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Study on a vapor sensor based on the optical properties of porous silicon microcavities |
| ZHANG Le-xin1, ZHANG Ran2, LI Zhi-quan2 |
| 1.State Key Laboratory of Metastable Materials Science and Technology, College of Materials Science and Engineering, Yanshan University, Qinhuangdao 066004, China; 2.College of Electrical Engineering, Yanshan University, Qinhuangdao 066004, China; |
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Abstract In this paper, we set up a sensing model of PSMs (porous silicon microcavities) by applying the Bruggeman effective medium approximation theory and the transfer matrix method. In addition, we explain in detail the adsorption characteristics of porous silicon. Finally, using an experimental setup to measure the reflectivity spectrum of PSMs when the sensor is exposed to different organic vapors, the experimental results prove that it is a feasible optical sensor for the detection of organic species. Resolution of the PSMs sensor is high, response time and resume time is short and repetition is good.
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Issue Date: 05 June 2007
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