A valveless piezoelectric pump with novel flow path design of function of rectification to improve energy efficiency

doi:10.1007/s11465-022-0685-3

Frontiers of Mechanical Engineering

2022, Vol. 17

Issue (3): 29 https://doi.org/10.1007/s11465-022-0685-3

本期目录

A valveless piezoelectric pump with novel flow path design of function of rectification to improve energy efficiency

Jianhui ZHANG, Xiaosheng CHEN, Zhenlin CHEN, Jietao DAI, Fan ZHANG, Mingdong MA, Yuxuan HUO, Zhenzhen GUI(

)

School of Mechanical and Electrical Engineering, Guangzhou University, Guangzhou 510006, China

全文: PDF(6493 KB) HTML

Abstract：

Existing valveless piezoelectric pumps are mostly based on the flow resistance mechanism to generate unidirectional fluid pumping, resulting in inefficient energy conversion because the majority of mechanical energy is consumed in terms of parasitic loss. In this paper, a novel tube structure composed of a Y-shaped tube and a ȹ-shaped tube was proposed considering theory of jet inertia and vortex dissipation for the first time to improve energy efficiency. After verifying its feasibility through the flow field simulation, the proposed tubes were integrated into a piezo-driven chamber, and a novel valveless piezoelectric pump with the function of rectification (NVPPFR) was reported. Unlike previous pumps, the reported pump directed the reflux fluid to another flow channel different from the pumping fluid, thus improving pumping efficiency. Then, mathematical modeling was established, including the kinetic analysis of vibrator, flow loss analysis of fluid, and pumping efficiency. Eventually, experiments were designed, and results showed that NVPPFR had the function of rectification and net pumping effect. The maximum flow rate reached 6.89 mL/min, and the pumping efficiency was up to 27%. The development of NVPPFR compensated for the inefficiency of traditional valveless piezoelectric pumps, broadening the application prospect in biomedicine and biology fields.

Key words： composite tube valveless piezoelectric pump rectification energy efficiency

收稿日期: 2021-11-22 出版日期: 2022-09-22

Corresponding Author(s): Zhenzhen GUI

引用本文:

. [J]. Frontiers of Mechanical Engineering, 2022, 17(3): 29.
Jianhui ZHANG, Xiaosheng CHEN, Zhenlin CHEN, Jietao DAI, Fan ZHANG, Mingdong MA, Yuxuan HUO, Zhenzhen GUI. A valveless piezoelectric pump with novel flow path design of function of rectification to improve energy efficiency. Front. Mech. Eng., 2022, 17(3): 29.

链接本文:

https://academic.hep.com.cn/fme/CN/10.1007/s11465-022-0685-3
https://academic.hep.com.cn/fme/CN/Y2022/V17/I3/29

Fig.1

Fig.2

Fig.3

Fig.4

Tab.1

Tab.2

Fig.5

Fig.6

Fig.7

Fig.8

Fig.9

Fig.10

Fig.11

Fig.12

$b half- i$	Half characteristic thickness of jet in direction i
$b thi- i$	Jet thickness in direction i
$C ε$	Damping of the vibrator
$C H$	Attachment damping causing by fluid coupling
d	Diameter of cross-section of tube
D	Diameter of pump chamber
D₀	Diameter of piezoelectric vibrator
E	Mechanical energy generated by the deformation of entire surface of piezoelectric vibrator
E₀	Initial kinetic energy of fluid
$Δ E$	Kinetic energy loss of fluid
$E i r$	Kinetic energy of the fluid
$Δ E i$	Total energy loss of fluid flowing
$Δ E i e$	Extra kinetic energy loss of fluid
$Δ E i r$	Kinetic energy loss of fluid
$E (r, θ)$	Kinetic energy at the point above the piezoelectric vibrator
$f$	Working frequency of the piezoelectric vibrator
$f max$	Function that takes the maximum value
$f min$	Function that takes the minimum value
$f n$	Resonance frequency
$F$	Vector sum of the exciting force
$h$	Chamber height
$H$	Distance between composite tubes and pump chamber
$K$	Stiffness of the elastic system
$K H$	Attachment stiffness causing by fluid coupling
$K ε$	Stiffness of the vibrator
$L 1$	Length of the confluence tube
$L 2$	Length of the straight tube
$l i r$	Prandtl mixing length
$m$	Mass of the piezoelectric vibrator
$M$	Mass of elastic system
$M H$	Attachment mass causing by fluid coupling
$M ε$	Mass of the vibrator
$P f$ , $P r$	Forward and reverse pressures, respectively
$q$ , $q ˙$ , $q ¨$	Displacement, velocity, and acceleration of the piezoelectric vibrator, respectively
$Q$	Flow rate of pump
$R 0$	Radius of bend tube
R₁, R₂	Radii of the semi-arc tube
$s$	Distance between chamber outlets
$S$	Sectional area of the composite tube
$t$	Time
$u$	Sum of velocity vectors of fluid at the outer joint
$u 0$	Fluid velocity of the chamber outlet
$u 1 m$	Maximum velocity of the fluid flowing in direction 1 at cross-section $m ′ n ′$
$u m ′ n ′$	Velocity of the fluid on the cross-section $m ′ n ′$
$Δ V$	Volume variation of pump chamber in a half period
$(r, θ)$	Polar point
$α$	Bifurcation angle of tubes
$β$	Diffusion angle of jet flow
$ε coef- i$	Thickness diffusion coefficient in direction i
$ρ$	Density of the fluid
$η$	Pumping efficiency in the outer joint
$η r$	Pumping efficiency in Channel r
$ζ i r$	Energy loss coefficient in the direction i inside flow channel r
$ζ i e$	Extra energy loss coefficient when fluid flowed in the direction i
$τ i r 1$	Shear stress in the direction i
$τ i r 2$	Turbulent shear stress in the direction i
$λ i$	Velocity ratios of fluid between Channels 1 and 2
$μ i r$	Dynamic coefficient of viscosity
$d μ i r d y i r$	Velocity gradient of fluid
Subscript
i (i = 1,2)	Flow direction i
r (r = 1,2)	Flow channel $r$

