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Application of atmospheric pressure plasma polishing
method in machining of silicon ultra-smooth surfaces |
| ZHANG Jufan, WANG Bo, DONG Shen |
| School of Mechanical Engineering, Harbin Institute of Technology |
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Abstract The modern optics industry demands rigorous surface quality with minimum defects, which presents challenges to optics machining technologies. There are always certain defects on the final surfaces of the components formed in convent
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Issue Date: 05 December 2008
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