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Frontiers of Mechanical Engineering

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Front. Mech. Eng.    2024, Vol. 19 Issue (1) : 6    https://doi.org/10.1007/s11465-023-0772-0
Review on piezoelectric actuators: materials, classifications, applications, and recent trends
Xuyang ZHOU1, Shuang WU2, Xiaoxu WANG2, Zhenshan WANG1, Qixuan ZHU1, Jinshuai SUN1, Panfeng HUANG2, Xuewen WANG1, Wei HUANG1, Qianbo LU1,3()
1. Institute of Flexible Electronics (IFE), Northwestern Polytechnical University, Xi’an 710072, China
2. School of Automation, Northwestern Polytechnical University, Xi’an 710072, China
3. Key Laboratory of Flexible Electronics of Zhejiang Province, Ningbo Institute of Northwestern Polytechnical University, Ningbo 315103, China
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Abstract

Piezoelectric actuators are a class of actuators that precisely transfer input electric energy into displacement, force, or movement outputs efficiently via inverse piezoelectric effect-based electromechanical coupling. Various types of piezoelectric actuators have sprung up and gained widespread use in various applications in terms of compelling attributes, such as high precision, flexibility of stoke, immunity to electromagnetic interference, and structural scalability. This paper systematically reviews the piezoelectric materials, operating principles, representative schemes, characteristics, and potential applications of each mainstream type of piezoelectric actuator. Herein, we intend to provide a more scientific and nuanced perspective to classify piezoelectric actuators into direct and indirect categories with several subcategories. In addition, this review outlines the pros and cons and the future development trends for all kinds of piezoelectric actuators by exploring the relations and mechanisms behind them. The rich content and detailed comparison can help build an in-depth and holistic understanding of piezoelectric actuators and pave the way for future research and the selection of practical applications.
Keywords piezoelectric actuator      piezoelectric effect      amplified piezoelectric actuator      ultrasonic actuator      stepping actuator      piezoelectric polymer     
Corresponding Author(s): Qianbo LU   
Just Accepted Date: 07 November 2023   Issue Date: 24 January 2024
 Cite this article:   
Xuyang ZHOU,Shuang WU,Xiaoxu WANG, et al. Review on piezoelectric actuators: materials, classifications, applications, and recent trends[J]. Front. Mech. Eng., 2024, 19(1): 6.
 URL:  
https://academic.hep.com.cn/fme/EN/10.1007/s11465-023-0772-0
https://academic.hep.com.cn/fme/EN/Y2024/V19/I1/6
Actuator type Driving principle Accuracy Advantages Disadvantages
Electrostatic Coulomb force Below the micron High efficiency, small size, insensitive to the outside temperature Small output force, harsh environment requirements
Electromagnetic Electromagnetic induction Micron High response frequency, reliable operation, low cost, better output, insensitive to the outside temperature Large volume, serious heat, loud noise
Shape-memory alloys Shape-memory effect Micron Better flexibility, small size, large deformation, high energy density Sensitive to external temperature, slow response, low efficiency
Magnetostrictive Magnetostrictive effect Below the micron Large driving force, no fatigue and heat loss Sensitive to electromagnetic magnetic fields, hysteresis
Electrostrictive Electrostrictive effect Below the nanoscale Low creep, better reproducibility Sensitive to temperature, average energy density
Photostrictive Photostrictive effect Micron Antielectromagnetic interference, lightweight, miniaturization, high response frequency Sensitive to temperature, low efficiency
Piezoelectric Inverse piezoelectric effect Subnanometer Antimagnetic interference, high efficiency, high response frequency Hysteresis, creep, more sensitive to temperature
Tab.1  Comparison of different types of actuators and their principles, accuracy, advantages, and disadvantages
Fig.1  Piezoelectric actuators and their fields of application.
Fig.2  Classification diagram of piezoelectric actuators.
Type Mode Orientation of stress Orientation of charge Coupling coefficient
Direct piezoelectric effect Longitudinal 3 3 d33
Transversal 3 1 d31
Shear 1 5 d15
Indirect piezoelectric effect Longitudinal 3 3 e33
Transversal 3 1 e31
Shear 1 5 e15
Tab.2  Coupling coefficients for different modes
Fig.3  Piezoelectric effect energy conversion relationship.
