Advanced flexible humidity sensors: structures, techniques, mechanisms and performances
Yuzhe Zhang1, Yuxi Liu1, Lifei Lin2,4, Man Zhou1,3, Wang Zhang2, Liwei Lin2,3(), Zhongyu Li1,3(), Yuanzhe Piao2,6(), Sun Ha Paek5,6
1. School of Environmental Science and Engineering, Changzhou University, Changzhou 213164, China 2. Department of Applied Bioengineering, Graduate School of Convergence Science and Technology, Seoul National University, Seoul 08826, Republic of Korea 3. Jiangsu Key Laboratory of Advanced Catalytic Materials and Technology, School of Petrochemical Engineering, Changzhou University, Changzhou 213164, China 4. College of Chemistry and Molecular Sciences, Wuhan University, Wuhan 430072, China 5. Department of Neurosurgery, Movement Disorder Center, Seoul National University Hospital, Seoul 03080, Republic of Korea 6. Advanced Institutes of Convergence Technology, Suwon-si, Gyeonggi-do 16229, Republic of Korea
Flexible humidity sensors are widely used in many fields, such as environmental monitoring, agricultural soil moisture content determination, food quality monitoring and healthcare services. Therefore, it is essential to measure humidity accurately and reliably in different conditions. Flexible materials have been the focusing substrates of humidity sensors because of their rich surface chemical properties and structural designability. In addition, flexible materials have superior ductility for different conditions. In this review, we have summarized several sensing mechanisms, processing techniques, sensing layers and substrates for specific humidity sensing requirements. Aadditionally, we have sorted out some cases of flexible humidity sensors based on different functional materials. We hope this paper can contribute to the development of flexible humidity sensors in the future.
W H, Deng Q H, Li J, Chen et al.. A humidity-induced large electronic conductivity change of 107 on a metal-organic framework for highly sensitive water detection.Angewandte Chemie International Edition, 2023, 135(31): 202305977 https://doi.org/10.1002/anie.202305977
2
Y, Zhu X, Dong J, Cheng et al.. Ultra-thin CoAl layered double hydroxide nanosheets for the construction of highly sensitive and selective QCM humidity sensor.Chinese Chemical Letters, 2023, 34(8): 107930 https://doi.org/10.1016/j.cclet.2022.107930
3
H, Fang D, Yao X, Gao et al.. Flexible sensors with tannin-modified vertical graphene arrays for the highly sensitive detection of humidity and strain.Sensors and Actuators A: Physical, 2023, 352: 114213 https://doi.org/10.1016/j.sna.2023.114213
4
D, Zhang M, Wang W, Zhang et al.. Flexible humidity sensing and portable applications based on MoSe2 nanoflowers/copper tungstate nanoparticles.Sensors and Actuators B: Chemical, 2020, 304: 127234 https://doi.org/10.1016/j.snb.2019.127234
5
L, Chen Y, Xu Y, Liu et al.. Flexible and transparent electronic skin sensor with sensing capabilities for pressure, temperature, and humidity.ACS Applied Materials & Interfaces, 2023, 15(20): 24923–24932 https://doi.org/10.1021/acsami.3c03829
6
X, Chen K, Ma J, Ou et al.. Fast-response non-contact flexible humidity sensor based on direct-writing printing for respiration monitoring.Biosensors, 2023, 13(8): 792 https://doi.org/10.3390/bios13080792
7
T, Cheng Y Z, Zhang S, Wang et al.. Conductive hydrogel-based electrodes and electrolytes for stretchable and self-healable supercapacitors.Advanced Functional Materials, 2021, 31(24): 2101303 https://doi.org/10.1002/adfm.202101303
8
