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Frontiers of Optoelectronics

ISSN 2095-2759

ISSN 2095-2767(Online)

CN 10-1029/TN

Postal Subscription Code 80-976

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Front Optoelec Chin    2010, Vol. 3 Issue (4) : 408-412    https://doi.org/10.1007/s12200-010-0127-4
RESEARCH ARTICLE
Magnetorheological finishing of optical surface combined with symmetrical tool function
Haobo CHENG1,2(), Yunpeng FENG1, Tan WANG1, Zhichao DONG1
1. School of Optoelectronics, Beijing Institute of Technology, Beijing 100081, China; 2. Department of Mechanical and Automation Engineering, The Chinese University of Hong Kong, Hong Kong, China
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Abstract

This research is aimed at the development of computer-aided polishing technology for optical surfaces using magnetorheological (MR) fluid as medium. The mechanism of a dual-axis polishing wheel and the mathematical model combined with a symmetrical tool function are demonstrated. The effects of speed, gap, time and geometric parameters of the tool have been experimentally evaluated by polishing a parabolic BK7 mirror in 120 mm diameter. The surface topography presented an obvious amelioration, and the shape accuracy decreased to 0.067λ from 0.519λ (λ=632.8 nm, RMS) after 75 min finishing.
Keywords magnetorheological finishing (MRF)      material removal      symmetrical tool function     
Corresponding Author(s): CHENG Haobo,Email:chenghaobo@tsinghua.org.cn   
Issue Date: 05 December 2010
 Cite this article:   
Haobo CHENG,Yunpeng FENG,Tan WANG, et al. Magnetorheological finishing of optical surface combined with symmetrical tool function[J]. Front Optoelec Chin, 2010, 3(4): 408-412.
 URL:  
https://academic.hep.com.cn/foe/EN/10.1007/s12200-010-0127-4
https://academic.hep.com.cn/foe/EN/Y2010/V3/I4/408
Fig.1  Photo of MRF tool
Fig.2  (a) Photo of wheel tool; (b) establishment of coordinates
Fig.3  Schematic of polishing area
Fig.4  Profile of simulated removal function. (a) Symmetrical removal function by authors; (b) top view of removal function; (c) top view of asymmetrical removal function by QED
No.materialgap/mmmagnetic particle fraction/%(rotation/revolution)/(r·min–2)
1BK70.830250/30
2BK71.040300/30
3BK71.250200/30
4BK71.040300/40
5BK71.250200/40
6BK70.830250/40
Tab.1  Experimental parameters
Fig.5  Profile of experimental removal function. (a) cross-section; (b) cross-section
Fig.6  Peak and volume removal rate of material removal
Fig.7  Surface topographies. (a) PV=1.726, and RMS=0.519 before MRF; (b) PV=0.319, and RMS=0.067 after MRF
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doi: 10.1117/12.369175
2 Dai Y F, Song C, Peng X Q, Shi F. Calibration and prediction of removal function in magnetorheological finishing. Applied Optics , 2010, 49(3): 298-306
doi: 10.1364/AO.49.000298
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doi: 10.1016/j.jmatprotec.2009.03.011
[1] Binbin CHEN, Haobo CHENG, Hon Yuen TAM, Hui LI. Design of integrated-electrode tool for electrorheological finishing of optical glasses[J]. Front Optoelec Chin, 2011, 4(4): 467-471.
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