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Power spectral density measurement for large
aspheric surfaces |
| CHEN Wei1, YAO Hanmin2, WU Fan2, WU Shibin2, CHEN Qiang2 |
| 1.Xi'an University of Science and Technology; 2.Institute of Optics and Electronics, Chinese Academy of Sciences; |
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Abstract To ensure the safe and normal operation of the whole optical system, it is important to test and evaluate the quality of optical components. The article explores the advantages and disadvantages of general parameters used in aspheric surface testing, the composition of the system, the principle of operation and the design of related power spectral density (PSD) software used in testing large aspheric surfaces with Shack-Hartmann and phase shifting interferometer. The results indicate that PSD can give the spatial frequency distribution of the wavefront aberration when large aperture phase shifting interferometer is used as an instrument to test the wavefront, and this can also be applied as an evaluation standard in testing the quality of optical components. In addition, this paper describes the test results of optical components in the size of 64 mm × 64 mm.
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Issue Date: 05 June 2008
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| 1 |
Yang L . Researchof development of advanced optical manufacture technology. Optical Technology, 1998, (3): 2–5 (in Chinese)
|
| 2 |
Wan Y J, Yuan J H, Yang L, et al.. A model with sub-aperture lap for lapping. Optical Technique, 2005, 31(4): 500–505 (in Chinese)
|
| 3 |
Aikens D M . The origin and evolution of the optics specifications for the NationalIgnition Facility. Proceedings of SPIE, 1995, 2536: 2–12.
doi:10.1117/12.218410
|
| 4 |
Lawson J K, Wolfe C R, Manes K R, et al.. Specification of optical components using thepower spectral density function. Proceedingsof SPIE, 1995, 2536: 38–50.
doi:10.1117/12.218430
|
| 5 |
Aikens D M, Wolfe C R, Lawson J K . The use of power spectral density (PSD) functions inspecifying optics for the National Ignition Facility. Proceedings of SPIE, 1995, 2576: 281–292.
doi:10.1117/12.215604
|
| 6 |
Lawson J K, Aikens D M, English R E, et al.. Power spectral density specifications for high-powerlaser systems. Proceedings of SPIE, 1996, 2775: 345–356.
doi:10.1117/12.246761
|
| 7 |
Wolfe C R, Lawson J K, Kellam M, et al.. Measurement of wavefront structure from large-apertureoptical components by phase-shifting interferometry. Proceedings of SPIE, 1995, 2536: 13–37.
doi:10.1117/12.218420
|
| 8 |
Novak E L . Measurement and analysis optimization of large aperture laser Fizeauinterferometer. Dissertation for the Doctoral Degree. America: the University of Arizona, 1998, 13–22
|
| 9 |
Bennett J M . Comparison of techniques for measuring the roughness of optical surface. Optical Engineering, 1985, 24(3): 380–387
|
| 10 |
Church E L . The precision measurement and characterization of surface finish. Proceedings of SPIE, 1985, 525: 86–95
|
| 11 |
Church E L . Fractal surface finish. Applied Optics, 1988, 27(8): 1518–1526
|
| 12 |
Elson J M, Bennett J M . Calculation of the powerspectral density from surface profile data. Applied Optics, 1995, 34(1): 201–208
|
| 13 |
Zhang R Z, Cai B W, Yang C L, et al.. Calculation of the power spectral density ofthe wavefront. Proceedings of SPIE, 2000, 4231: 295–300.
doi:10.1117/12.402818
|
| 14 |
Youngworth R N, Gallagher B B, Stamper B L . An overview of power spectral density (PSD) calculations. Proceedings of SPIE, 2005, 5869: 58690U-1–58690U-11
|
| 15 |
Xu F, Wei Q Z, Wu F . Analysis about evaluating method of power spectral densityfunction. Optical Instruments, 2000, 22(3): 21–24 (in Chinese)
|
| 16 |
Xu Q, Gu Y Y, Cai L, et al.. Measurement of wavefront power spectral densityof large optical components. Acta OpticaSinica, 2001, 21(3): 344–347 (in Chinese)
|
| 17 |
Shen W X, Xu D Y . Power spectral density functionestimate in high power laser optical element surface. High Power Laser and Particle Beams, 2000, 12(4): 392–396 (in Chinese)
|
| 18 |
Novak E, Ai C Y, Wyant J C . Optical resolution of phase measurements of laser Fizeauinterferometer. Proceedings of SPIE, 1996, 2870: 545–552
|
| 19 |
YU Y J, Li G P . Power spectral density (PSD)in stitching interferometer. Proceedingsof SPIE, 2002, 4780: 126–137.
doi:10.1117/12.451843
|
| 20 |
Wolfe C R, Downie J D, Lawson J K . Measuring the spatial frequency transfer function ofphase-measuring interferometers for laser optics. Proceedings of SPIE, 1996, 2870: 553–557
|
| 21 |
Takaes P Z, Li M X, Furenlid K, et al.. A step-height standard for surface profilercalibration. Proceedings of SPIE, 1993, 1993: 65–74.
doi:10.1117/12.164974
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