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Frontiers of Information Technology & Electronic Engineering

ISSN 2095-9184

Front. Inform. Technol. Electron. Eng    2018, Vol. 19 Issue (6) : 809-814    https://doi.org/10.1631/FITEE.1601692
Orginal Article
A general method of designing phase-shifting algorithms for grating lateral shearing interferometry
Chao FANG1,2, Yang XIANG1(), Ke-qi QI1,2
1. State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China
2. University of Chinese Academy of Sciences, Beijing 100039, China
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Abstract

We propose a general method of designing phase-shifting algorithms for grating lateral shearing interferometry. The algorithms compensate for the zeroth-order effect error and phase-shifting error in varying degrees. We derive a general expression of the phase-shifting algorithm in grating lateral shearing interferometer and introduce the corresponding design method. Based on the expression and method, four phase-shifting algorithms are designed with different phase-shifting errors to obtain high measurement accuracy. A new 13-frame phase-shifting algorithm is designed and simulated with a large zeroth-order effect. Simulation results verify the general expression and the corresponding design method.

Keywords Interferometry      Phase measurement      Phase-shifting algorithms     
Corresponding Author(s): Yang XIANG   
Issue Date: 30 August 2018
 Cite this article:   
Chao FANG,Yang XIANG,Ke-qi QI. A general method of designing phase-shifting algorithms for grating lateral shearing interferometry[J]. Front. Inform. Technol. Electron. Eng, 2018, 19(6): 809-814.
 URL:  
https://academic.hep.com.cn/fitee/EN/10.1631/FITEE.1601692
https://academic.hep.com.cn/fitee/EN/Y2018/V19/I6/809
[1] FITEE-0809-18008-CF_suppl_1 Download
[2] FITEE-0809-18008-CF_suppl_2 Download
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