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Frontiers of Materials Science

ISSN 2095-025X

ISSN 2095-0268(Online)

CN 11-5985/TB

邮发代号 80-974

2019 Impact Factor: 1.747

Frontiers of Materials Science  2023, Vol. 17 Issue (4): 230662   https://doi.org/10.1007/s11706-023-0662-8
  本期目录
Advanced flexible humidity sensors: structures, techniques, mechanisms and performances
Yuzhe Zhang1, Yuxi Liu1, Lifei Lin2,4, Man Zhou1,3, Wang Zhang2, Liwei Lin2,3(), Zhongyu Li1,3(), Yuanzhe Piao2,6(), Sun Ha Paek5,6
1. School of Environmental Science and Engineering, Changzhou University, Changzhou 213164, China
2. Department of Applied Bioengineering, Graduate School of Convergence Science and Technology, Seoul National University, Seoul 08826, Republic of Korea
3. Jiangsu Key Laboratory of Advanced Catalytic Materials and Technology, School of Petrochemical Engineering, Changzhou University, Changzhou 213164, China
4. College of Chemistry and Molecular Sciences, Wuhan University, Wuhan 430072, China
5. Department of Neurosurgery, Movement Disorder Center, Seoul National University Hospital, Seoul 03080, Republic of Korea
6. Advanced Institutes of Convergence Technology, Suwon-si, Gyeonggi-do 16229, Republic of Korea
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Abstract

Flexible humidity sensors are widely used in many fields, such as environmental monitoring, agricultural soil moisture content determination, food quality monitoring and healthcare services. Therefore, it is essential to measure humidity accurately and reliably in different conditions. Flexible materials have been the focusing substrates of humidity sensors because of their rich surface chemical properties and structural designability. In addition, flexible materials have superior ductility for different conditions. In this review, we have summarized several sensing mechanisms, processing techniques, sensing layers and substrates for specific humidity sensing requirements. Aadditionally, we have sorted out some cases of flexible humidity sensors based on different functional materials. We hope this paper can contribute to the development of flexible humidity sensors in the future.

Key wordsflexible composite    manufacturing technology    sensing mechanism    humidity sensor
收稿日期: 2023-06-15      出版日期: 2023-10-23
Corresponding Author(s): Liwei Lin,Zhongyu Li,Yuanzhe Piao   
 引用本文:   
. [J]. Frontiers of Materials Science, 2023, 17(4): 230662.
Yuzhe Zhang, Yuxi Liu, Lifei Lin, Man Zhou, Wang Zhang, Liwei Lin, Zhongyu Li, Yuanzhe Piao, Sun Ha Paek. Advanced flexible humidity sensors: structures, techniques, mechanisms and performances. Front. Mater. Sci., 2023, 17(4): 230662.
 链接本文:  
https://academic.hep.com.cn/foms/CN/10.1007/s11706-023-0662-8
https://academic.hep.com.cn/foms/CN/Y2023/V17/I4/230662
Fig.1  
Fig.2  
Ref.MaterialTechniqueRH rangeSensitivity
[4]MoSe2/CuWO4 filmScreen printing11%?97%1.6×106 pF/97%RH
[64]PVA/MXene nanofberElectrospinning11%?97%0.9/6.3 s/90% a)
[8]Chitosan/activated carbon filmSpray coating0%?97%22/21 s/97% a)
[65]Ni/parylene-C/PEUInkjet printing10%?90%3.15 pF/%RH
[66]GO-MoTe2 nanosheetsInkjet printing11.3%?97.3%94.12 pF/%RH
[67]SnS2/rGO nanohybridScreen-printing0%?97%4 μA/74%RH
[68][P(VDF-TrFE)] nanocone arraysHot-pressing method and AAO template transfer method20%?90%1.95 pF/%RH
[48]FMWCNT/HEC composite materialAdditive print manufacturing process20%–80%0.048/%RH ≈ 20 s b)
[69]Carbon nanodotsPhotolithography and drop-casting11%?94%9.2 μA/94%RH
[70]Ti3C2Tx/g-C3N4 nanocompositeDrop coating11%?97%929 Ω/97%RH
[71]CNTs/CNFs compositeNFEDW method11%?95%61.5% (ΔR/R0)/95%
Tab.1  
Ref.Sensing principleSensing materialRH range/%t/°CSensitivityResponse/recovery time
[73]CapacitiveSolution-processed PVDF-TrFE/graphene-flower composite8?98250.558 pF/%RH0.8/2.5 s
[74]CapacitiveIonic conductive wood-derived cellulose nano papers7?9422130 pF/%RH20/6 s
[75]CapacitiveIn2Se3/PEDOT:PSS5?95250.177 μF/%RH1.2./1.9 s
[76]CapacitiveZnO NPs?PVDF19?92250.7 pF/%RH15/7 s
[77]CapacitiveNafion/TiO2 composite thin film35?95305.09 pF/35%RH10 s a)
[78]Capacitive3D MnO2 NBs@Ni cone/CNT film14?75252.483/35%RH0.39 s a)
[79]CapacitiveGO on porous PTFE substrates20?90255 pF/%RH10/2 s
[68]CapacitiveP(VDF-TrFE) nanocone arrays20?90251.95 pF/50%RH3.693/3.430 s
[59]CapacitiveArmalcolite?PDMS flexible film33?95252.3 pF/55%RH8.53/11.21 s
[42]ResistivePrinted CNTs-based flexible resistive humidity sensor30?9025?45120% (ΔR/R0)10/6 s
[80]ResistiveTA crosslinked PEI35?903029.9 kΩ/60%RH28/12 s
[81]ResistiveChitosan?CeO2?CdO nanocomposite5?9525?930 kΩ/%RH1/3 s
[82]ResistiveGO/non-woven fabric42?902530 kΩ/60%RH8.90/11.76 s
[83]PiezoelectricCoCl2@NWF composite film11?9825200 mV/98%RH136/19 s
[84]Capacitive/resistiveQuaternary ammonium salt of DMAEMA22?91254 mΩ/43%RH5/76 s
[85]Capacitive/resistiveZinc(II) nitrate poly acryl amide10?90251.831 μW/%RH250/37 s
[86]Capacitive/resistiveZrSe2 2D nanoflakes15?802568 kΩ/%RH3/6 s
Tab.2  
Fig.3  
Fig.4  
Fig.5  
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