Z, Xu D, Zhang X, Liu et al.. Self-powered multifunctional monitoring and analysis system based on dual-triboelectric nanogenerator and chitosan/activated carbon film humidity sensor.Nano Energy, 2022, 94: 106881 https://doi.org/10.1016/j.nanoen.2021.106881
9
S, Zeng Q, Pan Z, Huang et al.. Ultrafast response of self-powered humidity sensor of flexible graphene oxide film.Materials & Design, 2023, 226: 111683 https://doi.org/10.1016/j.matdes.2023.111683
10
X, Guan Y, Yu Z, Hou et al.. A flexible humidity sensor based on self-supported polymer film.Sensors and Actuators B: Chemical, 2022, 358: 131438 https://doi.org/10.1016/j.snb.2022.131438
11
P, Guo B, Tian J, Liang et al.. An all-printed, fast response flexible humidity sensor based on hexagonal-WO3 nanowires for multifunctional applications.Advanced Materials, 2023, 35: 2304420 https://doi.org/10.1002/adma.202304420
12
Y, Sun X, Gao S, A et al.. Hydrophobic multifunctional flexible sensors with a rapid humidity response for long-term respiratory monitoring.ACS Sustainable Chemistry & Engineering, 2023, 11(6): 2375–2386 https://doi.org/10.1021/acssuschemeng.2c06162
13
W, Zhang S, Piao L, Lin et al.. Wearable and antibacterial HPMC-anchored conductive polymer composite strain sensor with high gauge factors under small strains.Chemical Engineering Journal, 2022, 435: 135068 https://doi.org/10.1016/j.cej.2022.135068
14
Z, Liu D, Qi W R, Leow et al.. 3D-structured stretchable strain sensors for out-of-plane force detection.Advanced Materials, 2018, 30(26): 1707285 https://doi.org/10.1002/adma.201707285
15
B, Xie H, You H, Qian et al.. High-performance flexible humidity sensor based on MoOx nanoparticle films for monitoring human respiration and non-contact sensing.ACS Applied Nano Materials, 2023, 6(8): 7011–7021 https://doi.org/10.1021/acsanm.3c01131
16
K, Xu Y, Fujita Y, Lu et al.. A wearable body condition sensor system with wireless feedback alarm functions.Advanced Materials, 2021, 33(18): 2008701 https://doi.org/10.1002/adma.202008701
Y F, Jiang C Y, Guo X F, Zhang et al.. Er2O3 nanospheres with fast response to humidity for non-contact sensing.Rare Metals, 2023, 42(1): 56–63 https://doi.org/10.1007/s12598-022-02165-0
19
L, Lin Y, Choi T, Chen et al.. Superhydrophobic and wearable TPU based nanofiber strain sensor with outstanding sensitivity for high-quality body motion monitoring.Chemical Engineering Journal, 2021, 419: 129513 https://doi.org/10.1016/j.cej.2021.129513
20
R A, Soomro S, Jawaid Q, Zhu et al.. A mini-review on MXenes as versatile substrate for advanced sensors.Chinese Chemical Letters, 2020, 31(4): 922–930 https://doi.org/10.1016/j.cclet.2019.12.005
21
Y, Wan S, Zhang C, Zhao et al.. A flexible humidity sensor with wide range, high linearity, and fast response based on ultralong Na2Ti3O7 nanowires.ACS Applied Materials & Interfaces, 2023, 15(13): 16865–16873 https://doi.org/10.1021/acsami.2c21976
22
Y, Zhu W, Zhang J Xu . Preparation of functional ordered mesoporous carbons and their application as the QCM sensor with ultra-low humidity.Chinese Chemical Letters, 2020, 31(8): 2150–2154 https://doi.org/10.1016/j.cclet.2019.12.024
23
J, Wang Q, Lin R, Zhou et al.. Humidity sensors based on composite material of nano-BaTiO3 and polymer RMX.Sensors and Actuators B: Chemical, 2002, 81(2–3): 248–253 https://doi.org/10.1016/S0925-4005(01)00959-5
24
A M E S, Raj C, Mallika K, Swaminathan et al.. Zinc(II) oxide‒zinc(II) molybdate composite humidity sensor.Sensors and Actuators B: Chemical, 2002, 81(2–3): 229–236 https://doi.org/10.1016/S0925-4005(01)00957-1
25
Y, Zhang K, Yu D, Jiang et al.. Zinc oxide nanorod and nanowire for humidity sensor.Applied Surface Science, 2005, 242(1–2): 212–217 https://doi.org/10.1016/j.apsusc.2004.08.013
