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Frontiers of Optoelectronics

ISSN 2095-2759

ISSN 2095-2767(Online)

CN 10-1029/TN

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Front. Optoelectron.    2015, Vol. 8 Issue (3) : 306-313    https://doi.org/10.1007/s12200-014-0401-y
RESEARCH ARTICLE
Profile and roughness of electrorheological finishing optical surfaces
Haobo CHENG1,*(),Jingshi SU1,Yong CHEN1,Hon-Yuen TAM2
1. School of Optoelectronics, Joint Research Center for Optomechatronics Design and Engineering, Beijing Institute of Technology, Beijing 100081, China
2. Department of Mechanical and Biomedical Engineering, City University of Hong Kong, Hong Kong, China
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Abstract

This paper focuses on the process of electrorheological (ER) finishing optical surfaces. Experiments on K9 mirrors were conducted. In one experiment, the operating distance was varied over 0.5–0.8 mm with the voltage at 2000 V. The maximum peak-to-valley (PV) reduction was obtained at the distance of 0.5 mm, where the PV value was reduced from 58.71 to 25.03 nm. In another experiment, the voltage was varied over 1500–3000 V with operating distance at 0.5 mm. The final surface roughness (Ra) achieved was as low as 2.5 nm. A higher voltage produced a higher relative reduction of the Ra. These experimental results validated the process.
Keywords finishing      surface roughness      electrorheological (ER)     
Corresponding Author(s): Haobo CHENG   
Online First Date: 25 April 2014    Issue Date: 18 September 2015
 Cite this article:   
Haobo CHENG,Jingshi SU,Yong CHEN, et al. Profile and roughness of electrorheological finishing optical surfaces[J]. Front. Optoelectron., 2015, 8(3): 306-313.
 URL:  
https://academic.hep.com.cn/foe/EN/10.1007/s12200-014-0401-y
https://academic.hep.com.cn/foe/EN/Y2015/V8/I3/306
Fig.1  Simulation of electric field strength along z-axis
material air resistivity material resistivity supplied voltage element type
0Cr18Ni9 10 6 Ω ? m 9.7 × 10 - 8 Ω ? m 1.5, 2.0, 2.5, 3.0 kV PLANE67 & INF110
Tab.1  Finite element analysis parameters
Fig.2  Finite element analysis of electric field around tool head
Fig.3  Changes of surface profile (U = 2000 V)
z/mm before ( a 1 )/nm after ( a 2 )/nm ( a 1 - a 2 )/nm K/%
0.5 58.71 25.03 33.68 57.37
0.6 55.00 29.66 25.34 46.07
0.7 59.33 37.70 21.63 36.46
0.8 58.40 41.09 17.31 29.64
Tab.2  PV vs z
z/mm before ( a 1 )/nm after ( a 2 )/nm ( a 1 - a 2 )/nm K/%
0.5 7.82 3.67 4.15 53.07
0.6 6.24 3.48 2.76 44.23
0.7 8.62 5.30 3.32 38.52
0.8 10.14 4.79 5.35 52.76
Tab.3  RMS vs z
Fig.4  Relationships between relative change of PV and of RMS and operating distance (U = 2000 V)
Fig.5  Changes of the surface roughness (operating distance= 1.5 mm)
U/V before ( a 1 )/nm after ( a 2 )/nm ( a 1 - a 2 )/nm K/%
1500 4.05 2.53 1.52 37.53
2000 8.46 3.92 4.54 53.66
2500 7.34 2.62 4.72 64.31
3000 8.47 2.77 5.70 67.30
Tab.4  Ra vs U
Fig.6  Relationship between relative change of Ra and supply voltage (operating distance= 0.5 mm)
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[1] Binbin CHEN, Haobo CHENG, Hon Yuen TAM, Hui LI. Design of integrated-electrode tool for electrorheological finishing of optical glasses[J]. Front Optoelec Chin, 2011, 4(4): 467-471.
[2] Haobo CHENG, Yunpeng FENG, Tan WANG, Zhichao DONG. Magnetorheological finishing of optical surface combined with symmetrical tool function[J]. Front Optoelec Chin, 2010, 3(4): 408-412.
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