A multi-probe micro-fabrication apparatus based on the friction-induced fabrication method

doi:10.1007/s11465-013-0276-4

Front Mech Eng

2013, Vol. 8

Issue (4) : 333-339 https://doi.org/10.1007/s11465-013-0276-4

RESEARCH ARTICLE

A multi-probe micro-fabrication apparatus based on the friction-induced fabrication method

Zhijiang WU, Chenfei SONG, Jian GUO, Bingjun YU, Linmao QIAN(

)

Tribology Research Institute, Key Laboratory of Advanced Technologies of Materials, Ministry of Education, Southwest Jiaotong University, Chengdu 610031, China

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Abstract

A novel multi-probe micro-fabrication apparatus was developed based on the friction-induced fabrication method. The main parts of the apparatus include actuating device, loading system, and control system. With a motorized XY linear stage, the maximum fabrication area of 50 mm × 50 mm can be achieved, and the maximum sliding speed of probes can be as high as 10 mm/s. Through locating steel micro balls into indents array, the preparation of multi-probe array can be realized by a simple and low-cost way. The cantilever was designed as a structure of deformable parallelogram with two beams, by which the fabrication force can be precisely controlled. Combining the friction-induced scanning with selective etching in KOH solution, various micro-patterns were fabricated on Si(100) surface without any masks or exposure. As a low-cost and high efficiency fabrication device, the multi-probe micro-fabrication apparatus may encourage the development of friction-induced fabrication method and shed new light on the texture engineering.

Keywords friction-induced fabrication silicon surface texture friction multi-probe

Corresponding Author(s): QIAN Linmao,Email:linmao@swjtu.edu.cn

Issue Date: 05 December 2013

Cite this article:

Zhijiang WU,Chenfei SONG,Jian GUO, et al. A multi-probe micro-fabrication apparatus based on the friction-induced fabrication method[J]. Front Mech Eng, 2013, 8(4): 333-339.

URL:

https://academic.hep.com.cn/fme/EN/10.1007/s11465-013-0276-4
https://academic.hep.com.cn/fme/EN/Y2013/V8/I4/333

Fig.1 Sketch of the multi-probe micro-fabrication apparatus

Fig.2 Image of the mechanical part of apparatus

Fig.3 Manufacturing of multi-probe array. (a) Producing the indents array; (b) placing micro probes; (c) flattening the micro probes; (d) envelopment by the wax mold; (e) founding; (f) substrate polishing

Fig.4 Fabrication of the cantilever. (a) Original cantilever; (b) semicircular grooves were cut at both sides of the beam; (c) center parts and centers of the thinnest part were hollowed

Fig.5 Photo of the cantilever with a spring constant of 1378 N/m

Fig.6 Calibration of the spring constant

Fig.7 Route of ellipse with a initial position at (, )

Fig.8 Checked squares fabricated by scanning-scratch under = 1000 mN with a 2 × 2 probe array and etching in the KOH and isopropyl alcohol (IPA) aqueous solution for 6 min

Fig.9 Line array fabricated by scratching under = 500 mN with a 1 × 2 probe array and etching in the KOH and isopropyl alcohol (IPA) aqueous solution for 6 min

Fig.10 Ring fabricated by scratching under = 250 mN with a single probe and etching in the KOH and isopropyl alcohol (IPA) aqueous solution for 6 min

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