Error analysis of the parameters for non-coaxial grazing X-ray microscope
Error analysis of the parameters for non-coaxial grazing X-ray microscope
ZHAO Lingling1, HU Jiasheng2, LI Xiang2
1.School of Electronic and Information Engineering, Dalian University of Technology, Dalian 116024, China; School of Physics and Electronic Engineering, Ludong University, Yantai 264025, China; 2.School of Electronic and Information Engineering, Dalian University of Technology, Dalian 116024, China
Abstract：A non-coaxial grazing X-ray microscope, consisting of four spherical mirrors, is designed for diagnosis of inertial confinement fusion (ICF). The aberrations and imaging quality of the microscope are analyzed. To acquire excellent imaging quality, suitable tolerances for manufacturing and assembling the microscope are necessary. This paper researches the changes of Gauss parameters and aberrations due to component and subsystem parameters (such as the radius of the mirror, angle between mirrors, grazing angle, object distance, etc.). Here, spot diagrams and modulation transfer function (MTF) are first adopted to quantitatively evaluate the imaging quality of the microscope. Suitable manufacturing tolerances of components and assembly tolerances of the system are established on the basis of the discussion and analysis. A set of non-coaxial grazing X-ray microscopes is manufactured based on the tolerances. In site tests of ICF, the images with high resolution are obtained by the microscope.
出版日期: 2007-09-05
引用本文:
. Error analysis of the parameters for non-coaxial grazing X-ray microscope[J]. Frontiers of Mechanical Engineering in China, 2007, 2(3): 323-329.
ZHAO Lingling, HU Jiasheng, LI Xiang. Error analysis of the parameters for non-coaxial grazing X-ray microscope. Front. Mech. Eng., 2007, 2(3): 323-329.
