1. Institute of Semiconductor Manufacturing Research, Shenzhen University, Shenzhen 518060, China 2. Shenzhen Silver Basis Technology Co., Ltd., Shenzhen 518108, China 3. Institute of Microelectronics, Shenzhen University, Shenzhen 518060, China 4. Shenzhen Key Laboratory of High Performance Nontraditional Manufacturing, College of Mechatronics and Control Engineering, Shenzhen University, Shenzhen 518060, China
The consumer demand for emerging technologies such as augmented reality (AR), autopilot, and three-dimensional (3D) internet has rapidly promoted the application of novel optical display devices in innovative industries. However, the micro/nanomanufacturing of high-resolution optical display devices is the primary issue restricting their development. The manufacturing technology of micro/nanostructures, methods of display mechanisms, display materials, and mass production of display devices are major technical obstacles. To comprehensively understand the latest state-of-the-art and trigger new technological breakthroughs, this study reviews the recent research progress of master molds produced using nanoimprint technology for new optical devices, particularly AR glasses, new-generation light-emitting diode car lighting, and naked-eye 3D display mechanisms, and their manufacturing techniques of master molds. The focus is on the relationships among the manufacturing process, microstructure, and display of a new optical device. Nanoimprint master molds are reviewed for the manufacturing and application of new optical devices, and the challenges and prospects of the new optical device diffraction grating nanoimprint technology are discussed.
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