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DFB LD manufactured by nanoimprint lithography |
| Lei WANG1,Yiwen ZHANG1,Fei QIU1,Zhimou XU1,Yanli ZHAO1,Yonglin YU1,Ning ZHOU2,Dingli WANG2,Wen LIU3, |
| 1.Wuhan National Laboratory
for Optoelectronics, Huazhong University of Science and Technology,
Wuhan 430074, China; 2.Accelink Technologies
Co. Ltd., Wuhan 430074, China; 3.Wuhan National Laboratory
for Optoelectronics, Huazhong University of Science and Technology,
Wuhan 430074, China；Accelink Technologies
Co. Ltd., Wuhan 430074, China; |
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Abstract Gratings of distributed feedback laser diodes (DFB LDs) have been successfully manufactured by nanoimprint lithography (NIL). Uniform gratings with periods of about 240 nm and phase-shifted in the center have been fabricated by a soft press NIL employing a polymer stamp technology. Moreover, the shape of the grating is rectangle, rather than sinusoidal by holography. The test results show good characteristics of the electrical and spectral output. The results of this study indicate that NIL has high potential for the manufacture of DFB LDs.
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Issue Date: 05 June 2010
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