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Investigation of electrorheological fluid for optical finishing |
Hui LI1, Haobo CHENG1( ), Yunpeng FENG1, H. Y. TAM2, Yongfu WEN1 |
| 1. School of Optoelectronics, Beijing Institute of Technology, Beijing 100081, China; 2. Department of Manufacturing Engineering and Engineering Management, City University of Hong Kong, Hong Kong, China |
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Abstract Electrorheological (ER) finishing is a promising technique for polishing optical mirrors lenses. Silicone oil-based ER finishing fluid with ceria particles as abrasive was developed, whose dispersed phase was alumina, titanium dioxide, silica, and starch, respectively. Experiments were performed in detail under the voltage of 3000 V, after 25 min of polishing a K9 glass. By using the ER fluid developed in this paper, with 47.62% starch, 47.62% silicone oil, and 4.76% ceria, the surface roughness of the K9 glass was reduced from 8.46 nm Ra to 3.45 nm Ra. The result verifies the validity of the developed ER fluid.
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| Keywords
electrorheological fluid
polishing slurry
shear stress
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Corresponding Author(s):
CHENG Haobo,Email:chenghaobo@tsinghua.org.cn
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Issue Date: 05 June 2011
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