Fig.4  Unimorph piezoelectric actuator: (a) bending mode 1, (b) bending mode 2, and (c) linear expansion/retraction mode.
Compound Material Type Piezoelectric constants Ref.
d33/(pC·N−1) d31/(pC·N−1)
Inorganic α-Quartz Single crystal 2.31 ? [37]
LiNbO3 6 −1 [37]
PMN-PT 2500 ? [42]
PZN-PT 2455 −1204 [40]
PIN-PT 1600 ? [41]
AlN Ceramic 5.5 −2.0 [47]
BaTiO3 191 −79 [35]
PZT-5A 374 −171 [48]
PZT-5H 650 −320 [35]
Organic PVDF Polymer 25 ? [56]
Polyimide 2.5–16.5 ? [53]
Tab.3  Piezoelectric coupling coefficients of different piezoelectric inorganic and organic materials
Fig.5  Different kinds of unimorph piezoelectric actuators and applications: (a) RAINBOW actuator [72], reproduced with permission from AIP Publishing; (b) THUNDER composite laminate [73], reproduced with permission from SPIE; (c) biomimetic fish-shaped robot [74], reproduced with permission from Springer Nature; (d) piezo cooling fan [75], reproduced with permission from Elsevier; (e) active vibration isolation system [76], reproduced with permission from SAGE Publications; (f) multi-degree of freedom piezoelectric micromanipulator [77], reproduced with permission from IEEE; (g) miniature cross-shaped underwater robot [78], reproduced with permission from IEEE; (h) CH201, a 5 m piezoelectric micromachined ultrasound transducer rangefinder commercialized by TDK Inc., reproduced with permission from IEEE; (i) 3D sonic sensor used as an in-display fingerprint sensor developed by Qualcomm Inc., and (j) Cello, a handheld portable piezoelectric micromachined ultrasound transducer-based imaging probe developed by Exo Inc. PJA: pulsed-jet actuator, PZT (PLZT): piezoelectric lead zirconate titanate.
Fig.6  Bimorph piezoelectric actuators: (a) linear expansion/retraction mode and bending mode, (b) parallel configuration, and (c) antiparallel configuration.
Fig.7  Use of bimorph piezoelectric actuators in different scenarios: (a) prototype of the bimorph actuator-based manipulator arm [90], reproduced with permission from SAGE Publications; (b) flapping micro air vehicle [92], reproduced with permission from Springer Nature; (c) piezoelectric actuator-based microgripper [91], reproduced with permission from SPIE; and (d) insect-scale robots [93], reproduced with permission from IEEE. PZT: piezoelectric lead zirconate titanate.
Fig.8  Three structures of the stack: (a) longitudinal stack, (b) transversal stack, and (c) shear stack. PZT: piezoelectric lead zirconate titanate.
Affiliated company Product Main feature Operating voltage/V Operating temperature/°C Blocking force/kN
Physik instrumente (PI) P-007?P-056 PICA stack piezoelectric actuators High forces up to 78 kN, high displacement up to 300 μm, flexible production 0–1000 −20–85 0.65–78.00
P-080 PICMA stack multilayer ring actuators With an inner hole for preload or an aperture for optical applications, ideal for dynamic operation −20–100 −40–150 0.80–0.85
P-088 round PICMA stack multilayer piezoelectric actuators High blocking force up to 7.5 kN, flexible and adaptable overall height −20–100 −40–150 7.50
Piezo direct PDJ150 series for rectangular actuators ? −20–150 −20–120 0.25–7.20
PDH200 series for ring actuators ? −20–200 −20–120 3.60–7.20
Cedrat technologies Parallel pre-stressed actuator series Low voltage piezo ceramic, optimal preload for high dynamics −20–150 ? 1.10–9.30
COREMORROW NAC20 series ? 0–60, 150, 200 0–150 0.17–9.45
NAC21 series ? 0–60, 150, 200 0–150 1.06–8.45
Tab.4  Piezo stack products from different companies
Fig.9  Classification of flexible hinges.
