Mechatronic design of a novel linear compliant positioning stage with large travel range and high out-of-plane payload capacity

doi:10.1007/s11465-017-0453-y

Front. Mech. Eng.

2017, Vol. 12

Issue (2) : 265-278 https://doi.org/10.1007/s11465-017-0453-y

RESEARCH ARTICLE

Mechatronic design of a novel linear compliant positioning stage with large travel range and high out-of-plane payload capacity

Hua LIU, Xin XIE, Ruoyu TAN, Lianchao ZHANG, Dapeng FAN(

)

College of Mechatronic Engineering and Automation, National University of Defense Technology, Changsha 410073, China

Download: PDF(807 KB) HTML
Export: BibTeX | EndNote | Reference Manager | ProCite | RefWorks

Abstract

Most of the XY positioning stages proposed in previous studies are mainly designed by considering only a single performance indicator of the stage. As a result, the other performance indicators are relatively weak. In this study, a 2-degree-of-freedom linear compliant positioning stage (LCPS) is developed by mechatronic design to balance the interacting performance indicators and realize the desired positioning stage. The key parameters and the coupling of the structure and actuators are completely considered in the design. The LCPS consists of four voice coil motors (VCMs), which are conformally designed for compactness, and six spatial leaf spring parallelograms. These parallelograms are serially connected for a large travel range and a high out-of-plane payload capacity. The mechatronic model is established by matrix structural analysis for structural modeling and by Kirchhoff’s law for the VCMs. The sensitivities of the key parameters are analyzed, and the design parameters are subsequently determined. The analytical model of the stage is confirmed by experiments. The stage has a travel range of 4.4 mm× 7.0 mm and a 0.16% area ratio of workspace to the outer dimension of the stage. The values of these performance indicators are greater than those of any existing stage reported in the literature. The closed-loop bandwidth is 9.5 Hz in both working directions. The stage can track a circular trajectory with a radius of 1.5 mm, with 40 mm error and a resolution of lower than 3 mm. The results of payload tests indicate that the stage has at least 20 kg out-of-plane payload capacity.

Keywords mechatronic design linear compliant positioning stage large travel range high out-of-plane payload capacity spatial parallelogram voice coil motor sensitivity analysis

Corresponding Author(s): Dapeng FAN

Just Accepted Date: 19 May 2017 Online First Date: 07 June 2017 Issue Date: 19 June 2017

Cite this article:

Hua LIU,Xin XIE,Ruoyu TAN, et al. Mechatronic design of a novel linear compliant positioning stage with large travel range and high out-of-plane payload capacity[J]. Front. Mech. Eng., 2017, 12(2): 265-278.

URL:

https://academic.hep.com.cn/fme/EN/10.1007/s11465-017-0453-y
https://academic.hep.com.cn/fme/EN/Y2017/V12/I2/265

Fig.1 (a) Novel 2-DOF LCPS and its partitions: (b) X-axis and (c) Y-axis single-DOF LCPS

Tab.1 Performance goals of the LCPS

Fig.2 Planar schematics of the (a) X-axis and (b) Y-axis LGCMs; (c) simplified mass-spring model of LGCM

Fig.3 Schematic of the VCM magnetic circuit

Fig.4 Relationships of the LCPS parameters

Tab.2 Ranges and relationships of the parameters

Fig.5 Results of the parameter sensitivity analysis: (a) Travel range, (b) first resonant frequency, and (c) area ratio

Tab.3 Design values of the stage parameters

Fig.6 Experimental setup of the LCPS

Fig.7 Travel range test: (a) X-axis; (b) Y-axis

Fig.8 Frequency response of the stage: (a) X-axis frequency response and its coupled Y-axis response; (b) Y-axis frequency response and its coupled X-axis response

Fig.9 Tracking performance for a 1.5 mm circular trajectory at 0.25 Hz: (a) Tracking results; (b) tracking errors

Fig.10 Resolution test of the stage

Fig.11 Travel range test results under different payloads: (a) X-axis; (b) Y-axis

