Characteristics of laser induced discharge tin plasma and its extreme ultraviolet radiation

doi:10.1007/s12200-020-0964-8

Front. Optoelectron.

2021, Vol. 14

Issue (3) : 352-359 https://doi.org/10.1007/s12200-020-0964-8

RESEARCH ARTICLE

Characteristics of laser induced discharge tin plasma and its extreme ultraviolet radiation

Junwu WANG(

), Xinbing WANG, Duluo ZUO

Wuhan National Research Center for Optoelectronics, Huazhong University of Science and Technology, Wuhan 430074, China

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Abstract

In this paper, a CO₂ laser induced discharge plasma extreme ultraviolet (EUV) source experimental device was established. The optical emission spectroscopy was used to diagnose the characteristics of the plasma, and the evolution of electron temperature and electron density with time was obtained. The influence of discharge voltage on plasma parameters was analyzed and discussed. The EUV radiation characteristics of the plasma were investigated by self-made grazing incidence EUV spectrometer. The EUV radiation intensity and conversion efficiency were discussed.

Keywords extreme ultraviolet (EUV) radiation laser induced discharge plasma optical emission spectroscopy electron temperature and density

Corresponding Author(s): Junwu WANG

Just Accepted Date: 19 March 2020 Online First Date: 13 April 2020 Issue Date: 30 September 2021

Cite this article:

Junwu WANG,Xinbing WANG,Duluo ZUO. Characteristics of laser induced discharge tin plasma and its extreme ultraviolet radiation[J]. Front. Optoelectron., 2021, 14(3): 352-359.

URL:

https://academic.hep.com.cn/foe/EN/10.1007/s12200-020-0964-8
https://academic.hep.com.cn/foe/EN/Y2021/V14/I3/352

Fig.1 LDP OES and EUV spectra detection experimental setup

Fig.2 (a) Waveforms of the discharge voltage and current; and laser induced discharge visible spectra at different times: (b) 200 ns; (c) 800 ns; (d) 2000 ns

Fig.3 LDP visible spectra with different voltages

Fig.4 (a) Boltzmann plot for electron temperature calculating; (b) electron temperatures and current waveforms versus time under different condition of discharge voltage

Fig.5 (a) Voigt line fitting of Stark broadening for electron density calculating; (b) electron densities and current waveforms versus time under different condition of discharge voltage

Fig.6 Average ionized states with different voltages

Fig.7 LPP EUV spectra with different voltages

Fig.8 Relationship between solid Sn EUV spectral intensity and discharge energy

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