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Characterization and tribological application
of diamond-like carbon (DLC) films prepared by radio-frequency plasma-enhanced
chemical vapor deposition (RF-PECVD) technique |
| Ning CAO,Zhen-yi FEI,Yong-xin QI,Wen-wen CHEN,Lu-lu SU,Qi WANG,Mu-sen LI, |
| Key Laboratory of Liquid
Structure and Heredity of Materials (Ministry of Education), Shandong
University, Jinan 250061, China; |
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Abstract Diamond-like carbon (DLC) films were successfully prepared on glass substrates and surfaces of selenium drums via radio frequency plasma enhanced chemical vapor deposition method. The microstructure, surface morphology, hardness, film adhesion, and tribological properties of the films were characterized and evaluated by X-ray photoelectron spectroscopy, atomic force microscopy, and micro-sclerometer and friction-wear spectrometer. The results showed that DLC films have smooth surfaces, homogeneous particle sizes, and excellent tribological properties, which can be used to improve the surface quality of the selenium drums and prolong their service life.
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| Keywords
diamond-like carbon (DLC) film
radio-frequency plasma-enhanced chemical vapor deposition (RF-PECVD)
microstructure
tribological application
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Issue Date: 05 December 2009
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Marciano F R, Bonetti L F, Santos L V, et al. Antibacterial activity of DLC and Ag-DLC filmsproduced by PECVD technique. Diamond andRelated Materials, 2009, 18(5―8): 1010―1014
doi: 10.1016/j.diamond.2009.02.014
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Liu C, Gou W, Mu Z X, et al. The study of performances and structures ofTi doped DLC films. Journal of FunctionalMaterials, 2005, 36(2): 301―303 (in Chinese)
|
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Chiang K, Yang L, Wei R, et al. Development of diamond-like carbon-coated electrodesfor corrosion sensor applications at high temperatures. Thin Solid Films, 2008, 517(3): 1120―1124
doi: 10.1016/j.tsf.2008.08.167
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Huang W D Zhan R J. Raman spectra and XPS analysesof the diamond-like carbon film deposited by surface wave plasma. Spectroscopy and Spectral Analysis, 2003, 23(3): 512―514 (in Chinese)
|
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Namwoong P. Ramanand XPS studies of DLC films prepared by a magnetron sputter-typenegative ion source. Surface & CoatingsTechnology, 2005, 200: 2170―2174
doi: 10.1016/j.surfcoat.2004.08.073
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Jösson B, Hogmark S. Hardness measurements ofthin films. Thin Solid Films, 1984, 114(3): 257―269
doi: 10.1016/0040-6090(84)90123-8
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