Recent advancements in optical microstructure fabrication through glass molding process

doi:10.1007/s11465-017-0425-2

Front. Mech. Eng.

2017, Vol. 12

Issue (1) : 46-65 https://doi.org/10.1007/s11465-017-0425-2

REVIEW ARTICLE

Recent advancements in optical microstructure fabrication through glass molding process

Tianfeng ZHOU¹,Xiaohua LIU²,Zhiqiang LIANG¹(

),Yang LIU²,Jiaqing XIE²,Xibin WANG¹

¹. Key Laboratory of Fundamental Science for Advanced Machining, Beijing Institute of Technology, Beijing 100081, China
². School of Mechanical Engineering, Beijing Institute of Technology, Beijing 100081, China

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Abstract

Optical microstructures are increasingly applied in several fields, such as optical systems, precision measurement, and microfluid chips. Microstructures include microgrooves, microprisms, and microlenses. This paper presents an overview of optical microstructure fabrication through glass molding and highlights the applications of optical microstructures in mold fabrication and glass molding. The glass-mold interface friction and adhesion are also discussed. Moreover, the latest advancements in glass molding technologies are detailed, including new mold materials and their fabrication methods, viscoelastic constitutive modeling of glass, and microstructure molding process, as well as ultrasonic vibration-assisted molding technology.

Keywords optical microstructure microgroove microlens glass molding process single-point diamond cutting

Corresponding Author(s): Zhiqiang LIANG

Just Accepted Date: 12 January 2017 Online First Date: 15 February 2017 Issue Date: 21 March 2017

Cite this article:

Tianfeng ZHOU,Xiaohua LIU,Zhiqiang LIANG, et al. Recent advancements in optical microstructure fabrication through glass molding process[J]. Front. Mech. Eng., 2017, 12(1): 46-65.

URL:

https://academic.hep.com.cn/fme/EN/10.1007/s11465-017-0425-2
https://academic.hep.com.cn/fme/EN/Y2017/V12/I1/46

Fig.1 Element shape of microstructure arrays: (a) Adjacent microlens arrays, (b) distributed microlens arrays, (c) triangular pyramid arrays, (d) rectangular pyramid arrays

Fig.2 Function and application of microstructure arrays with large element size. (a) Focus; (b) reflection; (c) beam guidance; (d) smart scan

Fig.3 Function and application of microstructure arrays with small element size. (a) 1D transmission diffraction; (b) 1D reflection diffraction; (c) 2D diffraction

Fig.4 Typical Moiré pattern formed by two superimposed Ronchi gratings rotated by an angle with displacement equal to: (a) Zero, (b) a quarter of the grating pitch, (c) half of the grating pitch, (d) three-quarters of the grating pitch, and (e) the grating pitch [2]

Fig.5 Glass molding technology of microstructure array. (a) Forming schematic of the microstructure array; (b) mold with microstructures; (c) glass with microstructures [34]

Fig.6 Process flow of microgroove forming: (a) Heating, (b) pressing, (c) annealing, and (d) cooling

Fig.7 (a) Preparation process of the Ni-P plating mold; (b) photograph of Ni-P plating mold

Fig.8 Single-point diamond cutting process. (a) Microgroove arrays; (b) microlens arrays

Fig.9 Improved method of fabricating microgroove mold on crystalline Ni-P plating: (a) Amorphous Ni-P, (b) crystallization in GMP, (c) deformation in advance, (d) flattening, and (e) microgrooving on the crystalline Ni-P plating [59]

Fig.10 Photograph of ultra-precision cutting machine (Nanoform^® X, Precitech Corp., United States) [59]

Fig.11 SEM photographs at different magnifications showing burrs in machining process of microgroove arrays: (a) 3k, (b) 6k

Fig.12 SEM photographs at different magnifications showing microgroove arrays with edge chipping: (a) 1k, (b) 2k, and (c) 5k

Fig.13 SEM photographs showing: (a) Fine microgrooves and (b) fine micropyramids machined through single-point diamond cutting

Fig.14 General Maxwell model for describing the viscoelasticity of glass in the transition region

Fig.15 2D simulation model of the GMP for microgrooves [35]

Fig.16 Equivalent stress distribution at the molding temperature of 570 °C [35]

Fig.17 GMP models for microstructures: (a) Microgrooves and (b) micropyramids [36]

Fig.18 Stress distribution in the glass during pressing: (a) Microgrooves and (b) micropyramids [36]

Fig.19 Strain distribution in the glass during pressing: (a) Microgrooves and (b) micropyramids [36]

Fig.20 Photograph of glass molding machine PFLF7-60A (SYS Co., Ltd., Japan)

Fig.21 Basic structure and functional features of glass molding machine PFLF7-60A

Fig.22 Photograph of glass molding machine GMP211 (Toshiba Machine Co., Ltd., Japan) [38]

Fig.23 Schematic diagram of the structure of the ultra-precision glass molding press machine GMP211 [35]

Tab.1 Typical molded products from the website of Toshiba Machine Co., Ltd.

Tab.2 Advantages and disadvantages of vacuum and nitrogen environments

Fig.24 Plot of volume change against temperature for a typical optical glass L-BAL42, showing strongly temperature-dependent thermal expansion characteristics [38]

Fig.25 Plots of mold displacement and pressing load in time sequence during creep and stress relaxation of glass [1]

Fig.26 Laser scanning microscope photographs of (a) microgroove mold, (b) molded microgroove glass, (c) micropyramid mold, and (d) molded micropyramid glass

Fig.27 Cross-sectional profiles of mold and glass after experiments. (a) Microgrooves; (b) micropyramids

Fig.28 SEM photographs of microgrooves. (a) Mold before molding process; (b) mold after molding process; (c) molded glass

Fig.29 SEM photographs of micropyramids. (a) Mold before molding process; (b) mold after molding process; (c) molded glass

Fig.30 Filling behaviors of the glass at different friction coefficients: (a) 0.5, (b) 0.3, (c) 0.1, and (d) 0

Fig.31 Self-developed ultrasonic vibration-assisted molding machine

Fig.32 Deformed glass shapes and equivalent stress distribution (a) without and (b) with ultrasonic vibration

Fig.33 Deformed glass shape after molding (a) without and (b) with ultrasonic vibration

Fig.34 Frictional contact model on the glass-mold interface. (a) Global view; (b) regional view

Fig.35 Photograph of chalcogenide glass lens fabricated through GMP

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