26
R J, Wu Y L, Sun C C, Lin et al.. Composite of TiO2 nanowires and Nafion as humidity sensor material.Sensors and Actuators B: Chemical, 2006, 115(1): 198–204 https://doi.org/10.1016/j.snb.2005.09.001
27
P G, Su C S Wang . In situ synthesized composite thin films of MWCNTs/PMMA doped with KOH as a resistive humidity sensor.Sensors and Actuators B: Chemical, 2007, 124(2): 303–308 https://doi.org/10.1016/j.snb.2006.12.034
28
P G, Su C P Wang . Flexible humidity sensor based on TiO2 nanoparticles-polypyrrole-poly-[3-(methacrylamino)propyl] trimethyl ammonium chloride composite materials.Sensors and Actuators B: Chemical, 2008, 129(2): 538–543 https://doi.org/10.1016/j.snb.2007.09.011
29
X, Song Q, Qi T, Zhang et al.. A humidity sensor based on KCl-doped SnO2 nanofibers.Sensors and Actuators B: Chemical, 2009, 138(1): 368–373 https://doi.org/10.1016/j.snb.2009.02.027
30
S K, Mahadeva S, Yun J Kim . Flexible humidity and temperature sensor based on cellulose‒polypyrrole nanocomposite.Sensors and Actuators A: Physical, 2011, 165(2): 194–199 https://doi.org/10.1016/j.sna.2010.10.018
31
A I, Buvailo Y, Xing J, Hines et al.. TiO2/LiCl-based nanostructured thin film for humidity sensor application.ACS Applied Materials & Interfaces, 2011, 3(2): 528–533 https://doi.org/10.1021/am1011035
32
Y, Li C, Deng M Yang . A novel surface acoustic wave-impedance humidity sensor based on the composite of polyaniline and poly(vinyl alcohol) with a capability of detecting low humidity.Sensors and Actuators B: Chemical, 2012, 165(1): 7–12 https://doi.org/10.1016/j.snb.2011.12.037
33
S, Taccola F, Greco A, Zucca et al.. Characterization of free-standing PEDOT:PSS/iron oxide nanoparticle composite thin films and application as conformable humidity sensors.ACS Applied Materials & Interfaces, 2013, 5(13): 6324–6332 https://doi.org/10.1021/am4013775
34
H, Li B, Liu D, Cai et al.. High-temperature humidity sensors based on WO3‒SnO2 composite hollow nanospheres.Journal of Materials Chemistry A, 2014, 2(19): 6854–6862 https://doi.org/10.1039/c4ta00363b
35
P G, Su W L, Shiu M S Tsai . Flexible humidity sensor based on Au nanoparticles/graphene oxide/thiolated silica sol‒gel film.Sensors and Actuators B: Chemical, 2015, 216: 467–475 https://doi.org/10.1016/j.snb.2015.04.070
36
S, Ali A, Hassan G, Hassan et al.. All-printed humidity sensor based on graphene/methyl-red composite with high sensitivity.Carbon, 2016, 105: 23–32 https://doi.org/10.1016/j.carbon.2016.11.006
37
T, Lu H, Pan J, Ma et al.. Cellulose nanocrystals/polyacrylamide composites of high sensitivity and cycling performance to gauge humidity.ACS Applied Materials & Interfaces, 2017, 9: 18231–18237 https://doi.org/10.1021/acsami.7b04590
38
S Y, Park Y H, Kim S Y, Lee et al.. Highly selective and sensitive chemoresistive humidity sensors based on rGO/MoS2 van der Waals composites.Journal of Materials Chemistry A, 2018, 6: 5016–5024 https://doi.org/10.1039/c7ta11375g
39
N, Li Y, Jiang C, Zhou et al.. High-performance humidity sensor based on urchin-like composite of Ti3C2 MXene-derived TiO2 nanowires.ACS Applied Materials & Interfaces, 2019, 11: 38116–38125 https://doi.org/10.1021/acsami.9b12168
40
J, Wu C, Yin J, Zhou et al.. Ultrathin glass-based flexible, transparent, and ultrasensitive surface acoustic wave humidity sensor with ZnO nanowires and graphene quantum dots.ACS Applied Materials & Interfaces, 2020, 12(35): 39817–39825 https://doi.org/10.1021/acsami.0c09962
41