1	R Castilla, P J Gamez-Montero, N Ertürk, A Vernet, M Coussirat, E Codina. Numerical simulation of turbulent flow in the suction chamber of a gearpump using deforming mesh and mesh replacement. International Journal of Mechanical Sciences, 2010, 52( 10): 1334– 1342 https://doi.org/10.1016/j.ijmecsci.2010.06.009
2	V K Arun Shankar, U Subramaniam, S Paramasivam, N Hanigovszki. A comprehensive review on energy efficiency enhancement initiatives in centrifugal pumping system. Applied Energy, 2016, 181 : 495– 513 https://doi.org/10.1016/j.apenergy.2016.08.070
3	T Wang, C Wang, F Y Kong, Q Q Gou, S S Yang. Theoretical, experimental, and numerical study of special impeller used in turbine mode of centrifugal pump as turbine. Energy, 2017, 130 : 473– 485 https://doi.org/10.1016/j.energy.2017.04.156
4	Z Y Wang, Z D Qian, J Lu, P F Wu. Effects of flow rate and rotational speed on pressure fluctuations in a double-suction centrifugal pump. Energy, 2019, 170 : 212– 227 https://doi.org/10.1016/j.energy.2018.12.112
5	H Liu, B Y Zhao, Z P Zhang, H B Li, B Hu, R Z Wang. Experimental validation of an advanced heat pump system with high-efficiency centrifugal compressor. Energy, 2020, 213 : 118968 https://doi.org/10.1016/j.energy.2020.118968
6	N T Nguyen, X Y Huang, T K Chuan. MEMS-micropumps: a review. Journal of Fluids Engineering, 2002, 124( 2): 384– 392 https://doi.org/10.1115/1.1459075
7	N T Nguyen, T Q Truong. A fully polymeric micropump with piezoelectric actuator. Sensors and Actuators B: Chemical, 2004, 97( 1): 137– 143 https://doi.org/10.1016/S0925-4005(03)00521-5
8	S B Choi, J K Yoo, M S Cho, Y S Lee. Position control of a cylinder system using a piezoactuator-driven pump. Mechatronics, 2005, 15( 2): 239– 249 https://doi.org/10.1016/j.mechatronics.2004.07.007
9	M Yakut Ali, C F Kuang, J Khan, G R Wang. A dynamic piezoelectric micropumping phenomenon. Microfluidics and Nanofluidics, 2010, 9( 2–3): 385– 396
10	R H Zhang, F You, Z H Lv, Z C He, H W Wang, L Huang. Development and characterization a single-active-chamber piezoelectric membrane pump with multiple passive check valves. Sensors, 2016, 16( 12): 2108 https://doi.org/10.3390/s16122108
11	J H Zhang, Y Wang, J Huang. Advances in valveless piezoelectric pump with cone-shaped tubes. Chinese Journal of Mechanical Engineering, 2017, 30( 4): 766– 781 https://doi.org/10.1007/s10033-017-0151-z
12	Y Ye, J Chen, Y J Ren, Z H Feng. Valve improvement for high flow rate piezoelectric pump with PDMS film valves. Sensors and Actuators A: Physical, 2018, 283 : 245– 253 https://doi.org/10.1016/j.sna.2018.09.064
13	Q B Bao, J H Zhang, M Tang, Z Huang, L Y Lai, J Huang, C Y Wu. A novel PZT pump with built-in compliant structures. Sensors, 2019, 19( 6): 1301 https://doi.org/10.3390/s19061301
14	T J Peng, Q Q Guo, J Yang, J F Xiao, H Wang, Y Lou, X Liang. A high-flow, self-filling piezoelectric pump driven by hybrid connected multiple chambers with umbrella-shaped valves. Sensors and Actuators B: Chemical, 2019, 301 : 126961 https://doi.org/10.1016/j.snb.2019.126961
15	J Woo, D K Sohn, H S Ko. Performance and flow analysis of small piezo pump. Sensors and Actuators A: Physical, 2020, 301 : 111766 https://doi.org/10.1016/j.sna.2019.111766
16	H Y Li, J K Liu, K Li, Y X Liu. A review of recent studies on piezoelectric pumps and their applications. Mechanical Systems and Signal Processing, 2021, 151 : 107393 https://doi.org/10.1016/j.ymssp.2020.107393