Tab.4 Performance of the prototype

Fig A1Division of SLSP: (a) Simple SLSP division and (b) compound SLSP division

14	Gao W, Dejima S, Yanai H, et al.A surface motor-driven planar motion stage integrated with an XYqZ surface encoder for precision positioning. Precision Engineering, 2004, 28(3): 329–337 https://doi.org/10.1016/j.precisioneng.2003.12.003
15	Xiao S, Li Y. Optimal design, fabrication, and control of an micropositioning stage driven by electromagnetic actuators. IEEE Transactions on Industrial Electronics, 2013, 60(10): 4613–4626 https://doi.org/10.1109/TIE.2012.2209613
16	Przemieniecki J S. Theory of Matrix Structural Analysis.New York: McGraw-Hill, 1968
17	Furlani E P. Permanent Magnet and Electromechanical Devices.San Diego: Academic Press, 2001
18	Kim H, Kim J, Ahn D, et al.Development of a nanoprecision 3-DOF vertical positioning system with a flexure hinge. IEEE Transactions on Nanotechnology, 2013, 12(2): 234–245 https://doi.org/10.1109/TNANO.2013.2242088
1	Aoki K, Yanagita Y, Kuroda H, et al.Wide-range fine pointing mechanism for free-space laser communications. Proceedings of SPIE, Free-Space Laser Communication and Active Laser Illumination III, 2004, 5160: 495–506 https://doi.org/10.1117/12.516849
19	Xu Q. New flexure parallel-kinematic micropositioning system with large workspace. IEEE Transactions on Robotics, 2012, 28(2): 478–491 https://doi.org/10.1109/TRO.2011.2173853
2	Yong Y K, Moheimani S O R, Kenton B J, et al.Invited review article: High-speed flexure-guided nanopositioning mechanical design and control issues. Review of Scientific Instruments, 2012, 83(12): 121101 https://doi.org/ 10.1063/1.4765048
3	Kenton B J, Leang K K. Design and control of a three-axis serial-kinematic high-bandwidth nanopositioner. IEEE/ASME Transactions on Mechatronics, 2012, 17(2): 356–369 https://doi.org/10.1109/TMECH.2011.2105499
4	Chen H T H, Ng W, Engelstad R L. Finite element analysis of a scanning x-ray microscope micropositioning stage. Review of Scientific Instruments, 1992, 63(1): 591–594 https://doi.org/10.1063/1.1142713
5	Muthuswamy J, Salas D, Okandan M. A chronic micropositioning system for neurophysiology. In: Proceedings of the Second Joint Engineering in Medicine and Biology, 2002. 24th Annual Conference and the Annual Fall Meeting of the Biomedical Engineering Society EMBS/BMES Conference. Houston: IEEE, 2002, 3: 2115–2116 https://doi.org/10.1109/IEMBS.2002.1053195
6	Howell L L. Compliant Mechanisms.New York: John Wiley & Sons, Inc., 2001
7	Smith S T. Flexures: Elements of Elastic Mechanisms.Boca Raton: CRC Press, 2000
8	Teo T J, Chen I M, Yang G, et al.A flexure-based electromagnetic linear actuator. Nanotechnology, 2008, 19(31): 315501 https://doi.org/10.1088/0957-4484/19/31/315501
9	Zhu X, Xu X, Wen Z, et al.A novel flexure-based vertical nanopositioning stage with large travel range. Review of Scientific Instruments, 2015, 86(10): 105112 https://doi.org/10.1063/1.4932963
10	Xu Q. Design and development of a compact flexure-based precision positioning system with centimeter range. IEEE Transactions on Industrial Electronics, 2014, 61(2): 893–903 https://doi.org/10.1109/TIE.2013.2257139
11	Shang J, Tian Y, Li Z, et al.A novel voice coil motor-driven compliant micropositioning stage based on flexure mechanism. Review of Scientific Instruments, 2015, 86(9): 095001 https://doi.org/ 10.1063/1.4929867
12	Kang D, Kim K, Kim D, et al.Optimal design of high precision XY-scanner with nanometer-level resolution and millimeter-level working range. Mechatronics, 2009, 19(4): 562–570 https://doi.org/10.1016/j.mechatronics.2009.01.002
13	Huh J S, Kim K H, Kang D W, et al.Performance evaluation of precision nanopositioning devices caused by uncertainties due to tolerances using function approximation moment method. Review of Scientific Instruments, 2006, 77(1): 015103 https://doi.org/ 10.1063/1.2162750

[1]	Yimin ZHANG. Reliability-based robust design optimization of vehicle components, Part II: Case studies[J]. Front. Mech. Eng., 2015, 10(2): 145-153.
[2]	Yimin ZHANG. Reliability-based robust design optimization of vehicle components, Part I: Theory[J]. Front. Mech. Eng., 2015, 10(2): 138-144.
[3]	ZHANG Jiantao, ZHU Hua, ZHAO Chunsheng. Modal disturbance investigation of rod-shaped ultrasonic motor using bending vibrations[J]. Front. Mech. Eng., 2008, 3(3): 343-347.

Viewed

Full text

Abstract

Cited

Shared

Discussed