L, Gong X, Wang D, Zhang et al.. Flexible wearable humidity sensor based on cerium oxide/graphitic carbon nitride nanocomposite self-powered by motion-driven alternator and its application for human physiological detection.Journal of Materials Chemistry A, 2021, 9: 5619–5629 https://doi.org/10.1039/d0ta11578a
42
S, Tachibana Y F, Wang T, Sekine et al.. A printed flexible humidity sensor with high sensitivity and fast response using a cellulose nanofiber/carbon black composite.ACS Applied Materials & Interfaces, 2022, 14(4): 5721–5728 https://doi.org/10.1021/acsami.1c20918
43
Y, Yuan B, Peng H, Chi et al.. Layer-by-layer inkjet printing SPS:PEDOT NP/RGO composite film for flexible humidity sensors.RSC Advances, 2016, 6(114): 113298–113306 https://doi.org/10.1039/C6RA23651K
44
V, Adepu N, Bokka V, Mattela et al.. A highly electropositive ReS2 based ultra-sensitive flexible humidity sensor for multifunctional applications.New Journal of Chemistry, 2021, 45(13): 5855–5862 https://doi.org/10.1039/D1NJ00064K
45
W, Jeong J, Song J, Bae et al.. Breathable nanomesh humidity sensor for real-time skin humidity monitoring.ACS Applied Materials & Interfaces, 2019, 11(47): 44758–44763 https://doi.org/10.1021/acsami.9b17584
46
A, Tripathy P, Sharma N, Sahoo et al.. Moisture sensitive inimitable Armalcolite/PDMS flexible sensor: a new entry.Sensors and Actuators B: Chemical, 2018, 262: 211–220 https://doi.org/10.1016/j.snb.2018.01.207
47
H, Liu H, Zheng H, Xiang et al.. Paper-based wearable sensors for humidity and VOC detection.ACS Sustainable Chemistry & Engineering, 2021, 9(50): 16937–16945 https://doi.org/10.1021/acssuschemeng.1c05156
48
V S, Turkani D, Maddipatla B B, Narakathu et al.. A highly sensitive printed humidity sensor based on a functionalized MWCNT/HEC composite for flexible electronics application.Nanoscale Advances, 2019, 1(6): 2311–2322 https://doi.org/10.1039/C9NA00179D
X Luo . Application of inkjet-printing technology in developing indicators/sensors for intelligent packaging systems.Current Opinion in Food Science, 2022, 46: 100868 https://doi.org/10.1016/j.cofs.2022.100868
51
N, Li Y, Jiang Y, Xiao et al.. A fully inkjet-printed transparent humidity sensor based on a Ti3C2/Ag hybrid for touchless sensing of finger motion.Nanoscale, 2019, 11(44): 21522–21531 https://doi.org/10.1039/C9NR06751E
52
S, Aziz K G, Bum Y J, Yang et al.. Fabrication of ZnSnO3 based humidity sensor onto arbitrary substrates by micro-nano scale transfer printing.Sensors and Actuators A: Physical, 2016, 246: 1–8 https://doi.org/10.1016/j.sna.2016.04.059
53
R, Zhang B, Peng Y Yuan . Flexible printed humidity sensor based on poly(3,4-ethylenedioxythiophene)/reduced graphene oxide/Au nanoparticles with high performance.Composites Science and Technology, 2018, 168: 118–125 https://doi.org/10.1016/j.compscitech.2018.09.013
54
Aguiar M F, de A N R, Leal Melo C P, de et al.. Polypyrrole-coated electrospun polystyrene films as humidity sensors.Talanta, 2021, 234: 122636 https://doi.org/10.1016/j.talanta.2021.122636
55
Y, Cheng H, Wang L, Li et al.. Flexible photoluminescent humidity sensing material based on electrospun PVA nanofibers comprising surface-carboxylated QDs.Sensors and Actuators B: Chemical, 2019, 284: 258–264 https://doi.org/10.1016/j.snb.2018.12.140
56
S F, Tseng Y S Tsai . Highly sensitive humidity sensors based on Li–C3N4 composites on porous graphene flexible electrodes.Applied Surface Science, 2022, 606: 155001 https://doi.org/10.1016/j.apsusc.2022.155001
57
M, Yuan F, Luo Z, Wang et al.. Smart wearable band-aid integrated with high-performance micro-supercapacitor, humidity and pressure sensor for multifunctional monitoring.Chemical Engineering Journal, 2023, 453: 139898 https://doi.org/10.1016/j.cej.2022.139898
