Please wait a minute...
购物车 申请加入邮件组 English
高级检索 图表检索
Frontiers of Mechanical Engineering

ISSN 2095-0233

ISSN 2095-0241(Online)

CN 11-5984/TH

邮发代号 80-975

2019 Impact Factor: 2.448

热点文章  |  下载排行  |  浏览排行
在线投稿 免费RSS订阅
Frontiers of Mechanical Engineering  2015, Vol. 10 Issue (1): 20-36   https://doi.org/10.1007/s11465-015-0328-z
  本期目录
Preload characteristics identification of the piezoelectric-actuated 1-DOF compliant nanopositioning platform
Ruizhou WANG,Xianmin ZHANG()
School of Mechanical and Automotive Engineering, South China University of Technology, Guangzhou 510641, China
 全文: PDF(3669 KB)   HTML
Abstract：

Packaged piezoelectric ceramic actuators (PPCAs) and compliant mechanisms are attractive for nanopositioning and nanomanipulation due to their ultra-high precision. The way to create and keep a proper and steady connection between both ends of the PPCA and the compliant mechanism is an essential step to achieve such a high accuracy. The connection status affects the initial position of the terminal moving plate, the positioning accuracy and the dynamic performance of the nanopositioning platform, especially during a long-time or high-frequency positioning procedure. This paper presents a novel external preload mechanism and tests it in a 1-degree of freedom (1-DOF) compliant nanopositioning platform. The 1-DOF platform utilizes a parallelogram guiding mechanism and a parallelogram load mechanism to provide a more accurate actual input displacement and output displacement. The simulation results verify the proposed stiffness model and dynamic model of the platform. The values of the preload displacement, actual input displacement and output displacement can be measured by three capacitive sensors during the whole positioning procedure. The test results show the preload characteristics vary with different types or control modes of the PPCA. Some fitting formulas are derived to describe the preload displacement, actual input displacement and output displacement using the nominal elongation signal of the PPCA. With the identification of the preload characteristics, the actual and comprehensive output characteristics of the PPCA can be obtained by the strain gauge sensor (SGS) embedded in the PPCA.
Key words： nanopositioning    preload characteristic    packaged piezoelectric ceramic actuator    compliant mechanism
收稿日期: 2015-01-15      出版日期: 2015-04-01
Corresponding Author(s): Xianmin ZHANG   
 引用本文:   
. [J]. Frontiers of Mechanical Engineering, 2015, 10(1): 20-36.
Ruizhou WANG, Xianmin ZHANG. Preload characteristics identification of the piezoelectric-actuated 1-DOF compliant nanopositioning platform. Front. Mech. Eng., 2015, 10(1): 20-36.
 链接本文:  
https://academic.hep.com.cn/fme/CN/10.1007/s11465-015-0328-z
https://academic.hep.com.cn/fme/CN/Y2015/V10/I1/20
Fig.1  
Fig.2  
Fig.3  
Fig.4  
Fig.5  
Fig.6  
Fig.7  
Fig.8  
Fig.9  
Fig.10  
Items Input stiffness/(N·μm-1) Output compliance/(μm·N-1) 1st-order frequency/Hz
Calculation 2.0223 0.4897 1707.9
Simulation 2.1076 0.4641 1600.0
Error/% 4.05 5.52 6.74
Tab.1  
Fig.11  
Fig.12  
Fig.13  
Fig.14  
Fig.15  
