Thermo-optic phase shifters based on silicon-on-insulator platform: state-of-the-art and a review

doi:10.1007/s12200-022-00012-9

Front. Optoelectron.

2022, Vol. 15

Issue (1) : 9 https://doi.org/10.1007/s12200-022-00012-9

REVIEW ARTICLE

Thermo-optic phase shifters based on silicon-on-insulator platform: state-of-the-art and a review

Shengping Liu, Junbo Feng(

), Ye Tian, Heng Zhao, Li Jin, Boling Ouyang, Jiguang Zhu, Jin Guo

Chongqing United Microelectronics Center, Chongqing 401332, China

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Abstract

Silicon photonic platforms offer relevance to large markets in many applications, such as optical phased arrays, photonic neural networks, programmable photonic integrated circuits, and quantum computation devices. As one of the basic tuning devices, the thermo-optic phase shifter (TOPS) plays an important role in all these applications. A TOPS with the merits of easy fabrication, low power consumption, small thermal time constant, low insertion loss, small footprint, and low crosstalk, is needed to improve the performance and lower the cost of the above applications. To meet these demands, various TOPS have been proposed and experimentally demonstrated on different foundry platforms In this paper, we review the state-of-the-art of TOPS, including metal heater, doped silicon, silicide, with silicon substrate undercut for heat insulation, folded waveguide structure, and multi-pass waveguide structure. We further compare these TOPSs and propose the directions of the future developments on TOPS.

Keywords Thermo-optic phase shifter Photonic integrated circuits (PICs) Optical switches Silicon photonics

Corresponding Author(s): Junbo Feng

Issue Date: 06 May 2022

Cite this article:

Shengping Liu,Junbo Feng,Ye Tian, et al. Thermo-optic phase shifters based on silicon-on-insulator platform: state-of-the-art and a review[J]. Front. Optoelectron., 2022, 15(1): 9.

URL:

https://academic.hep.com.cn/foe/EN/10.1007/s12200-022-00012-9
https://academic.hep.com.cn/foe/EN/Y2022/V15/I1/9

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