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Frontiers of Mechanical Engineering

ISSN 2095-0233

ISSN 2095-0241(Online)

CN 11-5984/TH

Postal Subscription Code 80-975

2018 Impact Factor: 0.989

Front. Mech. Eng.    2020, Vol. 15 Issue (1) : 55-65    https://doi.org/10.1007/s11465-019-0545-y
RESEARCH ARTICLE
Structural parameter design method for a fast-steering mirror based on a closed-loop bandwidth
Guozhen CHEN, Pinkuan LIU(), Han DING
School of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai 200240, China
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Abstract

When a fast-steering mirror (FSM) system is designed, satisfying the performance requirements before fabrication and assembly is vital. This study proposes a structural parameter design approach for an FSM system based on the quantitative analysis of the required closed-loop bandwidth. First, the open-loop transfer function of the FSM system is derived. In accordance with the transfer function, the notch filter and proportional-integral (PI) feedback controller are designed as a closed-loop controller. The gains of the PI controller are determined by maximizing the closed-loop bandwidth while ensuring the robustness of the system. Then, the two unknown variables of rotational radius and stiffness in the open-loop transfer function are optimized, considering the bandwidth as a constraint condition. Finally, the structural parameters of the stage are determined on the basis of the optimized results of rotational radius and stiffness. Simulations are conducted to verify the theoretical analysis. A prototype of the FSM system is fabricated, and corresponding experimental tests are conducted. Experimental results indicate that the bandwidth of the proposed FSM system is 117.6 Hz, which satisfies the minimum bandwidth requirement of 100 Hz.

