Slow light in silicon microring resonators

doi:10.1007/s12200-011-0137-x

Front Optoelec Chin

2011, Vol. 4

Issue (3) : 282-287 https://doi.org/10.1007/s12200-011-0137-x

RESEARCH ARTICLE

Slow light in silicon microring resonators

Yingtao HU, Xi XIAO, Zhiyong LI, Yuntao LI, Yude YU, Jinzhong YU(

)

State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China

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Abstract

This paper experimentally investigated slow light effect in cascaded silicon-on-insulator (SOI) microring resonators. Double channel and single channel side-coupled integrated spaced sequence of resonators (SCISSOR) devices were fabricated with electron beam lithography and dry etching technology. The delay performances of the SCISSOR devices were demonstrated using non-return-to-zero (NRZ) and return-to-zero (RZ) signals at different bit rates. Group delays and bandwidths of cascaded microrings are significantly enhanced compared with single microring.

Keywords slow light optical buffer group delay delay line microring resonator

Corresponding Author(s): YU Jinzhong,Email:jzyu@semi.ac.cn

Issue Date: 05 September 2011

Cite this article:

Zhiyong LI,Yuntao LI,Yude YU, et al. Slow light in silicon microring resonators[J]. Front Optoelec Chin, 2011, 4(3): 282-287.

URL:

https://academic.hep.com.cn/foe/EN/10.1007/s12200-011-0137-x
https://academic.hep.com.cn/foe/EN/Y2011/V4/I3/282

Fig.1 Schematic diagram of double channel SCISSOR

Fig.2 Response curves of (a) maximal group delay, bandwidth and (b) insertion loss when different resonance spacings are introduced

Fig.3 (a) SEM image of fabricated cascaded microring structure; (b) transmission spectra of 1 and 3-stage double channel SCISSOR devices

Fig.4 Group delays of 3-stage double channel SCISSOR device at different bit rates. (a) 1 Gbps; (b) 3 Gbps; (c) 5 Gbps; (d) 12.5 Gbps

Fig.5 (a) SEM image of 8-stage and (b) transmission spectra of 1, 2, 4 and 8-stage single channel SCISSOR devices

Fig.6 Group delays of 1, 2, 4 and 8-stage single channel SCISSOR devices at (a) 1 Gbps and (b) 3 Gbps RZ signals

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