High-bandwidth nanopositioning via active control of system resonance
Linlin LI1,2, Sumeet S. APHALE3(), Limin ZHU1,4
1. State Key Laboratory of Mechanical System and Vibration, School of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai 200240, China 2. State Key Laboratory of Fluid Power and Mechatronic Systems, Zhejiang University, Hangzhou 310027, China 3. The Centre for Applied Dynamics Research, School of Engineering, University of Aberdeen, Aberdeen AB24 3UE, UK 4. The Shanghai Key Laboratory of Networked Manufacturing and Enterprise Information, Shanghai 200240, China
Typically, the achievable positioning bandwidth for piezo-actuated nanopositioners is severely limited by the first, lightly-damped resonance. To overcome this issue, a variety of open- and closed-loop control techniques that commonly combine damping and tracking actions, have been reported in literature. However, in almost all these cases, the achievable closed-loop bandwidth is still limited by the original open-loop resonant frequency of the respective positioning axis. Shifting this resonance to a higher frequency would undoubtedly result in a wider bandwidth. However, such a shift typically entails a major mechanical redesign of the nanopositioner. The integral resonant control (IRC) has been reported earlier to demonstrate the significant performance enhancement, robustness to parameter uncertainty, gua-ranteed stability and design flexibility it affords. To further exploit the IRC scheme’s capabilities, this paper presents a method of actively shifting the resonant frequency of a nanopositioner’s axis, thereby delivering a wider closed-loop positioning bandwidth when controlled with the IRC scheme. The IRC damping control is augmented with a standard integral tracking controller to improve positioning accuracy. And both damping and tracking control parameters are analytically optimized to result in a Butterworth Filter mimicking pole-placement—maximally flat passband response. Experiments are conducted on a nanopositioner’s axis with an open-loop resonance at 508 Hz. It is shown that by employing the active resonance shifting, the closed-loop positioning bandwidth is increased from 73 to 576 Hz. Consequently, the root-mean-square tracking errors for a 100 Hz triangular trajectory are reduced by 93%.
. [J]. Frontiers of Mechanical Engineering, 2021, 16(2): 331-339.
Linlin LI, Sumeet S. APHALE, Limin ZHU. High-bandwidth nanopositioning via active control of system resonance. Front. Mech. Eng., 2021, 16(2): 331-339.
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