Fabrication of micro/nano-structures by electrohydrodynamic jet technique

doi:10.1007/s11465-017-0461-y

Front. Mech. Eng.

2017, Vol. 12

Issue (4) : 477-489 https://doi.org/10.1007/s11465-017-0461-y

REVIEW ARTICLE

Fabrication of micro/nano-structures by electrohydrodynamic jet technique

Dazhi WANG^1,²(

), Xiaojun ZHAO¹, Yigao LIN¹, Tongqun REN^1,², Junsheng LIANG^1,², Chong LIU^1,², Liding WANG^1,²

¹. Key Laboratory for Micro/Nano Technology and System of Liaoning Province, Dalian University of Technology, Dalian 116024, China
². Key Laboratory for Precision and Non-traditional Machining Technology of the Ministry of Education, Dalian University of Technology, Dalian, 116024, China

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Abstract

Electrohydrodynamic jet (E-Jet) is an approach to the fabrication of micro/nano-structures by the use of electrical forces. In this process, the liquid is subjected to electrical and mechanical forces to form a liquid jet, which is further disintegrated into droplets. The major advantage of the E-Jet technique is that the sizes of the jet formed can be at the nanoscale far smaller than the nozzle size, which can realize high printing resolution with less risk of nozzle blockage. The E-Jet technique, which mainly includes E-Jet deposition and E-Jet printing, has a wide range of applications in the fabrication of micro/nano-structures for micro/nano-electromechanical system devices. This technique is also considered a micro/nano-fabrication method with a great potential for commercial use. This study mainly reviews the E-Jet deposition/printing fundamentals, fabrication process, and applications.

Keywords electrohydrodynamic jet deposition electrohydrodynamic jet printing micro/nano-structures film

Corresponding Author(s): Dazhi WANG

Just Accepted Date: 07 June 2017 Online First Date: 09 August 2017 Issue Date: 31 October 2017

Cite this article:

Dazhi WANG,Xiaojun ZHAO,Yigao LIN, et al. Fabrication of micro/nano-structures by electrohydrodynamic jet technique[J]. Front. Mech. Eng., 2017, 12(4): 477-489.

URL:

https://academic.hep.com.cn/fme/EN/10.1007/s11465-017-0461-y
https://academic.hep.com.cn/fme/EN/Y2017/V12/I4/477

Fig.1 Schematic of the E-Jet equipment rig

Fig.2 Forces on the cone-jet mode of the E-jet technique

Fig.3 Modes of E-Jet. (a) Dripping; (b) spindle; (c) cone-jet; (d) multi-jet

Fig.4 Steps of micro/nano-particle production via E-Jet deposition

Fig.5 Film structure morphologies. (a) Dense films; (b) porous films

Fig.6 Scanning electron microscope (SEM) image of (a) ZnO thin film and (b) cross-section of the Cu-ZnO-Ag junction. Reproduced from Ref. [42] with permission from the Current Applied Physics

Fig.7 SEM image of the surface of the PZT thick film produced by E-Jet deposition. Reprodued from Ref. [46] with permission from theJournal of the European Ceramic Society

Fig.8 Stable cone-jet mode of coaxial E-Jet printing of (a) the 20-nm suspension through the inner needle; (b) the 120-nm suspension through the outer needle; (c) simultaneous jetting of both nano-suspensions. Reprduced for Ref. [57] from the Journal of Nanoparticle Research

Fig.9 Schematic of the fabrication of electronic devices with E-Jet printing. (a) Graphene TFT with printed Cu electrodes; (b) a memristor

Fig.10 QD arrays for LEDs. Reproduced from Ref. [90] with permission from American Chemical Society

Fig.11 Structure of a flexible temperature sensor. Reprinted from Ref. [91] with permission fromthe Japan Society of Applied Physics

Fig.12 (a) Printed multiple sequences of single-stranded DNA molecules,reproduced from Ref. [99] with permission from American Chemical Society; (b) fluorescence microscope images of printed protein pattern,reproduced from Ref. [101] with permission fromAmerican Chemical Society

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