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Electrorheological damper for the ultra-precision
air bearing stage |
| ZHU Yu, JIA Songtao, CHEN Yaying, LI Guang |
| Department of Precision Instruments and Mechanology, Tsinghua University; |
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Abstract This paper illustrates how the electrorheological damper substantially improves the performance of the ultra-precision air bearing stage. Smart materials such as electrorheological fluids have attracted many researchers’ attention because of their resistance changeable performance in different electric fields. Meanwhile, the ultra-precision air bearing stage driven by the linear-motor is characterized by zero mechanical damping and poor anti-disturbance. To solve this problem and consider the characteristics of electrorheological fluids, an electrorheological damper is proposed in this paper. The electrorheological damper’s characteristics in high electric fields are obtained based on the Eyring constitutive model, which smoothly transits from the pre-yield to post-yield region. To enhance the performance of the electrorheological damper, which takes effect only when the stage is going to decelerate or position, the on-off and sliding mode control methods design and optimize the controller. The results prove that by using the advanced sliding mode control method, the characteristics of the ultra-precision air bearing stage can be effectively improved through the introduction of the electrorheological damper.
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Issue Date: 05 June 2008
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| 1 |
Yang K M Modelingand control of an ultraprecision air bearing stage. Dissertation forthe Doctoral DegreeBeijingTsinghua University 2004 (in Chinese)
|
| 2 |
Hidenori S Hitoshi H Nanometer positioning of alinear motor-driven ultraprecision aerostatic table system with electrorheologicalfluid dampersCIRP Annals-ManufacturingTechnology 1999 48(1)289292.
doi:10.1016/S0007‐8506(07)63186‐2
|
| 3 |
Hitoshi H Hidenori S A Study on nanometer positioningtable system equipped with electrorheological fluid unitsJSME International Journal Series C: Mechanical SystemsMachine Elements and Manufacturing 2000 43(1)183189
|
| 4 |
Ming Z Thefluid-solid coupled model analysis and structure optimization of anultraprecision air bearing stage. Dissertation for the Doctoral DegreeBeijingTsinghuaUniversity 2004 (in Chinese)
|
| 5 |
Lionel B Young T C Wereley N M Electrorheological damper analysis using an Eyring constitutiverelationshipJournal of Intelligent MaterialSystems and Structures 2002 136369
|
| 6 |
Jing Y W Zhou Y C Jiang N Modern Control TheoryBeijingMetallurgical Industry Press 2006 (in Chinese)
|
| 7 |
Karnopp D Crosby M J Vibration control using semi-activeforce generatorsJournal of Engineeringfor Industry 1974 619626
|
| 8 |
Karnopp D Activeand semi-active vibration isolationTransactionsof the ASME, Journal of Special 50th Anniversary Design Issue 1995 17(1)117185
|
| 9 |
Christopher E Sarah K S Sliding Mode ControlLondonTaylor &Francis Ltd 1998
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