Review of self-referenced measurement algorithms: Bridging lateral shearing interferometry and multi-probe error separation

doi:10.1007/s11465-017-0432-3

Front. Mech. Eng.

2017, Vol. 12

Issue (2) : 143-157 https://doi.org/10.1007/s11465-017-0432-3

REVIEW ARTICLE

Review of self-referenced measurement algorithms: Bridging lateral shearing interferometry and multi-probe error separation

Dede ZHAI, Shanyong CHEN, Ziqiang YIN, Shengyi LI(

)

College of Mechatronic Engineering and Automation, National University of Defense Technology, Changsha 410073, China; Hu’nan Key Laboratory of Ultra-precision Machining Technology, Changsha 410073, China

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Abstract

With the development of new materials and ultra-precision processing technology, the sizes of measured objects increase, and the requirements for machining accuracy and surface quality become more exacting. The traditional measurement method based on reference datum is inadequate for measuring a high-precision object when the quality of the reference datum is approximately within the same order as that of the object. Self-referenced measurement techniques provide an effective means when the direct reference-based method cannot satisfy the required measurement or calibration accuracy. This paper discusses the reconstruction algorithms for self-referenced measurement and connects lateral shearing interferometry and multi-probe error separation. In lateral shearing interferometry, the reconstruction algorithms are generally categorized into modal or zonal methods. The multi-probe error separation techniques for straightness measurement are broadly divided into two-point and three-point methods. The common features of the lateral shearing interferometry method and the multi-probe error separation method are identified. We conclude that the reconstruction principle in lateral shearing interferometry is similar to the two-point method in error separation on the condition that no yaw error exists. This similarity may provide a basis or inspiration for the development of both classes of methods.

Keywords self-referenced measurement lateral shearing interferometry multi-probe error separation surface metrology

Corresponding Author(s): Shengyi LI

Just Accepted Date: 15 February 2017 Online First Date: 22 March 2017 Issue Date: 19 June 2017

Cite this article:

Dede ZHAI,Shanyong CHEN,Ziqiang YIN, et al. Review of self-referenced measurement algorithms: Bridging lateral shearing interferometry and multi-probe error separation[J]. Front. Mech. Eng., 2017, 12(2): 143-157.

URL:

https://academic.hep.com.cn/fme/EN/10.1007/s11465-017-0432-3
https://academic.hep.com.cn/fme/EN/Y2017/V12/I2/143

Fig.1 Shearing principle of lateral shearing interferometer

Fig.2 Classification of modal methods based on Zernike polynomials

Fig.3 Noncircular shearing regions of two circular wavefronts in (a) x and (b) y shear directions

Fig.4 Schematic diagram of the Saunders method

Fig.5 Classification of shearing interferometer reconstruction methods

Fig.6 Schematic diagram of two-point method system

Fig.7 Schematic diagram of the three-point method system

Fig.8 Schematic diagram of the three-point method in the frequency domain

Fig.9 Zero-adjustment error of the three sensors: (a) Ideally aligned and (b) misaligned

Fig.10 Six-probe system to solve the zero-adjustment error

Fig.11 TMS principle

Fig.12 Virtual multi-probe system

Fig.13 Classification of multi-sensor error separation methods

Fig.14 (a) 1D shearing interferometer; (b) two-probe measurement system

Fig.15 Schematic diagram of double-shear measurement system

Fig.16 Multi-probe measurement system

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