Fig.10  Amplification mechanism using flexible hinges: (a) single lever type, (b) bridge type, and (c) Scott–Russell type.
Fig.11  Piezoelectric actuators with a flexible hinge mechanism: (a) size comparison of the fabricated microgripper of lever type with piezoelectric actuator and (b) CAD model of the microgripper [111], reproduced with permission from Springer Nature; (c) CAD model of the miniature gripper of bridge type [112], reproduced with permission from IEEE; (d) prototype of the piezo actuator with a Scott–Russell (S–R) flexible hinge [113], reproduced with permission from AIP Publishing; and (e) photo of the flexure-based S–R mechanism for nanomanipulation [114], reproduced with permission from Elsevier. LAM: lever-type amplification mechanism, PSA: piezoelectric stack actuator, PZT: piezoelectric lead zirconate titanate, TAM: triangular-type amplification mechanism.
Fig.12  Basic operating principle of the ultrasonic piezoelectric actuators.
Fig.13  Excitation of standing waves and methods of changing direction: (a) operating principle of standing wave motor, changing the propagation direction by (b) electrode configuration and (c) frequency configuration.
Fig.14  Various standing wave ultrasonic motors: (a) prototype of the linear ultrasonic motor based on asymmetric structure [128], reproduced with permission from Elsevier; (b) actuator prototype proposed by Liu et al. [129], reproduced with permission from Elsevier; (c) actuator used for deep sea [130], reproduced under the terms of the CC BY license; (d) prototype of the frog-shaped ultrasonic actuator [133], reproduced with permission from IEEE; (e) L-shaped ultrasonic motor [134], reproduced with permission from AIP Publishing; (f) standing wave ultrasonic motor with rotational displacement output [135], reproduced with permission from Elsevier; (g) bidirectional ultrasonic motors [137], reproduced with permission from Elsevier; (h) standing wave ultrasonic motor with three transducers [136], reproduced with permission from Trans Tech Publications; (i) ultrasonic motor for absolute gravimeter [131], reproduced with permission from Elsevier; and (j) ultrasonic motor for haptic feedback [132], reproduced with permission from Elsevier. PZT: piezoelectric lead zirconate titanate, SWM: standing wave motor.
Fig.15  Operating principle of the propagating wave motor: (a) elliptical motion of the driving feet and (b) synthesis of the propagating wave.
Fig.16  Various traveling wave ultrasonic motors: (a) prototype ring-type motor with radial bending mode [144], reproduced with permission from IEEE; (b) structure of ball-type multi-degree of freedom motor [149], reproduced with permission from Elsevier; (c) structure diagram of hollow traveling wave rotary motor [150], reproduced with permission from SAGE Publications; (d) traveling wave motor (TWM) for wheeled robot [146], reproduced with permission from IOP Publishing; (e) traveling wave motor for manipulator [145], reproduced under the terms of the CC BY license; (f) traveling wave motor for camera auto zooming of a Samsung cellular phone; and (g) ultrasonic motor for feeding device [147], reproduced under the terms of the CC BY license. PZT: piezoelectric lead zirconate titanate.
Fig.17  Different control signals for friction–inertia actuators: (a) sawtooth wave signal, (b) isosceles triangle signal, and (c) square wave signal.
Fig.18  Actuating principles of friction–inertia actuators: (a) principle of inertia/impact drive actuator and (b) principle of stick–slip drive actuator.
Fig.19  Different kinds of inertia/impact drive actuators: (a) linear piezoelectric motor by Liu et al. [162], reproduced with permission from Trans Tech Publications; (b) diagram of the prototype by Pan et al. [163], reproduced with permission from Elsevier; (c) prototype of the inertia drive actuator by Hua et al. [165], reproduced with permission from Trans Tech Publications; (d) prototype of rotary piezoelectric motor [164], reproduced with permission from SPIE; and (e) structure of the rotary actuator by Wen et al. [166], reproduced with permission from Springer Nature.