A, Tripathy P, Sharma S, Pramanik et al.. Armalcolite nanocomposite: a new paradigm for flexible capacitive humidity sensor.IEEE Sensors Journal, 2021, 21(13): 14685–14692 https://doi.org/10.1109/JSEN.2021.3072162
60
M, Han X, Ding H, Duan et al.. Ultrasensitive humidity sensors with synergy between superhydrophilic porous carbon electrodes and phosphorus-doped dielectric electrolyte.ACS Applied Materials & Interfaces, 2023, 15(7): 9740–9750 https://doi.org/10.1021/acsami.2c21051
61
H, Liu H, Xiang Y, Wang et al.. A flexible multimodal sensor that detects strain, humidity, temperature, and pressure with carbon black and reduced graphene oxide hierarchical composite on paper.ACS Applied Materials & Interfaces, 2019, 11(43): 40613–40619 https://doi.org/10.1021/acsami.9b13349
62
H, Zhang X, Chen Z, Zhang et al.. Highly-crystalline triazine-PDI polymer with an enhanced built-in electric field for full-spectrum photocatalytic phenol mineralization.Applied Catalysis B: Environmental, 2021, 287: 119957 https://doi.org/10.1016/j.apcatb.2021.119957
63
R, Nitta H E, Lin Y, Kubota et al.. CuO nanostructure-based flexible humidity sensors fabricated on PET substrates by spin-spray method.Applied Surface Science, 2022, 572: 151352 https://doi.org/10.1016/j.apsusc.2021.151352
64
D, Wang D, Zhang P, Li et al.. Electrospinning of flexible poly(vinyl alcohol)/MXene nanofiber-based humidity sensor self-powered by monolayer molybdenum diselenide piezoelectric nanogenerator.Nano-Micro Letters, 2021, 13(1): 57 https://doi.org/10.1007/s40820-020-00580-5
65
U, Altenberend F, Molina-Lopez A, Oprea et al.. Towards fully printed capacitive gas sensors on flexible PET substrates based on Ag interdigitated transducers with increased stability.Sensors and Actuators B: Chemical, 2013, 187: 280–287 https://doi.org/10.1016/j.snb.2012.11.025
66
L, Ni X, Li F, Cai et al.. Printable and flexible humidity sensor based on graphene-oxide-supported MoTe2 nanosheets for multifunctional applications.Nanomaterials, 2023, 13(8): 1309 https://doi.org/10.3390/nano13081309
67
D Z, Zhang Z Y, Xu Z M, Yang et al.. High-performance flexible self-powered tin disulfide nanoflowers/reduced graphene oxide nanohybrid-based humidity sensor driven by triboelectric nanogenerator.Nano Energy, 2020, 67: 104251 https://doi.org/10.1016/j.nanoen.2019.104251
68
H, Niu W, Yue Y, Li et al.. Ultrafast-response/recovery capacitive humidity sensor based on arc-shaped hollow structure with nanocone arrays for human physiological signals monitoring.Sensors and Actuators B: Chemical, 2021, 334: 129637 https://doi.org/10.1016/j.snb.2021.129637
69
J, Qin X, Yang C, Shen et al.. Carbon nanodot-based humidity sensor for self-powered respiratory monitoring.Nano Energy, 2022, 101: 107549 https://doi.org/10.1016/j.nanoen.2022.107549
70
Y, Lu M Y, Wang D Y, Wang et al.. Flexible impedance sensor based on Ti3C2Tx MXene and graphitic carbon nitride nanohybrid for humidity-sensing application with ultrahigh response.Rare Metals, 2023, 42(7): 2204–2213 https://doi.org/10.1007/s12598-023-02268-2
71
T, Pan Z, Yu F, Huang et al.. Flexible humidity sensor with high sensitivity and durability for respiratory monitoring using near-field electrohydrodynamic direct-writing method.ACS Applied Materials & Interfaces, 2023, 15(23): 28248–28257 https://doi.org/10.1021/acsami.3c04283
72
C, Guo Y, Xin Y, Liu et al.. Noncontact sensing for water area scanning identification based on Ho2O3/GO humidity sensor.Sensors and Actuators B: Chemical, 2023, 385: 133683 https://doi.org/10.1016/j.snb.2023.133683
