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Frontiers of Optoelectronics

ISSN 2095-2759

ISSN 2095-2767(Online)

CN 10-1029/TN

Postal Subscription Code 80-976

Front Optoelec Chin    2010, Vol. 3 Issue (4) : 382-386    https://doi.org/10.1007/s12200-010-0125-6
RESEARCH ARTICLE
Method of optical interference testing error separation
Yunpeng FENG1, Xiaoyan QIAO2, Haobo CHENG1(), Yongfu WEN1, Ya GAO1, Huijing ZHANG1
1. School of Optoelectronics, Beijing Institute of Technology, Beijing 100081, China; 2. School of Electrical and Electronic Engineering, North China Electric Power University, Beijing 102206, China
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Abstract

During the testing of aspherical mirrors through the null compensation method, structural parameters observe changes which affect the test results of interference pattern. Several errors are induced due to the maladjustment among compensator, interferometer and the mirror under test. It is important for optical manufacturing, testing and the actual alignment process to distinguish between the aberrations arising from both surface errors and maladjustment of the null compensation testing system. The purpose of this paper is to obtain the real aspheric surface errors during the optical polishing process. In this work, we have established an error separation model to the least square method to separate the errors caused by the maladjustment of the testing system from the test results. Finally, the analysis and simulation results show that high precision figure errors can be obtained by separating the maladjustment errors.

Keywords aspheric mirror      interferometric testing      adjustment error      maladjustment      error separation     
Corresponding Author(s): CHENG Haobo,Email:h_cheng@yahoo.cn   
Issue Date: 05 December 2010
 Cite this article:   
Yunpeng FENG,Xiaoyan QIAO,Haobo CHENG, et al. Method of optical interference testing error separation[J]. Front Optoelec Chin, 2010, 3(4): 382-386.
 URL:  
https://academic.hep.com.cn/foe/EN/10.1007/s12200-010-0125-6
https://academic.hep.com.cn/foe/EN/Y2010/V3/I4/382
Fig.1  Diagram of aspheric surface test (: center of curvature of aspheric surface; ': paraxial image distance of compensator)
radius/mmthickness/mmglassdiameter/mmconic
0infinityinfinity-0-
1205.7026251.514748100-
2infinity266.9436-100-
3-93.2908121.51474850-
4-318.1035008.855-56-
5-4800-5008.86mirror601.2184-1
6-318.103-121.51474856-
7-93.2908-266.944-50-
8infinity-251.514748100-
9205.026-20-100-
10--100-92.91437-
Tab.1  Designed data of testing system
Fig.2  Zernike coefficients versus
Fig.3  Zernike coefficients versus
Fig.4  Flow chart for adjustment program
Fig.5  Comparison of aberrations. (a) With maladjustment (PV=3.3922, RMS=0.59348); (b) without maladjustment (PV=0.007234, RMS=0.002486)
Fig.6  Process of adjustment. (a) After the first adjustment (PV=0.15786, RMS=0.028318); (b) after the second adjustment (PV=0.008371, RMS=0.002675); (c) after the third adjustment (PV=0.007036, RMS=0.002334)
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