Characterization and tribological application
of diamond-like carbon (DLC) films prepared by radio-frequency plasma-enhanced
chemical vapor deposition (RF-PECVD) technique
Characterization and tribological application
of diamond-like carbon (DLC) films prepared by radio-frequency plasma-enhanced
chemical vapor deposition (RF-PECVD) technique
Ning CAO,Zhen-yi FEI,Yong-xin QI,Wen-wen CHEN,Lu-lu SU,Qi WANG,Mu-sen LI,
Key Laboratory of Liquid
Structure and Heredity of Materials (Ministry of Education), Shandong
University, Jinan 250061, China;
Abstract：Diamond-like carbon (DLC) films were successfully prepared on glass substrates and surfaces of selenium drums via radio frequency plasma enhanced chemical vapor deposition method. The microstructure, surface morphology, hardness, film adhesion, and tribological properties of the films were characterized and evaluated by X-ray photoelectron spectroscopy, atomic force microscopy, and micro-sclerometer and friction-wear spectrometer. The results showed that DLC films have smooth surfaces, homogeneous particle sizes, and excellent tribological properties, which can be used to improve the surface quality of the selenium drums and prolong their service life.
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