Order PSt, open-loop PSt, closed-loop PI, open-loop PI, closed-loop
Rising Downward Rising Downward Rising Downward Rising Downward
1 17.5 14.1 12.0 11.1 17.6 15.7 13.2 14.1
2 7.7 7.9 11.4 10.9 11.8 11.8 11.6 11.9
3 7.7 7.8 11.4 10.9 11.6 11.8 11.6 11.9
4 7.7 7.8 11.4 10.9 11.6 11.8 11.6 11.9
5 7.7 7.8 11.3 10.9 11.6 11.7 11.6 11.9
Tab.2  
Order PSt, open-loop PSt, closed-loop PI, open-loop PI, closed-loop
Rising Downward Rising Downward Rising Downward Rising Downward
1 77.4 58.1 75.9 50.2 46.3 52.5 43.1 73.2
2 16.7 10.1 19.5 13.3 18.9 12.8 8.2 10.1
3 9.8 9.9 13.1 13.0 18.9 11.8 8.2 8.2
4 9.8 9.9 13.1 13.0 12.9 11.3 8.0 8.0
5 9.7 9.6 13.1 13.0 12.9 11.1 8.0 8.0
Tab.3  
Order PSt, open-loop PSt, closed-loop PI, open-loop PI, closed-loop
Rising Downward Rising Downward Rising Downward Rising Downward
1 74.2 66.7 70.1 59.3 46.9 46.4 25.0 64.0
2 14.9 8.2 18.3 12.1 17.3 12.8 12.4 11.9
3 8.1 8.1 11.8 12.0 17.3 12.8 12.3 11.7
4 8.0 8.1 11.8 11.9 13.1 11.8 12.0 11.6
5 8.0 8.0 11.8 11.9 13.1 11.8 12.0 11.6
Tab.4  
Order PSt, open-loop PSt, closed-loop PI, open-loop PI, closed-loop
Rising Downward Rising Downward Rising Downward Rising Downward
apr2 -0.0563 0.0459 -0.0121 0.0059 -0.0935 0.0819 -0.0432 0.0519
apr1 -5.3159 -11.2567 -5.3250 -6.4717 -5.9862 -12.6513 -5.7784 -9.5929
apr0 -6.9883 -23.8002 -4.3828 2.2582 2.6120 -44.9610 -1.0018 -22.5378
Tab.5  
Order PSt, open-loop PSt, closed-loop PI, open-loop PI, closed-loop
Rising Downward Rising Downward Rising Downward Rising Downward
aai2 -0.2705 0.2241 0.2447 0.1605 -0.3006 0.4023 0.2882 0.4947
aai1 416.4972 421.0419 425.7895 432.0343 472.9322 454.0321 442.5777 435.6577
aai0 -53.3152 -130.8355 -74.1318 -100.7710 -59.5895 -532.9812 13.8089 -90.2022
Tab.6  
Order PSt, open-loop PSt, closed-loop PI, open-loop PI, closed-loop
Rising Downward Rising Downward Rising Downward Rising Downward
aao2 0.2602 0.2591 0.2257 0.1924 -0.3100 0.3520 0.1479 0.4289
aao1 407.5656 409.0933 410.7467 413.9241 463.9914 446.2845 443.3160 433.1276
aao0 -4.1002 -68.3572 -70.6057 -100.4592 -53.5528 -518.0316 35.3560 -66.7681
Tab.7  
1 Zhang Y L, Zhang Y, Ru C, et al. A load-lock-compatible nanomanipulation system for scanning electron microscope. IEEE/ASME Transactions on Mechatronics, 2013, 18(1): 230–237
https://doi.org/10.1109/TMECH.2011.2166162
2 Tang H, Li Y. Design, analysis, and test of a novel 2-DOF nanopositioning system driven by dual mode. IEEE Transactions on Robotics, 2013, 29(3): 650–620
https://doi.org/10.1109/TRO.2013.2248536
3 Yong Y K, Moheimani S O R, Kenton B J, et al. Invited review article: High-speed flexure-guided nanopositioning: Mechanical design and control issues. Review of Scientific Instruments, 2012, 83(12): 121101–121122
https://doi.org/10.1063/1.4765048
4 Espinosa H D, Zhu Y, Moldovan N. Design and operation of a mems-based material testing system for nanomechanical characteri-zation. Journal of Microelectromechanical Systems, 2007, 16(5): 1219–1231
https://doi.org/10.1109/JMEMS.2007.905739
5 Fukuda T, Nakajima M, Liu P, et al. Nanofabrication, nanoinstrumentation and nanoassembly by nanorobotic manipulation. International Journal of Robotics Research, 2009, 28(4): 537–547
