes and Polymers, 2011, 8(9): 783–802 https://doi.org/10.1002/ppap.201100038
70	Milella A, Palumbo F, Favia P, Cicala G, d’Agostino R. Continuous and modulated deposition of fluorocarbon films from c-C4F8 plasmas. Plasma Processes and Polymers, 2004, 1(2): 164–170 https://doi.org/10.1002/ppap.200400021
71	Hegemann D, Hanselmann B, Blanchard N, Amberg M. Plasma-substrate interaction during plasma deposition on polymers. Contributions to Plasma Physics, 2014, 54(2): 162–169 https://doi.org/10.1002/ctpp.201310064
72	Thiry D, Konstantinidis S, Cornil J, Snyders R. Plasma diagnostics for the low-pressure plasma polymerization process: A critical review. Thin Solid Films, 2016, 606: 19–44 https://doi.org/10.1016/j.tsf.2016.02.058
73	Ershov S, Khelifa F, Lemaur V, Cornil J, Cossement D, Habibi Y, Dubois P, Snyders R. Free radical generation and concentration in a plasma polymer: The effect of aromaticity. ACS Applied Materials & Interfaces, 2014, 6(15): 12395–12405 https://doi.org/10.1021/am502255p
74	VonKeudell A, Schwartz-Selinger T, Meier M, Jacob W. Direct identification of the synergism between methyl radicals and atomic hydrogen during growth of amorphous hydrogenated carbon films. Applied Physics Letters, 2000, 76(6): 676–678 https://doi.org/10.1063/1.125858
75	McNaught A D, Wilkinson A. IUPAC Compendium of Chemical Terminology, 2nd ed.Oxford: Blackwell Scientific Publications, 1997
76	O’Toole L, Beck A J, Ameen A P, Jones F R, Short R D. Radiofrequency-induced plasma polymerisation of propenoic acid and propanoic acid. Journal of the Chemical Society, Faraday Transactions, 1995, 91(21): 3907–3912 https://doi.org/10.1039/ft9959103907
77	Brookes P N, Fraser S, Short R D, Hanley L, Fuoco E, Roberts A, Hutton S J. The effect of ion energy on the chemistry of air-aged polymer films grown from the hyperthermal polyatomic ion Si2OMe+5. Electron Spectroscopy and Related Phenomena, 2001, 121(1-3): 281–297 https://doi.org/10.1016/S0368-2048(01)00340-1
78	Beck A J, Candan S, Short R D, Goodyear A, Braithwaite N, St J. The role of ions in the plasma polymerization of allylamine. Journal of Physical Chemistry B, 2001, 105(24): 5730–5736 https://doi.org/10.1021/jp0043468
79	Michelmore A, Whittle J D, Short R D. The importance of ions in low pressure PECVD plasmas. Frontiers in Physics, 2015, 3: 3 https://doi.org/10.3389/fphy.2015.00003
80	von Keudell A. Surface processes during thin-film growth. Plasma Sources Science & Technology, 2000, 9(4): 455–467 https://doi.org/10.1088/0963-0252/9/4/302
81	Khelifa F, Ershov S, Habibi Y, Snyders R, Dubois P. Free-radical-induced grafting from plasma polymer surfaces. Chemical Reviews, 2016, 116(6): 3975–4005 https://doi.org/10.1021/acs.chemrev.5b00634
82	Coad B R, Styan K E, Meagher L. One step ATRP initiator immobilization on surfaces leading to gradient-grafted polymer brushes. ACS Applied Materials & Interfaces, 2014, 6(10): 7782–7789 https://doi.org/10.1021/am501052d
83	Blanchard N E, Hanselmann B, Drosten J, Heunberger M, Hegemann D. Densification and hydration of HMDSO plasma polymers. Plasma Processes and Polymers, 2015, 12(1): 32–41 https://doi.org/10.1002/ppap.201400118
84	Ryssy J, Prioste-Amaral E, Assuncao D F N, Rogers N, Kirby G T S, Smith L E, Michelmore A. Chemical and physical processes in the retention of functional groups in plasma polymers studied by plasma phase mass spectroscopy. Physical Chemistry Chemical Physics, 2016, 18(6): 4496–4504 https://doi.org/10.1039/C5CP05850C
85	Hopp I, Michelmore A, Smith L E, Robinson D E, Bachhuka A, Mierczynska A, Vasilev K. The influence of substrate stiffness gradients on primary human dermal fibroblasts. Biomaterials, 2013, 34(21): 5070–5077 https://doi.org/10.1016/j.biomaterials.2013.03.075
86	Memming R, Tolle H J, Wierenga P E. Properties of polymeric layers of hydrogenated amorphous carbon produced by a plasma-activated chemical vapour deposition process II: Tribological and mechanical properties. Thin Solid Films, 1986, 143(1): 31–41 https://doi.org/10.1016/0040-6090(86)90144-6
87	Pappas D L, Hopwood J. Deposition of diamondlike carbon using a planar radio frequency induction plasma. Journal of Vacuum Science and Technology Part A, 1994, 12(4): 1576–1582 https://doi.org/10.1116/1.579358

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