Fig.20  Different kinds of stick–slip drive actuators (SSDAs): (a) photograph of SSDA used for endoscopic devices [169], reproduced with permission from Elsevier; (b) prototype of SSDA for flapping wing [170], reproduced with permission from Springer Nature; (c) prototype of a linear SSDA [171], reproduced with permission from Taylor & Francis; and (d) cross-section of the rotary SSDA [172], reproduced with permission from IEEE. PZT: piezoelectric lead zirconate titanate.
Fig.21  Motion of inchworm and the operating mode of the actuator [161]: (a) inchworm in nature, (b) walking mode, and (c) pushing mode. Reproduced with permission from Elsevier.
Fig.22  Inchworm piezoelectric actuators combined with different structures: (a) inchworm actuator combine with flexible hinge [192], reproduced with permission from American Scientific Publishers; (b) improving performance with wedge blocks and springs [193], reproduced with permission from Elsevier; and (c) design of a permanent magnet structure is adopted [194], reproduced with permission from Elsevier.
Fig.23  Improvement of inchworm actuators: (a) prototype of the 2 degrees of freedom positioning [197], reproduced with permission from Elsevier; (b) prototype of high-speed inchworm actuator [195], reproduced under the terms of the CC BY license; (c) structure and exciting signals of inchworm actuator without “backlash” phenomenon [196], reproduced with permission from Elsevier; (d) miniaturized inchworm actuator [199], reproduced with permission from Institute of Physics Publishing; and (e) simplified design of inchworm actuator [198], reproduced with permission from Elsevier. NC: normally clamped, NU: normally unclamped, PSA: piezoelectric stack actuator, PZT: piezoelectric lead zirconate titanate.
Actuation method Type Advantages Disadvantages
Direct piezoelectric actuators Membrane piezoelectric actuators Simplest structure, excellent reliability, and repeatability Short stroke and weak load capacity
Multiple piezo stack actuators Larger stroke, lower actuating voltage, rapid response time, higher stiffness and electromechanical coupling, and can withstand compression deformation Cannot withstand tensile deformation
Actuators with flexible hinges Compact structure, smooth and repeatable motion, low inertial mass, low wear, and no “backlash” phenomenon Weak output torque, poor overall stiffness, prominent stress concentration, and slow response speed
Indirect piezoelectric actuators Standing wave actuators Low cost (only a few driving sources needed), direct output displacement, and high efficiency More severe wear
Traveling wave actuators Easy to implement bidirectional actuating Lower efficiency, more complex structure, and difficult to miniaturize
Friction–inertia actuators Unlimited stroke, simple control system, and low cost Slow speed, weak output torque, poor mass transport capacity, “backlash” phenomenon, accumulated errors, serious wear and short working life, and unable to achieve multiaxis motion
Inchworm actuators Unlimited stroke, better load capacity, repeatability, and reliability Slightly worse accuracy, high cost, lower speed, complex control system, and mechanical structure
Tab.5  Characteristics of different piezoelectric actuators
Fig.24  Comparison of the performance of (a) direct and (b) indirect piezoelectric actuators (based on Refs. [206–211]).
Abbreviations
DOF Degree of freedom
HAM Hybrid-type amplification mechanism
IDA Inertia/impact drive actuator
LAM Lever-type amplification mechanism
PI Physik Instrumente
PID Proportional integral derivative
PMUT Piezoelectric micromachined ultrasound transducer
PSA Piezoelectric stack actuator
PVDF Polyvinylidene fluoride
PZT Piezoelectric lead zirconate titanate
RAINBOW Reduced and internally biased oxide wafer
S–R Scott–Russell
SSDA Stick–slip drive actuator
SWM Standing wave motor
TAM Triangular-type amplification mechanism
TWM Traveling wave motor
THUNDER Thin layer unimorph driver
Variables
A Amplitude of the standing wave
d15, d31, d33 Piezoelectric coupling coefficients
Di Electrical displacement
h Height of the single layer of piezoelectric material
k Wavenumber whose value is equal to 2π/λ
k33 Electromechanical coupling factor
l Length of the single layer of piezoelectric material
L Output displacement
t Time
Tc Curie temperature
U Voltage applied to the external electrodes
x Coordinate of a certain position on the elastic body
ω Angular frequency
λ Wavelength of the standing wave
  
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