Ion beam figuring of continuous phase plates based on the frequency filtering process

doi:10.1007/s11465-017-0430-5

Front. Mech. Eng.

2017, Vol. 12

Issue (1) : 110-115 https://doi.org/10.1007/s11465-017-0430-5

RESEARCH ARTICLE

Ion beam figuring of continuous phase plates based on the frequency filtering process

Mingjin XU¹,Yifan DAI¹,Xuhui XIE¹(

),Lin ZHOU¹,Shengyi LI¹,Wenqiang PENG²

¹. College of Mechatronics Engineering and Automation, National University of Defense Technology, Changsha 410073, China
². College of Basic Education for Command Officer, National University of Defense Technology, Changsha 410073, China

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Abstract

Ion beam figuring (IBF) technology is an effective technique for fabricating continuous phase plates (CPPs) with small feature structures. This study proposes a multi-pass IBF approach with different beam diameters based on the frequency filtering method to improve the machining accuracy and efficiency of CPPs during IBF. We present the selection principle of the frequency filtering method, which incorporates different removal functions that maximize material removal over the topographical frequencies being imprinted. Large removal functions are used early in the fabrication to figure the surface profile with low frequency. Small removal functions are used to perform final topographical correction with higher frequency and larger surface gradient. A high-precision surface can be obtained as long as the filtering frequency is suitably selected. This method maximizes the high removal efficiency of the large removal function and the high corrective capability of the small removal function. Consequently, the fast convergence of the machining accuracy and efficiency can be achieved.

Keywords ion beam figuring (IBF) continuous phase plates (CPPs) machining accuracy machining efficiency frequency filtering process

Corresponding Author(s): Xuhui XIE

Just Accepted Date: 20 January 2017 Online First Date: 24 February 2017 Issue Date: 21 March 2017

Cite this article:

Mingjin XU,Yifan DAI,Xuhui XIE, et al. Ion beam figuring of continuous phase plates based on the frequency filtering process[J]. Front. Mech. Eng., 2017, 12(1): 110-115.

URL:

https://academic.hep.com.cn/fme/EN/10.1007/s11465-017-0430-5
https://academic.hep.com.cn/fme/EN/Y2017/V12/I1/110

Fig.1 Relationship between dwell time and material removal depth under different beam diameters

Tab.1 First figuring stage (beam diameter d₆_s=8.2 mm and f_c=0.25 mm⁻¹)

Tab.2 Second figuring stage (beam diameter d₆_s=4.1 mm and f_c=0.5 mm⁻¹)

Fig.2 Comparison of machining errors of the two figuring processes: (a) The desired CPP surface; (b) the filtered surface by a Gaussian low-pass filter with 4 mm bandwidth; (c) the matching error; (d) the machining error of the filtered surface; (e) the total error of the frequency filtering process; (f) the total error of the direct figuring process

Fig.3 Comparison of surface errors figured by the two figuring processes: (a) The original surface error; (b) surface error of the direct machining process; (c) surface error of the frequency filtering process

Tab.3 Comparison of machining time by the two process methods (beam diameter d₆_σ=4.1 mm)

Fig.4 Surface accuracy of the figured CPP: (a) The desired CPP surface; (b) the figured CPP surface; (c) the final matching error; (d) surface gradient distribution of the desired CPP; (e) surface gradient distribution of the figured CPP; (f) 3D view of the figured CPP

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