Recent research progress of master mold manufacturing by nanoimprint technique for the novel microoptics devices

doi:10.1007/s11706-022-0596-6

Front. Mater. Sci.

2022, Vol. 16

Issue (3) : 220596 https://doi.org/10.1007/s11706-022-0596-6

REVIEW ARTICLE

Recent research progress of master mold manufacturing by nanoimprint technique for the novel microoptics devices

Yuhang LIU¹, Jianjun LIN^1,⁴, Zuohuan HU², Guoli GAO², Bingyang WANG¹, Liuyi WANG¹, Zhiyuan PAN¹, Jianfei JIA¹, Qinwei YIN², Dengji GUO^1,^3,⁴(

), Xujin WANG^1,³(

)

¹. Institute of Semiconductor Manufacturing Research, Shenzhen University, Shenzhen 518060, China
². Shenzhen Silver Basis Technology Co., Ltd., Shenzhen 518108, China
³. Institute of Microelectronics, Shenzhen University, Shenzhen 518060, China
⁴. Shenzhen Key Laboratory of High Performance Nontraditional Manufacturing, College of Mechatronics and Control Engineering, Shenzhen University, Shenzhen 518060, China

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Abstract

The consumer demand for emerging technologies such as augmented reality (AR), autopilot, and three-dimensional (3D) internet has rapidly promoted the application of novel optical display devices in innovative industries. However, the micro/nanomanufacturing of high-resolution optical display devices is the primary issue restricting their development. The manufacturing technology of micro/nanostructures, methods of display mechanisms, display materials, and mass production of display devices are major technical obstacles. To comprehensively understand the latest state-of-the-art and trigger new technological breakthroughs, this study reviews the recent research progress of master molds produced using nanoimprint technology for new optical devices, particularly AR glasses, new-generation light-emitting diode car lighting, and naked-eye 3D display mechanisms, and their manufacturing techniques of master molds. The focus is on the relationships among the manufacturing process, microstructure, and display of a new optical device. Nanoimprint master molds are reviewed for the manufacturing and application of new optical devices, and the challenges and prospects of the new optical device diffraction grating nanoimprint technology are discussed.

Keywords master mold manufacturing nanoimprint technique augmented reality automotive lighting naked-eye 3D display

Corresponding Author(s): Dengji GUO,Xujin WANG

Issue Date: 16 September 2022

Cite this article:

Yuhang LIU,Jianjun LIN,Zuohuan HU, et al. Recent research progress of master mold manufacturing by nanoimprint technique for the novel microoptics devices[J]. Front. Mater. Sci., 2022, 16(3): 220596.

URL:

https://academic.hep.com.cn/foms/EN/10.1007/s11706-022-0596-6
https://academic.hep.com.cn/foms/EN/Y2022/V16/I3/220596

Fig.1 Processes of three types of nanoimprinting: (a) microcontact printing; (b) thermal imprinting; (c) ultraviolet imprinting. Reproduced with permission from Ref. [8].

Fig.2 Display mechanisms of diffractive optical waveguide.

Fig.3 Manufacturing process flow of SRG waveguide. Reproduced with permission from Ref. [38].

Fig.4 Basic workflow of subtractive manufacturing process of SRG waveguide. Reproduced with permission from Ref. [43].

Fig.5 Schematic of patterning and pattern transfer of hard ZrO₂ master using ZrO₂ mold. Reproduced with permission from Ref. [45].

Fig.6 Process flows of (a) T-NIL and (b) UV-NIL. Reproduced with permission from Ref. [46].

Fig.7 Brightness evolution of car headlights. Reproduced with permission from Ref. [64].

Fig.8 Diagram of LED light emitting mechanism using MLA. Reproduced with permission from Ref. [65].

Fig.9 Schematic of rear lamp design. Reproduced with permission from Ref. [66].

Fig.10 Flow of preparation of SOG MLA: (a) cleaning and baking of Si substrate; (b) PR coating; (c) photolithography; (d) spherical profiling; (e) PDMS mold; (f) salinization; (g) SOG coating; (h) SOG MLA. Reproduced with permission from Ref. [67].

Fig.11 Schematic of manufacturing process of MLA: (a) substrate cleaning; (b) photolithography; (c) baking; (d) master mold; (e) PDMS coating; (f) PDMS soft film; (g) hybrid film; (h) hybrid film MLA. Reproduced with permission from Ref. [68].

Fig.12 Schematic of maskless UV lithography apparatus. Reproduced with permission from Ref. [66].

Fig.13 Fabrication process of microcylindrical lens array. Reproduced with permission from Ref. [87].

Fig.14 Schematic of microlens fabrication process: (a) fabrication of PDMS mold; (b) fabrication of polymer microlens by replica molding. Reproduced with permission from Ref. [88].

Fig.15 Experimental equipment for hot embossing. Reproduced with permission from Ref. [91].

Fig.16 The manufacturing process of superlens. Reproduced with permission from Ref. [100].

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