The role of ions in plasma catalytic carbon nanotube growth: A review

doi:10.1007/s11705-015-1515-5

Front. Chem. Sci. Eng.

2015, Vol. 9

Issue (2) : 154-162 https://doi.org/10.1007/s11705-015-1515-5

REVIEW ARTICLE

The role of ions in plasma catalytic carbon nanotube growth: A review

Erik C. Neyts(

)

Research Group PLASMANT, Department of Chemistry, University of Antwerp, Universiteitsplein 1, 2610 Wilrijk-Antwerp, Belgium

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Abstract

While it is well-known that the plasma-enhanced catalytic chemical vapor deposition (PECVD) of carbon nanotubes (CNTs) offers a number of advantages over thermal CVD, the influence of the various individual contributing factors is not well understood. Especially the role of ions is unclear, since ions in plasmas are generally associated with sputtering rather than with growing a material. Even so, various studies have demonstrated the beneficial effects of ion bombardment during the growth of CNTs. This review looks at the role of the ions in plasma-enhanced CNT growth as deduced from both experimental and simulation studies. Specific attention is paid to the beneficial effects of ion bombardment. Based on the available literature, it can be concluded that ions can be either beneficial or detrimental for carbon nanotube growth, depending on the exact conditions and the control over the growth process.

Keywords plasma-enhanced chemical vapor deposition (PECVD) carbon nanotube (CNT) ion bombardment defect healing

Corresponding Author(s): Erik C. Neyts

Online First Date: 18 June 2015 Issue Date: 14 July 2015

Cite this article:

Erik C. Neyts. The role of ions in plasma catalytic carbon nanotube growth: A review[J]. Front. Chem. Sci. Eng., 2015, 9(2): 154-162.

URL:

https://academic.hep.com.cn/fcse/EN/10.1007/s11705-015-1515-5
https://academic.hep.com.cn/fcse/EN/Y2015/V9/I2/154

Fig.1 Schematic representation of the vapor-liquid-solid growth mechanism. (a) Adsorption of the gas-phase hydrocarbon species on the nanocatalyst particle; (b) catalytic decomposition into carbon atoms and dissolution in the liquid bulk; (c) surface carbon segregation with the formation of a solid precipitate; (d) formation of a solid crystalline structure. Adopted with permission from [23]

Fig.2 Factors contributing to CNT growth in PECVD. In addition to neutral hydrocarbon molecules, radicals, atoms and ions are typically also present as well as electromagnetic fields. All of these to some extent contribute to or influence the growth process shown in Fig. 1. Adopted with permission from [23]

Fig.3 (a) SEM and (b) TEM images of free-standing single walled CNTs, grown in a PECVD setup, and (c) the corresponding Raman spectrum. Adopted with permission from [28]

Fig.4 Network enhancement and defect healing by Ar⁺ ion bombardment. Adopted with permission from [32]

Fig.5 TEM observation of a single walled CNT growing from a Fe RF electrode. Adopted with permission from [34]

Fig.6 SEM images of CNTs grown on Ni by (a) thermal CVD, and (b) PECVD. For thermal CVD, the CNTs are spaghetti-like whereas for PECVD, the CNTs are aligned. Adopted with permission from [42]

Fig.7 Raman spectra of single walled CNTs grown in a PECVD setup, using (a) P_rf = 40 W, and (b) P_rf = 100 W. Adopted with permission from [46]

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