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Research progress in tribo-electrochemistry and tribo-electrochemical polishing |
| ZHAI Wenjie |
| School of Mechatronics Engineering, Harbin Institute of Technology, Harbin 150001, China; |
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Abstract In this paper, the status quo and recent progress in the research on tribo-electrochemistry in aqueous and non-aqueous media, respectively, are reviewed. Much more attention has been paid to the tribo-electrochemical mechanisms for the control of friction and wear. Based on a summary of the conventional polishing principles of hard and brittle materials, the tribo-electrochemical polishing method is proposed. The results of the preliminary test show that tribo-electrochemical polishing is promising to become a critical technology in the high efficient polishing and planarization of microelectronic materials.
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Issue Date: 05 December 2007
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