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Precision control system of two-DOF stage with
linear ultrasonic motor |
| ZHANG Hanlei, SHI Yunlai, ZHAO Chunsheng |
| Precision Driving Laboratory, Nanjing University of Aeronautics and Astronautics |
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Abstract Using an appropriate control method, linear ultrasonic motors can be used in applications requiring high position accuracy. In this paper, a closed loop PI control system is designed to achieve high position accuracy during the control of a two-DOF stage driven by linear ultrasonic motors. Two ultrasonic motors are mounted on the stage to generate motion in two orthogonal directions. The PI control algorithm is used to increase the stability and accuracy of position control. The x-axis mover covers 30 mm forward and backward in less than 0.3 s settling time and the y-axis mover in less than 0.4 s. Experimental results denote that the control strategy proposed in this paper appears to have high efficiency, quick response, and high accuracy.
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Issue Date: 05 December 2008
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