73
S A, Khan M, Saqib M M, Rehman et al.. A full-range flexible and printed humidity sensor based on a solution-processed P(VDF-TrFE)/graphene-flower composite.Nanomaterials, 2021, 11(8): 1915 https://doi.org/10.3390/nano11081915
74
Y, Wang S, Hou T, Li et al.. Flexible capacitive humidity sensors based on ionic conductive wood-derived cellulose nanopapers.ACS Applied Materials & Interfaces, 2020, 12(37): 41896–41904 https://doi.org/10.1021/acsami.0c12868
75
S A, Khan M, Saqib M, Khan et al.. Wide-range, fast-responsive humidity sensor based on In2Se3/PEDOT:PSS nanocomposite.ACS Applied Electronic Materials, 2023, 5(8): 4473–4484 https://doi.org/10.1021/acsaelm.3c00660
76
D, Shen Y, Liu M, Yu et al.. Bioinspired flexible and highly responsive PVDF-based humidity sensors for respiratory monitoring.Polymer, 2022, 254: 125103 https://doi.org/10.1016/j.polymer.2022.125103
77
F R, Hsiao Y C Liao . Printed micro-sensors for simultaneous temperature and humidity detection.IEEE Sensors Journal, 2018, 18(16): 6788–6793 https://doi.org/10.1109/JSEN.2018.2850372
78
J, Zhao L, Li Y, Zhang et al.. Novel coaxial fiber-shaped sensing system integrated with an asymmetric supercapacitor and a humidity sensor.Energy Storage Materials, 2018, 15: 315–323 https://doi.org/10.1016/j.ensm.2018.06.007
79
Z, Wei J, Huang W, Chen et al.. Fabrication and characterization of flexible capacitive humidity sensors based on graphene oxide on porous PTFE substrates.Sensors, 2021, 21(15): 5118 https://doi.org/10.3390/s21155118
80
H, He Y, Yao T Liu . Flexible humidity sensor based on crosslinked polyethyleneimine/tannic acid and porous carbonaceous interdigitated electrode.Sensors and Actuators B: Chemical, 2023, 393: 134194 https://doi.org/10.1016/j.snb.2023.134194
81
M T S Chani . Fabrication and characterization of chitosan–CeO2–CdO nanocomposite based impedimetric humidity sensors.International Journal of Biological Macromolecules, 2022, 194: 377–383 https://doi.org/10.1016/j.ijbiomac.2021.11.079
82
Y, Wang L, Zhang Z, Zhang et al.. High-sensitivity wearable and flexible humidity sensor based on graphene oxide/non-woven fabric for respiration monitoring.Langmuir, 2020, 36(32): 9443–9448 https://doi.org/10.1021/acs.langmuir.0c01315
83
Y, Kan S, Wang J, Meng et al.. Flexible wearable and self-powered humidity sensor based on moisture-dependent voltage generation.Microchemical Journal, 2021, 168: 106373 https://doi.org/10.1016/j.microc.2021.106373
84
X, Ni J, Luo R, Liu et al.. Facile fabrication of flexible UV-cured polyelectrolyte-based coatings for humidity sensing.Sensors and Actuators B: Chemical, 2021, 329: 129149 https://doi.org/10.1016/j.snb.2020.129149
85
B C, Yadav S, Sikarwar R, Yadav et al.. Preparation of zinc(II) nitrate poly acryl amide (PAAm) and its optoelectronic application for humidity sensing.Journal of Materials Science Materials in Electronics, 2018, 29(9): 7770–7777 https://doi.org/10.1007/s10854-018-8774-0
86
R A, Shaukat M U, Khan Q M, Saqib et al.. Two dimensional Zirconium diselenide based humidity sensor for flexible electronics.Sensors and Actuators B: Chemical, 2022, 358: 131507 https://doi.org/10.1016/j.snb.2022.131507
87
E, Ganbold E S, Kim Y, Li et al.. Highly sensitive interdigitated capacitive humidity sensors based on sponge-like nanoporous PVDF/LiCl composite for real-time monitoring.ACS Applied Materials & Interfaces, 2023, 15(3): 4559–4568 https://doi.org/10.1021/acsami.2c20499
88
