Robust control of <italic>XYZ</italic> flexure-based micromanipulator with large motion

doi:10.1007/s11465-009-0004-2

Front Mech Eng Chin

2009, Vol. 4

Issue (1) : 25-34 https://doi.org/10.1007/s11465-009-0004-2

RESEARCH ARTICLE

Robust control of XYZ flexure-based micromanipulator with large motion

Xueyan TANG(

), I-Ming CHEN

School of Mechanical and Aerospace Engineering, Nanyang Technological University, Singapore

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Abstract

This article describes the development of an XYZ flexure-based micromanipulator, with the features of decoupled kinematic structure, large motion range, high positioning precision, and fast response. The large motion range of flexure mechanisms is quantified by a given definition. Based on the given definition, large motion is achieved in the mechanical design of the XYZ-flexure parallel mechanism (FPM). To ensure high positioning precision and fast dynamic response, a hybrid control algorithm with both position control and vibration control are designed, using the H_∞-theory. The controller strongly solves the three common problems of flexure mechanisms simultaneously, including unmodeled uncertainties, the external disturbances and vibration caused by inherent low damping.

Keywords robust control flexure mechanisms flexure-based micromanipulator

Corresponding Author(s): TANG Xueyan,Email:TANG0031@ntu.edu.sg

Issue Date: 05 March 2009

Cite this article:

Xueyan TANG,I-Ming CHEN. Robust control of XYZ flexure-based micromanipulator with large motion[J]. Front Mech Eng Chin, 2009, 4(1): 25-34.

URL:

https://academic.hep.com.cn/fme/EN/10.1007/s11465-009-0004-2
https://academic.hep.com.cn/fme/EN/Y2009/V4/I1/25

Fig.1 Schematic diagram of -FPM

Fig.2 Large-motion prismatic joint

Fig.3 New large-motion prismatic joint

Tab.1 Dimension of -FPM

Tab.2 Parameters of -FPM

Fig.4 Prototype of -FPM

Fig.5 Block diagram of H∞-control system

Fig.6 Standard H∞-control system

Fig.7 Hardware setup for open-loop test

Fig.8 Open-loop dynamic responses in time domain

Fig.9 Open-loop dynamic responses in frequency domain

Fig.10 Weight functions

Fig.11 Additive uncertainty

Fig.12 Analysis framework

Fig.13 Robust stability analysis framework

Fig.14 Robust controller

Fig.15 Experimental setup for static test

Fig.16 Experimental setup for dynamic test

Fig.17 Signal flow of closed-loop system

Fig.18 Open-loop dynamic responses in time domain

Fig.19 Closed-loop dynamic response

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