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Frontiers of Optoelectronics

ISSN 2095-2759

ISSN 2095-2767(Online)

CN 10-1029/TN

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Front. Optoelectron.    2015, Vol. 8 Issue (4) : 402-412    https://doi.org/10.1007/s12200-015-0497-8
RESEARCH ARTICLE
Error compensation for three-dimensional profile measurement system
Xu YE1,Haobo CHENG1,*(),Zhichao DONG1,Hon-Yuen TAM2
1. School of Optoelectronics, Beijing Institute of Technology, Beijing 100081, China
2. Department of Mechanical and Biomedical Engineering, City University of Hong Kong, Hong Kong, China
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Abstract

Three-dimensional (3D) profile measurement is an indispensable process for assisting the manufacture of various optic, especially aspheric surfaces. This work presents the measurement error calibration of a 3D profile measurement system, namely PMI700. Measurement errors induced by measuring tool radius, alignment error and the temperature variation were analyzed through geometry analysis and simulation. A quantitative method for the compensation of tool radius and an alignment error compensation model based on the least square method were proposed to reduce the measurement error. To verify the feasibility of PMI700, a plane and a non-uniform hyperboloidal mirror were measured by PMI700 and interferometer, respectively. The data provided by two systems were high coincident. The direct subtractions of results from two systems indicate RMS deviations for both segments were less than 0.2λ.
Keywords aspheric surface      three-dimensional (3D) profile measurement      alignment error      error compensation     
Corresponding Author(s): Haobo CHENG   
Just Accepted Date: 04 June 2015   Online First Date: 30 June 2015    Issue Date: 24 November 2015
 Cite this article:   
Xu YE,Haobo CHENG,Zhichao DONG, et al. Error compensation for three-dimensional profile measurement system[J]. Front. Optoelectron., 2015, 8(4): 402-412.
 URL:  
https://academic.hep.com.cn/foe/EN/10.1007/s12200-015-0497-8
https://academic.hep.com.cn/foe/EN/Y2015/V8/I4/402
Fig.1  

Sketch map of aspheric surfaces
Fig.2  

Schematic of PMI700. (a) CAD model of PMI700; (b) entity of PMI700
Fig.3  

Path of profile measurement. (a) Meridian line path; (b) concentric circles path; (c) helical line path
Fig.4  

Compensation of tool radius
Fig.5  

Model of alignment error between measuring tool and workpiece. (a) Geometrical relationship of alignment errors; (b) 3D distribution of alignment error
Fig.6  

Model of alignment error between measuring tool and turntable. (a) Geometrical relationship of alignment errors; (b) 3D distribution of alignment error
Fig.7  

Model of alignment error between workpiece and turntable. (a) Geometrical relationship among alignment errors; (b) 3D distribution of alignment error
Fig.8  

Influence of e measuring force on output value
Fig.9  

Measuring result of a transversal on convex mirror. (a) Measuring data; (b) differences between repeated measuring data
Fig.10  

Measuring result of a transversal on plane mirror. (a) Measuring data; (b) differences between repeated measuring data
Fig.11  

Influence of temperature on measuring value of PMI700
Fig.12  

Plane mirror measurement. (a) Raw data; (b) measuring result obtained by PMI700; (c) measuring result obtained by Zygo; (d) direct subtraction of measurement results of PMI700 and Zygo
Fig.13  

Hyperboloidal mirror measurement. (a) Raw data after removing tilt error; (b) measuring result obtained by PMI700; (c) measuring result obtained by sub-aperture stitching; (d) direct subtraction of measurement results of PMI700 and sub-aperture stitching interferometer
Tab.1  

Common measurement methods of aspherics
Tab.2  

PV and standard deviation of convex mirror
Tab.3  

PV and standard deviation of plane mirror.
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