17	J Valdovinos, R J Williams, D S Levi, G P Carman. Evaluating piezoelectric hydraulic pumps as drivers for pulsatile pediatric ventricular assist devices. Journal of Intelligent Material Systems and Structures, 2014, 25( 10): 1276– 1285 https://doi.org/10.1177/1045389X13504476
18	H K Ma, R H Chen, N S Yu, Y H Hsu. A miniature circular pump with a piezoelectric bimorph and a disposable chamber for biomedical applications. Sensors and Actuators A: Physical, 2016, 251 : 108– 118 https://doi.org/10.1016/j.sna.2016.10.010
19	F Opekar, K Nesměrák, P Tůma. Electrokinetic injection of samples into a short electrophoretic capillary controlled by piezoelectric micropumps. Electrophoresis, 2016, 37( 4): 595– 600 https://doi.org/10.1002/elps.201500464
20	J M Haber, P R C Gascoyne, K Sokolov. Rapid real-time recirculating PCR using localized surface plasmon resonance (LSPR) and piezo-electric pumping. Lab on a Chip, 2017, 17( 16): 2821– 2830 https://doi.org/10.1039/C7LC00211D
21	S Sakuma, Y Kasai, T Hayakawa, F Arai. On-chip cell sorting by high-speed local-flow control using dual membrane pumps. Lab on a Chip, 2017, 17( 16): 2760– 2767 https://doi.org/10.1039/C7LC00536A
22	Y N Wang, L M Fu. Micropumps and biomedical applications—a review. Microelectronic Engineering, 2018, 195 : 121– 138 https://doi.org/10.1016/j.mee.2018.04.008
23	S Chen, H D Liu, J J Ji, J W Kan, Y H Jiang, Z H Zhang. An indirect drug delivery device driven by piezoelectric pump. Smart Materials and Structures, 2020, 29( 7): 075030 https://doi.org/10.1088/1361-665X/ab8c23
24	V Singhal, S V Garimella, A Raman. Microscale pumping technologies for microchannel cooling systems. Applied Mechanics Reviews, 2004, 57( 3): 191– 221 https://doi.org/10.1115/1.1695401
25	Y Tang, M Z Jia, X R Ding, Z T Li, Z P Wan, Q H Lin, T Fu. Experimental investigation on thermal management performance of an integrated heat sink with a piezoelectric micropump. Applied Thermal Engineering, 2019, 161 : 114053 https://doi.org/10.1016/j.applthermaleng.2019.114053
26	M Kaynak, A Ozcelik, N Nama, A Nourhani, P E Lammert, V H Crespi, T J Huang. Acoustofluidic actuation of in situ fabricated microrotors. Lab on a Chip, 2016, 16( 18): 3532– 3537 https://doi.org/10.1039/C6LC00443A
27	X R Wang, H W Jiang, Y C Chen, X Qiao, L Dong. Microblower-based microfluidic pump. Sensors and Actuators A: Physical, 2017, 253 : 27– 34 https://doi.org/10.1016/j.sna.2016.11.017
28	B Zhao, X Y Cui, W Ren, F Xu, M Liu, Z G Ye. A controllable and integrated pump-enabled microfluidic chip and its application in droplets generating. Scientific Reports, 2017, 7( 1): 11319 https://doi.org/10.1038/s41598-017-10785-1
29	T Zhang, Q M Wang. Valveless piezoelectric micropump for fuel delivery in direct methanol fuel cell (DMFC) devices. Journal of Power Sources, 2005, 140( 1): 72– 80 https://doi.org/10.1016/j.jpowsour.2004.07.026
30	H K Ma, S H Huang, Y Z Kuo. A novel ribbed cathode polar plate design in piezoelectric proton exchange membrane fuel cells. Journal of Power Sources, 2008, 185( 2): 1154– 1161 https://doi.org/10.1016/j.jpowsour.2008.07.019
31	V T Dau, T X Dinh, T Katsuhiko, S Susumu. A cross-junction channel valveless-micropump with PZT actuation. Microsystem Technologies, 2009, 15( 7): 1039– 1044 https://doi.org/10.1007/s00542-009-0878-2
