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Frontiers of Electrical and Electronic Engineering

ISSN 2095-2732

ISSN 2095-2740(Online)

CN 10-1028/TM

Front Elect Electr Eng Chin    2009, Vol. 4 Issue (1) : 93-97    https://doi.org/10.1007/s11460-008-0081-8
Research Article
Luminescence and recombine centre in ZnO/Si films
Cihui LIU(), Ran YAO, Jianfeng SU, Zeyu MA, Zhuxi FU
Department of Physics, University of Science and Technology of China
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Abstract

The D0h luminescence of ZnO films deposited on p-type Si substrates is produced by metal-organic chemical vapor deposition (MOCVD). After annealing in the air at 700°C for an hour, the photoluminescence (PL) spectra, the I-V characteristics and the deep level transient spectroscopy (DLTS) of the samples are measured. All the samples have a rectification characteristic. DLTS signals show two deep levels of E1 and E2. The Gaussian fit curves of the PL spectra at room temperature show three luminescence lines b, c and d, of which b is attributed to the exciton emission. The donor level E1 measured by DLTS and the location state donor ionization energy Ed of the closely neighboring emission lines c and d are correlated. E1 is judged as neutral donor bound to hole emission (D0h). Moreover, the intensity of the PL spectra decreases while the relative density of E2 increases, showing that E2 has the property of a non-radiative center.

Keywords metal-organic chemical vapor deposition (MOCVD)      ZnO/p-Si      heterojunction      defect     
Corresponding Author(s): LIU Cihui,Email:chliu@ustc.edu.cn   
Issue Date: 05 March 2009
 Cite this article:   
Cihui LIU,Zeyu MA,Zhuxi FU, et al. Luminescence and recombine centre in ZnO/Si films[J]. Front Elect Electr Eng Chin, 2009, 4(1): 93-97.
 URL:  
https://academic.hep.com.cn/fee/EN/10.1007/s11460-008-0081-8
https://academic.hep.com.cn/fee/EN/Y2009/V4/I1/93
Fig0  XRD patterns of ZnO films grown with different flow rates of eluting gas
samplecarrier gas flux/slmenergy level/eVNt/NB
S2p0.86E1 = EC - 0.15 ± 0.601.34%
E2 = EC - 0.47 ± 0.073.39%
S2a1.4E1 = EC - 0.13 ± 0.021.01%
E2 = EC - 0.43 ± 0.055.10%
S1p1.7E1 = EC - 0.09 ± 0.061.99%
E2 = EC - 0.41 ± 0.078.71%
Tab0  Characteristics of deep levels at various preparation fluxes in samples
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