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Capacitive position measurement for high-precision space inertial sensor |
Yan-zheng BAI (白彦峥), Ze-bing ZHOU (周泽兵, ), Hai-bo TU (涂海波), Shu-chao WU (吴书朝), Lin CAI (蔡林), LI LIU (刘力), Jun LUO (罗俊) |
| School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China |
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Abstract Low noise position measurement is fundamental for space inertial sensors, and at present the capacitive position sensor is widely employed for space inertial sensors. The design for the possible suppression of the front-end electric noises for a capacitive sensor is presented. A prototype capacitive sensor with 2×10-6pF/Hz1/2 at frequency above 0.04 Hz is achieved and further improvements are discussed.
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| Keywords
inertial sensor
accelerometer
capacitive position sensor
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Corresponding Author(s):
Ze-bing ZHOU (周泽兵),Email:zhouzb@mail.hust.edu.cn
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Issue Date: 05 June 2009
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