Keywords fast-steering mirror      structural parameter      PI controller      bandwidth      notch filter     
Corresponding Author(s): Pinkuan LIU   
Just Accepted Date: 26 June 2019   Online First Date: 25 July 2019    Issue Date: 21 February 2020
 Cite this article:   
Guozhen CHEN,Pinkuan LIU,Han DING. Structural parameter design method for a fast-steering mirror based on a closed-loop bandwidth[J]. Front. Mech. Eng., 2020, 15(1): 55-65.
 URL:  
https://academic.hep.com.cn/fme/EN/10.1007/s11465-019-0545-y
https://academic.hep.com.cn/fme/EN/Y2020/V15/I1/55
Fig.1  Mechanical design of the FSM. MCM: Monolithic compliant mechanism; VCA: Voice coil actuator.
Fig.2  (a) Monolithic compliant mechanism; (b) elastic kinematic chain.
Fig.3  Block diagram of the closed-loop control system.
Fig.4  Parameter optimization of the gains of the PI controller gains.
Fig.5  Effects of variables on the bandwidth of the closed-loop control system. Effects of (a) rotational stiffness and (b) rotational radius.
Fig.6  Local coordinate frames of the (a) translational and (b) rotational plates.
Fig.7  Coordinate frames of the compliant mechanism.
Fig.8  Coordinate frame of the FSM.
Fig.9  Rotational motion of the FSM.
Fig.10  Simulation results of (a) open-loop and (b) closed-loop frequency responses.
Fig.11  Experimental setup of the stage: (a) Motion control system; (b) fast steering mirror stage.
Fig.12  Stiffness of the FSM around (a) x-axis and (b) y-axis.
Fig.13  Open-loop system identification of the FSM.
Fig.14  Experimental results of the (a) open-loop frequency response around the x-axis; (b) closed-loop frequency response around the x-axis; (c) open-loop frequency response around the y-axis; (d) closed-loop frequency response around the y-axis.
Fig.15  Sinusoidal signal responses of the FSM around (a) the x- and (b) the y-axes.
Fig.16  Motion resolution of the FSM.
1 G C Loney. Design of a small-aperture steering mirror for high-bandwidth acquisition and tracking. Optical Engineering, 1990, 29(11): 1360–1365
https://doi.org/10.1117/12.55738
2 C Sun, Y Ding, D Wang, et al.Backscanning step and stare imaging system with high frame rate and wide coverage. Applied Optics, 2015, 54(16): 4960–4965
https://doi.org/10.1364/AO.54.004960
3 N Chen, B Potsaid, J T Wen, et al.Modeling and control of a fast steering mirror in imaging applications. In: Proceedings of IEEE International Conference on Automation Science and Engineering. Toronto: IEEE, 2010, 27–32
https://doi.org/10.1109/COASE.2010.5584424
4 J H Park, H S Lee, J H Lee, et al.Design of a piezoelectric-driven tilt mirror for a fast laser scanner. Japanese Journal of Applied Physics, 2012, 51(9S2): 09MD14
https://doi.org/10.7567/JJAP.51.09MD14
5 W Liu, K Yao, D Huang, et al.Performance evaluation of coherent free space optical communications with a double-stage fast-steering-mirror adaptive optics system depending on the Greenwood frequency. Optics Express, 2016, 24(12): 13288–13302
https://doi.org/10.1364/OE.24.013288
6 C Wang, L Hu, H Xu, et al.Wavefront detection method of a single-sensor based adaptive optics system. Optics Express, 2015, 23(16): 21403–21414
https://doi.org/10.1364/OE.23.021403
7 J W Pan, J Chu, S Zhuang, et al.. A new method for incoherent combining of far-field laser beams based on multiple faculae recognition. Proceedings of SPIE 10710, Young Scientists Forum, 2017, 1071034
https://doi.org/10.1117/12.2316761
8 G L Wood, G P Perram, M A Marciniak, et al.High-energy laser weapons: Technology overview. Proceedings of SPIE 5414, Laser Technologies for Defense and Security, 2004, 1–25
https://doi.org/10.1117/12.544529
9 D J Kluk, M T Boulet, D L Trumper. A high-bandwidth, high-precision, two-axis steering mirror with moving iron actuator. Mechatronics, 2012, 22(3): 257–270
https://doi.org/10.1016/j.mechatronics.2012.01.008
10 S Ito, G Schitter. Atomic force microscopy capable of vibration isolation with low-stiffness Z-axis actuation. Ultramicroscopy, 2018, 186: 9–17
https://doi.org/10.1016/j.ultramic.2017.12.007
11 Y Lu, D Fan, Z Zhang. Theoretical and experimental determination of bandwidth for a two-axis fast steering mirror. Optik, 2013, 124(16): 2443–2449
https://doi.org/10.1016/j.ijleo.2012.08.023
12 E Csencsics, J Schlarp, G Schitter. High-performance hybrid-reluctance-force-based tip/tilt system: Design, control, and evaluation. IEEE/ASME Transactions on Mechatronics, 2018, 23(5): 2494–2502
https://doi.org/10.1109/TMECH.2018.2866272
13 G Yuan, D H Wang, S D Li. Single piezoelectric ceramic stack actuator based fast steering mirror with fixed rotation axis and large excursion angle. Sensors and Actuators. A, Physical, 2015, 235: 292–299
https://doi.org/10.1016/j.sna.2015.10.017
14 G Y Gu, L M Zhu, C Y Su, et al.Modeling and control of piezo-actuated nanopositioning stages: A survey. IEEE Transactions on Automation Science and Engineering, 2016, 13(1): 313–332
https://doi.org/10.1109/TASE.2014.2352364
15 J Ling, Z Feng, M Ming, et al.Damping controller design for nanopositioners: A hybrid reference model matching and virtual reference feedback tuning approach. International Journal of Precision Engineering and Manufacturing, 2018, 19(1): 13–22
https://doi.org/10.1007/s12541-018-0002-6
16 S P Wadikhaye, Y K Yong, B Bhikkaji, et al.Control of a piezoelectrically actuated high-speed serial-kinematic AFM nanopositioner. Smart Materials and Structures, 2014, 23(2): 025030
https://doi.org/10.1088/0964-1726/23/2/025030
17 G M Clayton, S Tien, K K Leang, et al.A review of feedforward control approaches in nanopositioning for high-speed SPM. Journal of Dynamic Systems, Measurement, and Control, 2009, 131(6): 061101
https://doi.org/10.1115/1.4000158
18 G Wang, G Chen, F Bai. High-speed and precision control of a piezoelectric positioner with hysteresis, resonance and disturbance compensation. Microsystem Technologies, 2016, 22(10): 2499–2509
https://doi.org/10.1007/s00542-015-2638-9
19 G Schitter, P J Thurner, P K Hansma. Design and input-shaping control of a novel scanner for high-speed atomic force microscopy. Mechatronics, 2008, 18(5–6): 282–288
https://doi.org/10.1016/j.mechatronics.2008.02.007
20 G Y Gu, L M Zhu, C Y Su. Integral resonant damping for high-bandwidth control of piezoceramic stack actuators with asymmetric hysteresis nonlinearity. Mechatronics, 2014, 24(4): 367–375
https://doi.org/10.1016/j.mechatronics.2013.06.001
21 G Y Gu, L M Zhu. Motion control of piezoceramic actuators with creep, hysteresis and vibration compensation. Sensors and Actuators A: Physical, 2013, 197: 76–87
https://doi.org/10.1016/j.sna.2013.03.005
22 G Chen, Y Ding, X Zhu, et al.Design and modeling of a compliant tip-tilt-piston micropositioning stage with a large rotation range. Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science, 2018, 233(6): 2001–2014
https://doi.org/10.1177/0954406218781401
23 X Wu, S Chen, W Chen, et al.Large angle and high linearity two-dimensional laser scanner based on voice coil actuators. Review of Scientific Instruments, 2011, 82(10): 105103
https://doi.org/10.1063/1.3646464
24 W K Ho, C C Hang, J H Zhou. Performance and gain and phase margins of well-known PI tuning formulas. IEEE Transactions on Control Systems Technology, 1995, 3(2): 245–248
https://doi.org/10.1109/87.388135
25 K Paridari, M S Tavazoei. Fractional PI tuning satisfying gain and phase margin constraints. In: Proceedings of ASME 2011 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, Volume 3: 2011 ASME/IEEE International Conference on Mechatronic and Embedded Systems and Applications, Parts A and B. Washington: ASME, 2011, 227–233
https://doi.org/10.1115/DETC2011-47696
26 Y Koseki, T Tanikawa, N Koyachi, et al.Kinematic analysis of a translational 3-d.o.f. micro-parallel mechanism using the matrix method. Advanced Robotics, 2002, 16(3): 251–264
https://doi.org/10.1163/156855302760121927
27 H Liu, X Xie, R Tan, et al.Mechatronic design of a novel linear compliant positioning stage with large travel range and high out-of-plane payload capacity. Frontiers of Mechanical Engineering, 2017, 12(2): 265–278 doi:10.1007/s11465-017-0453-y
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