32	Q X Xia, J H Zhang, H Lei, W Cheng. Analysis on flow field of the valveless piezoelectric pump with two inlets and one outlet and a rotating unsymmetrical slopes element. Chinese Journal of Mechanical Engineering, 2012, 25( 3): 474– 483 https://doi.org/10.3901/CJME.2012.03.474
33	L Y Tseng, A S Yang, C Y Lee, C H Cheng. Investigation of a piezoelectric valveless micropump with an integrated stainless-steel diffuser/nozzle bulge-piece design. Smart Materials and Structures, 2013, 22( 8): 085023 https://doi.org/10.1088/0964-1726/22/8/085023
34	J Huang, J H Zhang, X C Xun, S Y Wang. Theory and experimental verification on valveless piezoelectric pump with multistage Y-shape treelike bifurcate tubes. Chinese Journal of Mechanical Engineering, 2013, 26( 3): 462– 468 https://doi.org/10.3901/CJME.2013.03.462
35	X F Leng, J H Zhang, Y Jiang, J Y Zhang, X C Sun, X G Lin. Theory and experimental verification of spiral flow tube-type valveless piezoelectric pump with gyroscopic effect. Sensors and Actuators A: Physical, 2013, 195 : 1– 6 https://doi.org/10.1016/j.sna.2013.02.026
36	C N Kim. Internal pressure characteristics and performance features of the piezoelectric micropumps with the diffuser/nozzle and electromagnetic resistance. Computers & Fluids, 2014, 104 : 30– 39 https://doi.org/10.1016/j.compfluid.2014.08.005
37	Y Wei, R Torah, K Yang, S Beeby, J Tudor. A novel fabrication process to realize a valveless micropump on a flexible substrate. Smart Materials and Structures, 2014, 23( 2): 025034 https://doi.org/10.1088/0964-1726/23/2/025034
38	J Huang, J H Zhang, W D Shi, Y Wang. 3D FEM analyses on flow field characteristics of the valveless piezoelectric pump. Chinese Journal of Mechanical Engineering, 2016, 29( 4): 825– 831 https://doi.org/10.3901/CJME.2016.0427.061
39	X H He, J W Zhu, X T Zhang, L Xu, S Yang. The analysis of internal transient flow and the performance of valveless piezoelectric micropumps with planar diffuser/nozzles elements. Microsystem Technologies, 2017, 23( 1): 23– 37 https://doi.org/10.1007/s00542-015-2695-0
40	J H Zhang, Y Wang, J Huang. Equivalent circuit modeling for a valveless piezoelectric pump. Sensors, 2018, 18( 9): 2881 https://doi.org/10.3390/s18092881
41	J J Ji, S Chen, X Y Xie, X M Wang, J W Kan, Z H Zhang, J P Li. Design and experimental verification on characteristics of valve-less piezoelectric pump effected by valve hole spacing. IEEE Access: Practical Innovations, Open Solutions, 2019, 7 : 36259– 36265 https://doi.org/10.1109/ACCESS.2019.2903680
42	J Huang, L Zou, P Tian, Q Zhang, Y Wang, J H Zhang. A valveless piezoelectric micropump based on projection micro litho stereo exposure technology. IEEE Access: Practical Innovations, Open Solutions, 2019, 7 : 77340– 77347 https://doi.org/10.1109/ACCESS.2019.2919691
43	J H Park, K Yoshida, S Yokota. Resonantly driven piezoelectric micropump: fabrication of a micropump having high power density. Mechatronics, 1999, 9( 7): 687– 702 https://doi.org/10.1016/S0957-4158(99)00028-8
44	J H Park, K Yoshida, Y Nakasu, S Yokota, T Seto, K Takagi. A resonantly-driven piezoelectric micropump for microfactory. In: Proceedings of the 6th International Conference on Mechatronics Technology. Tokyo, 2002, 417– 422
45	J H Park, K Yoshida, S Yokota, T Seto, K Takagi. Development of micro machines using improved resonantly-driven piezoelectric micropumps. In: Proceedings of the 4th International Symposium on Fluid Power Transmission and Control (ISFP’2003). Wuhan, 2003, 536– 541
