Measurement of optical mirror with a small-aperture interferometer

doi:10.1007/s12200-012-0233-6

Front Optoelec

2012, Vol. 5

Issue (2) : 218-223 https://doi.org/10.1007/s12200-012-0233-6

RESEARCH ARTICLE

Measurement of optical mirror with a small-aperture interferometer

Ya GAO¹, Hon Yuen TAM², Yongfu WEN¹, Huijing ZHANG¹, Haobo CHENG¹(

)

1. School of Optoelectronics, Beijing Institute of Technology, Beijing 100081, China; 2. Department of Manufacturing Engineering and Engineering Management, City University of Hong Kong, Hong Kong, China

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Abstract

In this paper, the principle of subaperture stitching interferometry was introduced. A testing stage with five degrees of freedom for stitching interferometry was built. A model based on least-squares method and error averaging method for data processing was established, which could reduce error accumulation and improve the precision. A 100 mm plane mirror was measured with a 50 mm aperture interferometer by means of stitching interferometry. Compared with the results by a 100 mm interferometer, peak to valley (PV) and root mean square (RMS) of the phase distribution residual are 0.0038λ and 0.0004λ, respectively. It proved that the model and method are helpful for large optical measurement.

Keywords subaperture stitching interferometry residual error

Corresponding Author(s): CHENG Haobo,Email:chenghaobo@tsinghua.org.cn

Issue Date: 05 June 2012

Cite this article:

Ya GAO,Hon Yuen TAM,Yongfu WEN, et al. Measurement of optical mirror with a small-aperture interferometer[J]. Front Optoelec, 2012, 5(2): 218-223.

URL:

https://academic.hep.com.cn/foe/EN/10.1007/s12200-012-0233-6
https://academic.hep.com.cn/foe/EN/Y2012/V5/I2/218

Fig.1 Illustration of principle

Tab.1 Stage parameters

Fig.2 Translation stage

Fig.3 Location of nine subapertures

Fig.4 Measurements of nine subapertures separately (unit: )

Fig.5 Data processing results of (a) stitching; (b) measurement (unit: )

Fig.6 Results after eliminating tilt error. (a) Stitching; (b) measurement (unit: )

Fig.7 Deviation (unit: )

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