|
|
|
A novel MEMS-based focal plane array for infrared imaging |
| LI Chaobo1, JIAO Binbin1, SHI Shali1, YE Tianchun1, CHEN Dapeng1, ZHANG Qingchuan2, GUO Zheying2, DONG Fengliang2, WU Xiaoping2 |
| 1.Micro-Processing and Nano-Technology Department, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China; 2.Key Laboratory of Mechanical Behavior and Design of Materials, University of Science and Technology of China, Hefei 230027, China; |
|
|
|
|
Abstract On the basis of opto-mechanical effect and micro electromechanical system (MEMS) technology, a novel substrate-free focal plane array (FPA) with the thermal isolated structure for uncooled infrared imaging is developed, even as alternate evaporated Au on SiN cantilever is used for thermal isolation. A human thermal image is obtained successfully by using the infrared imaging system composed of the FPA and optical detecting system. The experiment results show that the realization of thermal isolation structure in substrate-free FPA increases the temperature rise of the deflecting leg effectively, whereas the noise equivalent temperature difference (NETD) is about 200 mK.
|
|
Issue Date: 05 March 2007
|
|
|
Viewed |
|
|
|
Full text
|
|
|
|
|
Abstract
|
|
|
|
|
Cited |
|
|
|
|
| |
Shared |
|
|
|
|
| |
Discussed |
|
|
|
|
