|
|
|
Research on Microelectromagnetic Relays |
| LI De-sheng, LIU Ben-dong |
| College of Mechanical Engineering and Applied Electronics Technology, Beijing University of Technology, Beijing 100022, China |
|
|
|
|
Abstract A new microelectromagnetic relay is presented and fabricated based on micromachining technology, aiming at the miniaturization and high manufacturing efficiency of electromagnetic relays. This microrelay is composed of a lower magnetic circuit, a planar exciting coil, and an upper magnetic armature. A complete magnetic circuit is composed, and the ON and OFF states are controlled by the current of the exciting coil. The dimension of this microrelay is 5 mm ? 5 mm ? 0.4 mm. The fabrication process mainly includes lithography, sputtering, electroplating, etching, sacrifice-layer technology, etc. Electromagnetic force is calculated theoretically. The calculation results are used for the optimization design of the armature and the number of turns of the exciting coil. A microelectromagnetic relay is fabricated and the initial test results are given. The resistance of the exciting coil is about 300 Ω. The switch-on state resistance is about 1.7 Ω at an exciting current of about 50 mA.
|
|
Issue Date: 05 March 2006
|
|
|
Viewed |
|
|
|
Full text
|
|
|
|
|
Abstract
|
|
|
|
|
Cited |
|
|
|
|
| |
Shared |
|
|
|
|
| |
Discussed |
|
|
|
|
