Abstract：According to the present classification method for a piezoelectric pump, this paper reviews the development and present situation of piezoelectric pumps in the latest 30 years and finally puts forward a new classification. A volumetric piezoelectric pump, which belongs to traditional volumetric pumps, can be divided into a piezoelectric pump with or without valves. A new valveless piezoelectric pump nowadays becomes a hot issue in scientific research. It is constructed by using no-moving-part valves, which can induce positive flow resistance and negative flow resistance different, and in which the inlet and outlet are connected all the time. New forms of piezoelectric pumps, different from traditional ones, are only at the stage of conception and principle, and no practical application has been reported.
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