Liquid metal printing opening the way for energy conservation in semiconductor manufacturing industry

doi:10.1007/s11708-022-0834-8

Front. Energy

2022, Vol. 16

Issue (4) : 542-547 https://doi.org/10.1007/s11708-022-0834-8

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Liquid metal printing opening the way for energy conservation in semiconductor manufacturing industry

Qian LI¹, Jing LIU²(

)

¹. Technical Institute of Physics and Chemistry, Chinese Academy of Sciences, Beijing 100190, China
². Technical Institute of Physics and Chemistry, Chinese Academy of Sciences, Beijing 100190, China; Department of Biomedical Engineering, School of Medicine, Tsinghua University, Beijing 100084, China

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Corresponding Author(s): Jing LIU

Online First Date: 29 August 2022 Issue Date: 21 October 2022

Cite this article:

Qian LI,Jing LIU. Liquid metal printing opening the way for energy conservation in semiconductor manufacturing industry[J]. Front. Energy, 2022, 16(4): 542-547.

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https://academic.hep.com.cn/fie/EN/10.1007/s11708-022-0834-8
https://academic.hep.com.cn/fie/EN/Y2022/V16/I4/542

Fig.1 Three representative principles to manufacture semiconductor and their working temperature conditions (Redrawn from Ref. [1]).

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