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Frontiers of Optoelectronics

ISSN 2095-2759

ISSN 2095-2767(Online)

CN 10-1029/TN

Postal Subscription Code 80-976

Front Optoelec Chin    2011, Vol. 4 Issue (2) : 213-216    https://doi.org/10.1007/s12200-011-0170-9
RESEARCH ARTICLE
Investigation of electrorheological fluid for optical finishing
Hui LI1, Haobo CHENG1(), Yunpeng FENG1, H. Y. TAM2, Yongfu WEN1
1. School of Optoelectronics, Beijing Institute of Technology, Beijing 100081, China; 2. Department of Manufacturing Engineering and Engineering Management, City University of Hong Kong, Hong Kong, China
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Abstract

Electrorheological (ER) finishing is a promising technique for polishing optical mirrors lenses. Silicone oil-based ER finishing fluid with ceria particles as abrasive was developed, whose dispersed phase was alumina, titanium dioxide, silica, and starch, respectively. Experiments were performed in detail under the voltage of 3000 V, after 25 min of polishing a K9 glass. By using the ER fluid developed in this paper, with 47.62% starch, 47.62% silicone oil, and 4.76% ceria, the surface roughness of the K9 glass was reduced from 8.46 nm Ra to 3.45 nm Ra. The result verifies the validity of the developed ER fluid.

Keywords electrorheological fluid      polishing slurry      shear stress     
Corresponding Author(s): CHENG Haobo,Email:chenghaobo@tsinghua.org.cn   
Issue Date: 05 June 2011
 Cite this article:   
Hui LI,Haobo CHENG,Yunpeng FENG, et al. Investigation of electrorheological fluid for optical finishing[J]. Front Optoelec Chin, 2011, 4(2): 213-216.
 URL:  
https://academic.hep.com.cn/foe/EN/10.1007/s12200-011-0170-9
https://academic.hep.com.cn/foe/EN/Y2011/V4/I2/213
Fig.1  Principle of ER finishing
Fig.1  Principle of ER finishing
formulabasal liquiddispersed phasepolishing abrasive
Asilicone oilaluminaceria
Bsilicone oiltitanium dioxideceria
Csilicone oilsilicaceria
Dsilicone oilstarchceria
Tab.1  ER polishing slurry with different dispersed phases
Fig.2  Shear stress according to applied voltage for fluid with and without ceria. (a) Dispersed phase is silicon dioxide; (b) dispersed phase is titanium dioxide
Fig.2  Shear stress according to applied voltage for fluid with and without ceria. (a) Dispersed phase is silicon dioxide; (b) dispersed phase is titanium dioxide
numberdispersed phase starch/gbasal liquid silicone oil/gpolishing abrasive ceria/g
F13 (30.0 wt.%)7 (70.0 wt.%)
23 (25.6 wt.%)7 (66.7wt.%)0.5 (4.7wt.%)
33 (27.3 wt.%)7 (63.6wt.%)1.0 (9.1 wt.%)
43 (26.1 wt.%)7 (60.9 wt.%)1.5 (13 wt.%)
G14 (40.0 wt.%)6 (60.0 wt.%)
24 (38.1 wt.%)6 (38.1 wt.%)0.5 (4.8 wt.%)
34 (36.4 wt.%)6 (54.4 wt.%)1.0 (9.1 wt.%)
44 (34.8 wt.%)6 (34.8 wt.%)1.5 (13 wt.%)
H15 (50.0 wt.%)5 (50.0 wt.%)
25 (47.6 wt.%)5 (47.6 wt.%)0.5 (4.8 wt.%)
35 (45.5 wt.%)5 (45.5 wt.%)1.0 (9.0 wt.%)
45 (43.5 wt.%)5 (43.5 wt.%)1.5 (13.0 wt.%)
Tab.2  Dispersed phase is starch, ER polishing slurry with different formulas
Fig.3  Shear stress according to applied voltage for formula. (a) 3 g of starch; (b) 4 g of starch; (c) 5 g of starch
Fig.3  Shear stress according to applied voltage for formula. (a) 3 g of starch; (b) 4 g of starch; (c) 5 g of starch
Fig.4  Breakdown voltage versus percent of ceria for content of starch
Fig.4  Breakdown voltage versus percent of ceria for content of starch
Fig.5  Surface roughness () of K9 glass after polishing with ER fluid. (a) Before polishing; (b) after polishing
Fig.5  Surface roughness () of K9 glass after polishing with ER fluid. (a) Before polishing; (b) after polishing
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