Femtosecond laser-induced graphene for temperature and ultrasensitive flexible strain sensing

doi:10.1007/s11706-024-0696-6

Front. Mater. Sci.

2024, Vol. 18

Issue (3) : 240696 https://doi.org/10.1007/s11706-024-0696-6

Femtosecond laser-induced graphene for temperature and ultrasensitive flexible strain sensing

Mingle Guan^1,², Zheng Zhang¹, Weihua Zhu¹, Yuhang Gao^1,², Sumei Wang^1,²(

), Xin Li¹

¹. Laser Micro/Nano Fabrication Laboratory, School of Mechanical Engineering, Beijing Institute of Technology, Beijing 100081, China
². Yangtze Delta Region Academy of Beijing Institute of Technology, Jiaxing 314000, China

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Abstract

Flexible sensors with high sensitivity and stability are essential components of electronic skin, applicable to detecting human movement, monitoring physiological health, preventing diseases, and other domains. In this study, we utilized a straightforward and efficient femtosecond laser direct writing technique using phenolic resin (PR) as a carbon precursor to produce high-quality laser-induced graphene (LIG) characterized by high crystallinity and low defect density. The fabricated LIG underwent comprehensive characterization using SEM, Raman spectroscopy, XPS, and XRD. Subsequently, we developed strain sensors with a hexagonal honeycomb pattern and temperature sensors with a line pattern based on PR-derived LIG. The strain sensor exhibited an outstanding measurement factor of 4.16 × 10⁴ with a rapid response time of 32 ms, which is applied to detect various movements like finger movements and human pulse. Meanwhile, the temperature sensor demonstrated a sensitivity of 1.49%/°C with a linear response range of 20–50 °C. The PR-derived LIG shows promising potential for applications in human physiological health monitoring and other advanced wearable technologies.

Keywords femtosecond laser laser-induced graphene flexible sensor high sensitivity

Corresponding Author(s): Sumei Wang

Issue Date: 10 September 2024

Cite this article:

Mingle Guan,Zheng Zhang,Weihua Zhu, et al. Femtosecond laser-induced graphene for temperature and ultrasensitive flexible strain sensing[J]. Front. Mater. Sci., 2024, 18(3): 240696.

URL:

https://academic.hep.com.cn/foms/EN/10.1007/s11706-024-0696-6
https://academic.hep.com.cn/foms/EN/Y2024/V18/I3/240696

Fig.1 (a) Schematic illustration of the LIG sensor fabrication. (b) Schematic illustration of a medical PU film on the skin.

Fig.2 SEM images of LIG at a laser fluence of 0.80 J·cm^?2 with scanning speeds of (a)(d) 1000 μm·s^?1, (b)(e) 2000 μm·s^?1, and (c)(f) 3000 μm·s^?1.

Fig.3 SEM images of LIG at a scanning speed of 3000 μm·s^?1 and laser fluences of (a)(b) 0.80 J·cm^?2, (c)(d) 1.13 J·cm^?2, (e)(f) 1.95 J·cm^?2, and (g)(h) 2.59 J·cm^?2. (i) Resistances of LIG towards different laser parameters.

Fig.4 (a) Raman spectra of PR and LIG. (b) XRD patterns of PR and LIG. (c) High-resolution C 1s XPS spectrum of PR. (d) High-resolution C 1s XPS spectrum of LIG.

Fig.5 Strain sensing performances: (a) the resistance of the LIG strain sensor varies with tensile strain; (b) a magnified view of the change of the sensor’s resistance in the strain range from 0 to 2.8%; (c) a magnified view of the change of the sensor’s resistance in the strain range from 2.8% to 3.6%; (d) the sensor’s response during a tensile release cycle test; (e) response time of the sensor.

Tab.1 Comparison of this LIG strain sensor and other graphene-based strain sensors reported in recent studies [33–41]

Fig.6 Temperature sensing performance: (a) stability response of the LIG sensor at 20?70 °C; (b) sensitivity of the LIG sensor.

Fig.7 Real-time motion monitoring with the LIG sensor (the sensor was prepared with a 2.59 J·cm^?2 laser fluence and a scanning speed of 3000 μm·s^?1): (a) real-time resistance response of the sensor at the metacarpal bone during finger movement; (b) real-time resistive response of the sensor to a human pulse.

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