High precision mode of subaperture stitching for optical surfaces measurement

doi:10.1007/s12200-013-0306-1

Front Optoelec

2013, Vol. 6

Issue (2) : 167-174 https://doi.org/10.1007/s12200-013-0306-1

RESEARCH ARTICLE

High precision mode of subaperture stitching for optical surfaces measurement

Huijing ZHANG¹, Haobo CHENG¹(

), Hon Yuen TAM², Yongfu WEN¹, Dongmei ZHOU¹

1. School of Optoelectronics, Beijing Institute of Technology, Beijing 100081, China; 2. Department of Mechanical and Biomedical Engineering, City University of Hong Kong, Hong Kong, China

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Abstract

Subaperture stitching (SAS) provides us with an attractive way of extending the effective aperture and dynamic range of phase measuring interferometers. Accuracy of stitching algorithm becomes the key factor in the SAS technology. In this paper, the basic principle of SAS was introduced and four modes of SAS were discussed. The stitching experiments were done through the SSI-300 workstation designed and developed independently. There were several comparisons between the four different stitching methods and the measurement of full aperture. The results suggest that the global error averaging mode with reference of subaperture near optic axis is of high precision.

Keywords optical testing subaperture stitching (SAS) algorithm stitching mode

Corresponding Author(s): CHENG Haobo,Email:chenghaobo@tsinghua.org.cn

Issue Date: 05 June 2013

Cite this article:

Huijing ZHANG,Haobo CHENG,Hon Yuen TAM, et al. High precision mode of subaperture stitching for optical surfaces measurement[J]. Front Optoelec, 2013, 6(2): 167-174.

URL:

https://academic.hep.com.cn/foe/EN/10.1007/s12200-013-0306-1
https://academic.hep.com.cn/foe/EN/Y2013/V6/I2/167

Fig.1 Two circular stitching schematic diagram

Fig.2 SSI-300 structure

Fig.3 Location of five subapertures

Fig.4 Stitching results of five subapertures and single point figures in different stitching modes

Tab.1 Stitching precision of five subapertures (:)

Fig.5 Dividing method of nine subapertures

Fig.6 Stitching results of nine subaperture and single point figures in different modes

Tab.2 Stitching precision of nine subapertures (:)

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