https://doi.org/10.1177/0278364908097212
6 Wang H, Zhang X. Input coupling analysis and optimal design of a 3-DOF compliant micro-positioning stage. Mechanism and Machine Theory, 2008, 43(4): 400–410
https://doi.org/10.1016/j.mechmachtheory.2007.04.009
7 Kim H, Gweon D G. Development of a compact and long range xyθz nanopositioningstage. Review of Scientific Instruments, 2012, 83(8): 085102–085108
https://doi.org/10.1063/1.4740254
8 Culpepper M L, Anderson G. Design of a low-cost nano-manipulator which utilizes a monolithic, spatial compliant mechanism. Precision Engineering, 2004, 28(4): 469–482
https://doi.org/10.1016/j.precisioneng.2004.02.003
9 Li Y, Xu Q. A totally decoupled piezo-driven XYZ flexure parallel micropositioning stage for micro/nanomanipulation. IEEE Transactions on Automation Science and Engineering, 2011, 8(2): 265– 279
https://doi.org/10.1109/TASE.2010.2077675
10 Wang R, Zhang X. Design & test of a novel planar 3-DOF precision positioning platform with a large magnification. In: Proceedings of 2014 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO). Taipei: IEEE, 2014, 288–295
11 Howell L L. Compliant Mechanisms. New York: Wiley-InterScience, 2001
12 Lobontiu N. Compliant Mechanisms: Design of Flexure Hinges. Boca Raton: CRC Press, 2003
13 Yong Y K, Lu T F, Handley D C. Review of circular flexure hinge design equations and derivation of empirical formulations. Precision Engineering, 2008, 32(2): 63–70
https://doi.org/10.1016/j.precisioneng.2007.05.002
14 Lin R, Zhang X, Long X, et al. Hybrid flexure hinges. Review of Scientific Instruments, 2013, 84(8): 085004–085014
https://doi.org/10.1063/1.4818522
15 Adriaens H J M T S, de Koning W, Banning R. Modeling piezoelectric actuators. IEEE/ASME Transactions on Mechatronics, 2000, 5(4): 331–341
https://doi.org/10.1109/3516.891044
16 Ge P, Jouaneh M. Tracking control of a piezoceramic actuator. IEEE Transactions on Control Systems Technology, 1996, 4(3): 209–216
https://doi.org/10.1109/87.491195
17 Baxter L K. Capacitive Sensors: Design and Applications. Piscataway: IEEE Press, 1997
18 Fleming A J. A review of nanometer resolution position sensors: Operation and performance. Sensors and Actuators A: Physical, 2013, 190: 106–126
https://doi.org/10.1016/j.sna.2012.10.016
19 Tian Y, Shirinzadeh B, Zhang D. Design and dynamics of a 3-DOF flexure-based parallel mechanism for micro/nano manipulation. Microelectronic Engineering, 2010, 87(2): 230–241
https://doi.org/10.1016/j.mee.2009.08.001
20 Yong Y K, Aphale S S, Moheimani S O R. Design, identification, and control of a flexure-based XY stage for fast nanoscale positioning. IEEE Transactions on Nanotechnology, 2009, 8(1): 46–54
https://doi.org/10.1109/TNANO.2008.2005829
21 Leang K K, Fleming A J. High-speed serial-kinematic SPM scanner: Design and drive considerations. Asian Journal of Control, 2009, 11(2): 144–153
https://doi.org/10.1002/asjc.90
22 Zhang X, Wang R. China Patent, 2014103010471, 2014-<month>06</month>-<day>27</day>
23 Bathe K J, Wilson E L. Numerical Methods in Finite Element Analysis. Englewood Cliffs: Prentice-Hall, 1976
Viewed
Full text


Abstract

Cited
  Shared   
  Discussed