S, Han W, Kim H J, Lee et al.. Continuous and real-time measurement of plant water potential using an AAO-based capacitive humidity sensor for irrigation control.ACS Applied Electronic Materials, 2022, 4(12): 5922–5932 https://doi.org/10.1021/acsaelm.2c01111
89
Y, Luo Y, Pei X, Feng et al.. Silk fibroin based transparent and wearable humidity sensor for ultra-sensitive respiration monitoring.Materials Letters, 2020, 260: 126945 https://doi.org/10.1016/j.matlet.2019.126945
90
H, Park S, Lee S, Jeong et al.. Enhanced moisture-reactive hydrophilic-PTFE-based flexible humidity sensor for real-time monitoring.Sensors, 2018, 18(3): 921 https://doi.org/10.3390/s18030921
91
Z, Duan Z, Yuan Y, Jiang et al.. Amorphous carbon material of daily carbon ink: emerging applications in pressure, strain, and humidity sensors.Journal of Materials Chemistry C: Materials for Optical and Electronic Devices, 2023, 11(17): 5585–5600 https://doi.org/10.1039/D3TC00016H
92
L, Lin L, Wang B, Li et al.. Dual conductive network enabled superhydrophobic and high performance strain sensors with outstanding electro-thermal performance and extremely high gauge factors.Chemical Engineering Journal, 2020, 385: 123391 https://doi.org/10.1016/j.cej.2019.123391
93
C, Li Y, Zhang S, Yang et al.. A flexible tissue–carbon nanocoil–carbon nanotube-based humidity sensor with high performance and durability.Nanoscale, 2022, 14(18): 7025–7038 https://doi.org/10.1039/D2NR00027J
94
X, Peng J, Chu A, Aldalbahi et al.. A flexible humidity sensor based on KC–MWCNTs composites.Applied Surface Science, 2016, 387: 149–154 https://doi.org/10.1016/j.apsusc.2016.05.108
95
X F, Jin C R L, Liu L, Chen et al.. Inkjet-printed MoS2/PVP hybrid nanocomposite for enhanced humidity sensing.Sensors and Actuators A: Physical, 2020, 316: 112388 https://doi.org/10.1016/j.sna.2020.112388
96
H, Ahmed H M, Abduljalil A Hashim . Structural, optical and electronic properties of novel (PVA–MgO)/SiC nanocomposites films for humidity sensors.Transactions on Electrical and Electronic Materials, 2019, 20(3): 218–232 https://doi.org/10.1007/s42341-019-00111-z
97
V J, Angadi B, Chethan V, Pattar et al.. Graphene-cobalt chromate ceramics composite for humidity sensor applications.Journal of Alloys and Compounds, 2023, 947: 169438 https://doi.org/10.1016/j.jallcom.2023.169438
98
D, Lei Q, Zhang N, Liu et al.. Self-powered graphene oxide humidity sensor based on potentiometric humidity transduction mechanism.Advanced Functional Materials, 2022, 32(10): 2107330 https://doi.org/10.1002/adfm.202107330
99
D, Zhang X, Zong Z Wu . Fabrication of tin disulfide/graphene oxide nanoflower on flexible substrate for ultrasensitive humidity sensing with ultralow hysteresis and good reversibility.Sensors and Actuators B: Chemical, 2019, 287: 398–407 https://doi.org/10.1016/j.snb.2019.01.123
100
L, Shooshtari N, Rafiefard M, Barzegar et al.. Self-powered humidity sensors based on SnS2 nanosheets.ACS Applied Nano Materials, 2022, 5(11): 17123–17132 https://doi.org/10.1021/acsanm.2c04050
101
D, Zhang H, Chang P, Li et al.. Fabrication and characterization of an ultrasensitive humidity sensor based on metal oxide/graphene hybrid nanocomposite.Sensors and Actuators B: Chemical, 2016, 225: 233–240 https://doi.org/10.1016/j.snb.2015.11.024
102
I, Ragazzini R, Castagnoli I, Gualandi et al.. A resistive sensor for humidity detection based on cellulose/polyaniline.RSC Advances, 2022, 12(43): 28217–28226 https://doi.org/10.1039/D2RA03982F
103
H, Ahmed H M, Abduljalil A Hashim . Analysis of structural, optical and electronic properties of polymeric nanocomposites/silicon carbide for humidity sensors.Transactions on Electrical and Electronic Materials, 2019, 20(3): 206–217 https://doi.org/10.1007/s42341-019-00100-2
