Design of electronic sections for nano-displacement measuring system

doi:10.1007/s12200-010-0112-y

Front Optoelec Chin

2010, Vol. 3

Issue (4) : 376-381 https://doi.org/10.1007/s12200-010-0112-y

RESEARCH ARTICLE

Design of electronic sections for nano-displacement measuring system

Saeed OLYAEE(

), Samaneh HAMEDI, Zahra DASHTBAN

Nano-Photonics and Optoelectronics Research Laboratory, Faculty of Electrical and Computer Engineering, Shahid Rajaee Teacher Training University (SRTTU), Lavizan 16788, Tehran, Iran

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Abstract

Noncontact displacement measurement is generally based on the interferometry method. In the semiconductor industry, a technique for measuring small features is required as circuit integration becomes denser and the wafer size becomes larger. An interferometric system known as a three-longitudinal-mode heterodyne interferometer (TLMI) is made of two main parts: optical setup and electronic sections. In the optical part, the base and measurement signals having 500-MHz frequency are produced, resulting from interfering three longitudinal modes. The secondary beat frequency to measure the displacement in the TLMI is about 300 kHz. To extract the secondary beat frequency, wide-band amplifiers, double-balanced mixers (DBMs), band-pass filters (BPFs), and low-pass filters (LPFs) are used. In this paper, we design the integrated circuit of a super-heterodyne interferometer with total gain of 56.9 dB in size of 1030 μm×1030 μm.

Keywords nano-displacement double-balanced mixer (DBM) integrated circuit three-longitudinal-mode interferometer

Corresponding Author(s): OLYAEE Saeed,Email:s_olyaee@srttu.edu

Issue Date: 05 December 2010

Cite this article:

Saeed OLYAEE,Samaneh HAMEDI,Zahra DASHTBAN. Design of electronic sections for nano-displacement measuring system[J]. Front Optoelec Chin, 2010, 3(4): 376-381.

URL:

https://academic.hep.com.cn/foe/EN/10.1007/s12200-010-0112-y
https://academic.hep.com.cn/foe/EN/Y2010/V3/I4/376

Fig.1 Block diagram of a measurement system based on heterodyne laser interferometer (CCP: corner cube prism; BS: beam splitter; PBS: polarising beam splitter; LP: linear polarizer; APD: avalanche photodiode)

Fig.2 Block diagram of electronic section of displacement measurement system (BPF: band-pass filter; LPF: low-pass filter; DBM: double-balanced mixer; AMP: amplifier)

Fig.3 Schematic of three-stage cascode amplifier

Fig.4 Schematic of DBM

Fig.5 Schematic of phase detector stage

Fig.6 Gain profile of designed three-stage cascode amplifier

Fig.7 Output voltage of designed integrated circuit

Fig.8 Layout of integrated electronic section of displacement measurement system

Fig.9 Total chip size including pads of electronic section of displacement measurement system (3.44 mm × 3.44 mm)

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