46	X Y Wang, Y T Ma, G Y Yan, Z H Feng. A compact and high flow-rate piezoelectric micropump with a folded vibrator. Smart Materials and Structures, 2014, 23( 11): 115005 https://doi.org/10.1088/0964-1726/23/11/115005
47	X Y Wang, Y T Ma, G Y Yan, D Huang, Z H Feng. High flow-rate piezoelectric micropump with two fixed ends polydimethylsiloxane valves and compressible spaces. Sensors and Actuators A: Physical, 2014, 218 : 94– 104 https://doi.org/10.1016/j.sna.2014.07.026
48	S Mohith, P N Karanth, S M Kulkarni. Performance analysis of valveless micropump with disposable chamber actuated through amplified piezo actuator (APA) for biomedical application. Mechatronics, 2020, 67 : 102347 https://doi.org/10.1016/j.mechatronics.2020.102347
49	S Mohith, R Muralidhara, P N Karanth, S M Kulkarni, A R Upadhya. Development and assessment of large stroke piezo-hydraulic actuator for micro positioning applications. Precision Engineering, 2021, 67 : 324– 338 https://doi.org/10.1016/j.precisioneng.2020.10.012
50	S Mohith, P N Karanth, S M Kulkarni. Analysis of annularly excited bossed diaphragm for performance enhancement of mechanical micropump. Sensors and Actuators A: Physical, 2022, 335 : 113381 https://doi.org/10.1016/j.sna.2022.113381
51	Y Wu, Y Liu, J F Liu, L Wang, X Y Jiao, Z G Yang. An improved resonantly driven piezoelectric gas pump. Journal of Mechanical Science and Technology, 2013, 27( 3): 793– 798 https://doi.org/10.1007/s12206-013-0125-8
52	J Chen, D Huang, Z H Feng. A U-shaped piezoelectric resonator for a compact and high-performance pump system. Smart Materials and Structures, 2015, 24( 10): 105009 https://doi.org/10.1088/0964-1726/24/10/105009
53	J T Wang, X L Zhao, X F Chen, H R Yang. A piezoelectric resonance pump based on a flexible support. Micromachines, 2019, 10( 3): 169 https://doi.org/10.3390/mi10030169
54	Q S Pan, L G He, F S Huang, X Y Wang, Z H Feng. Piezoelectric micropump using dual-frequency drive. Sensors and Actuators A: Physical, 2015, 229 : 86– 93 https://doi.org/10.1016/j.sna.2015.03.029
55	E Sayar, B Farouk. Dynamic analysis of bulk acoustic wave piezoelectric micropumps: effects of inlet-outlet port angles and overall pump size. In: Proceedings of the ASME 2013 International Mechanical Engineering Congress and Exposition. Volume 10: Micro- and Nano-Systems Engineering and Packaging. San Diego: ASME, 2013, IMECE2013-66211, V010T11A027
56	H K Ma, R H Chen, Y H Hsu. Development of a piezoelectric-driven miniature pump for biomedical applications. Sensors and Actuators A: Physical, 2015, 234 : 23– 33 https://doi.org/10.1016/j.sna.2015.08.003
57	D Zhao, L P He, W Li, Y Huang, G M Cheng. Experimental analysis of a valve-less piezoelectric micropump with crescent-shaped structure. Journal of Micromechanics and Microengineering, 2019, 29( 10): 105004 https://doi.org/10.1088/1361-6439/ab3278
58	A Kaçar, M B Özer, Y Taşcıoğlu. A novel artificial pancreas: energy efficient valveless piezoelectric actuated closed-loop insulin pump for T1DM. Applied Sciences, 2020, 10( 15): 5294 https://doi.org/10.3390/app10155294
59	B C Zhang, Y Huang, L P He, Q W Xu, G M Cheng. Research on double-outlet valveless piezoelectric pump with fluid guiding body. Sensors and Actuators A: Physical, 2020, 302 : 111785 https://doi.org/10.1016/j.sna.2019.111785
60	J Eggers, E Villermaux. Physics of liquid jets. Reports on Progress in Physics, 2008, 71( 3): 036601 https://doi.org/10.1088/0034-4885/71/3/036601

Viewed

Full text

Abstract

Cited

Shared

Discussed