104
L, Zhang Q, Tan Y, Wang et al.. Wirelessly powered multi-functional wearable humidity sensor based on RGO–WS2 heterojunctions.Sensors and Actuators B: Chemical, 2021, 329: 129077 https://doi.org/10.1016/j.snb.2020.129077
105
T S E F, Karunarathne W P S L, Wijesinghe N P W, Rathuwadu et al.. Fabrication and characterization of partially conjugated poly (vinyl alcohol) based resistive humidity sensor.Sensors and Actuators A: Physical, 2020, 314: 112263 https://doi.org/10.1016/j.sna.2020.112263
106
J, Zhang A B, Dichiara I, Novosselov et al.. Polyacrylic acid coated carbon nanotube–paper composites for humidity and moisture sensing.Journal of Materials Chemistry C: Materials for Optical and Electronic Devices, 2019, 7(18): 5374–5380 https://doi.org/10.1039/C9TC01254K
107
A, Kafy A, Akther M I R, Shishir et al.. Cellulose nanocrystal/graphene oxide composite film as humidity sensor.Sensors and Actuators A: Physical, 2016, 247: 221–226 https://doi.org/10.1016/j.sna.2016.05.045
108
P, Songkeaw K, Onlaor T, Thiwawong et al.. Transparent and flexible humidity sensor based on graphene oxide thin films prepared by electrostatic spray deposition technique.Journal of Materials Science: Materials in Electronics, 2020, 31(15): 12206–12215 https://doi.org/10.1007/s10854-020-03766-0
109
M, Chen Z, Wang K, Li et al.. Elastic and stretchable functional fibers: a review of materials, fabrication methods, and applications.Advanced Fiber Materials, 2021, 3(1): 1–13 https://doi.org/10.1007/s42765-020-00057-5
110
D, Zhang R, Mao X, Song et al.. Humidity sensing properties and respiratory behavior detection based on chitosan-halloysite nanotubes film coated QCM sensor combined with support vector machine.Sensors and Actuators B: Chemical, 2023, 374: 132824 https://doi.org/10.1016/j.snb.2022.132824
111
A, Rianjanu T, Julian S N, Hidayat et al.. Quartz crystal microbalance humidity sensors integrated with hydrophilic polyethyleneimine-grafted polyacrylonitrile nanofibers.Sensors and Actuators B: Chemical, 2020, 319: 128286 https://doi.org/10.1016/j.snb.2020.128286
112
X, Liu D, Zhang D, Wang et al.. A humidity sensing and respiratory monitoring system constructed from quartz crystal microbalance sensors based on a chitosan/polypyrrole composite film.Journal of Materials Chemistry A: Materials for Energy and Sustainability, 2021, 9(25): 14524–14533 https://doi.org/10.1039/D1TA02828F
B A Kuzubasoglu . Recent studies on the humidity sensor: a mini review.ACS Applied Electronic Materials, 2022, 4(10): 4797–4807 https://doi.org/10.1021/acsaelm.2c00721
116
J, Li H, Wu L, Cao et al.. Enhanced proton conductivity of sulfonated polysulfone membranes under low humidity via the incorporation of multifunctional graphene oxide.ACS Applied Nano Materials, 2019, 2(8): 4734–4743 https://doi.org/10.1021/acsanm.9b00446
117
J, Wu X, Ma C, Li et al.. A novel photon-enzyme cascade catalysis system based on hybrid HRP-CN/Cu3(PO4)2 nanoflowers for degradation of BPA in water.Chemical Engineering Journal, 2022, 427: 131808 https://doi.org/10.1016/j.cej.2021.131808
118
W, Jiang F, Zhang Q Lin . Flexible relative humidity sensor based on reduced graphene oxide and interdigital electrode for smart home.Micro & Nano Letters, 2022, 17(6): 134–138 https://doi.org/10.1049/mna2.12116
119
Y, Liang Q, Ding H, Wang et al.. Humidity sensing of stretchable and transparent hydrogel films for wireless respiration monitoring.Nano-Micro Letters, 2022, 14(1): 183 https://doi.org/10.1007/s40820-022-00934-1