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Laser self-mixing interferometer for MEMS dynamic measurement |
Zhaoyun ZHANG1( ), Yang GAO1,2, Wei SU1 |
| 1. Institute of Electronic Engineering, China Academy of Engineering Physics, Mianyang 621900, China; 2. Key Laboratory of Optoelectronic Technology and System, Chongqing University, Chongqing 400030, China |
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Abstract Laser self-mixing interferometer has the advantages of simple architecture, compact size, naturally self-aligned optical characteristics, and low cost. It is promising to replace conventional interferometers for physical measurements, such as displacement, distance, velocity, vibration, and so on. In this paper, this interferometer was tried to be used for micro-electro-mechanical system (MEMS) dynamic measurement. Firstly, its measurement principle based on a three-mirror cavity model was presented, and then the laser self-mixing interferometer for MEMS dynamic measurement was designed, experiments were finally performed as target moves with different forms. Experimental results suggest that self-mixing interferometer is available for MEMS dynamic measurement, and may have wider applications in the future.
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| Keywords
laser self-mixing interferometer
dynamic measurement
micro-electro-mechanical system (MEMS)
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Corresponding Author(s):
ZHANG Zhaoyun,Email:zzy_caep@163.com
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Issue Date: 05 June 2013
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