Please wait a minute...
Frontiers of Mechanical Engineering

ISSN 2095-0233

ISSN 2095-0241(Online)

CN 11-5984/TH

Postal Subscription Code 80-975

2018 Impact Factor: 0.989

Front. Mech. Eng.    2018, Vol. 13 Issue (2) : 251-263    https://doi.org/10.1007/s11465-018-0504-z
REVIEW ARTICLE
A review on ductile mode cutting of brittle materials
Elijah Kwabena ANTWI1, Kui LIU2(), Hao WANG1
1. Department of Mechanical Engineering, National University of Singapore, Singapore
2. Singapore Institute of Manufacturing Technology, Singapore
 Download: PDF(622 KB)   HTML
 Export: BibTeX | EndNote | Reference Manager | ProCite | RefWorks
Abstract

Brittle materials have been widely employed for industrial applications due to their excellent mecha-nical, optical, physical and chemical properties. But obtaining smooth and damage-free surface on brittle materials by traditional machining methods like grinding, lapping and polishing is very costly and extremely time consuming. Ductile mode cutting is a very promising way to achieve high quality and crack-free surfaces of brittle materials. Thus the study of ductile mode cutting of brittle materials has been attracting more and more efforts. This paper provides an overview of ductile mode cutting of brittle materials including ductile nature and plasticity of brittle materials, cutting mechanism, cutting characteristics, molecular dynamic simulation, critical undeformed chip thickness, brittle-ductile transition, subsurface damage, as well as a detailed discussion of ductile mode cutting enhancement. It is believed that ductile mode cutting of brittle materials could be achieved when both crack-free and no subsurface damage are obtained simultaneously.

Keywords ductile mode cutting      brittle materials      critical undeformed chip thickness      brittle-ductile transition      subsurface damage      molecular dynamic simulation     
Corresponding Author(s): Kui LIU   
Just Accepted Date: 15 January 2018   Online First Date: 01 March 2018    Issue Date: 16 March 2018
 Cite this article:   
Elijah Kwabena ANTWI,Kui LIU,Hao WANG. A review on ductile mode cutting of brittle materials[J]. Front. Mech. Eng., 2018, 13(2): 251-263.
 URL:  
https://academic.hep.com.cn/fme/EN/10.1007/s11465-018-0504-z
https://academic.hep.com.cn/fme/EN/Y2018/V13/I2/251
Fig.1  Schematic diagrams of two cutting modes for brittle materials [5]. (a) DMC by removing a ductile metallized layer resulted from the large contact pressure in cutting region; (b) BMC by material fracture leaving subsurface damages, of which the subsurface damage is as deep as 5–10 µm due to crack propagations in machining of silicon
Fig.2  An indentation model of elastic-plastic behaviour [21]
Fig.3  Schematic diagram illustrated brittle-ductile transition in grooving [31]
Fig.4  A turning model considering the damaged depth [43]
Fig.5  SEM photograph of the groove surface achieved in turning of soda-lime glass [43]
Fig.6  Schematic illustration of DMC chip formation [43]. (a) 2Raoa o2 f; (b) 2Raoa o2 >f
Fig.7  SEM photos of chips formation in cutting of WC [14]. (a) dmax = 920 nm; (b) dmax = 1164 nm
Fig.8  SEM photos of chip formation in turning of silicon [45]. (a) dmax = 20 nm; (b) dmax = 690 nm
Fig.9  Measured surface roughness in cutting of single crystal silicon wafer [57]
Fig.10  SEM photographs obtained surfaces in cutting of WC [60]. (a) dmax of 644 nm; (b) dmax of 1164 nm
Fig.11  SEM and AFM photos obtained surfaces in turning of silicon [4,57]. (a) dmax of 65 nm; (b) dmax of 348 nm; (c) dmax of 65 nm; (d) dmax of 348 nm
Fig.12  Molecular dynamic simulation model of nanoscale DMC [40,78]
1 Venkatesh V C, Inasaki I, Toenshof H K, et al. Observations on polishing and ultraprecision machining of semiconductor substrate materials. CIRP Annals-Manufacturing Technology, 1995, 44(2): 611–618
https://doi.org/10.1016/S0007-8506(07)60508-3
2 Tönshoff H K, Schmieden W V, Inasaki I, et al. Abrasive machining of silicon. CIRP Annals-Manufacturing Technology, 1990, 39(2): 621–635
https://doi.org/10.1016/S0007-8506(07)62999-0
3 Pei Z J, Fisher G R, Liu J. Grinding of silicon wafers: A review from historical perspectives. International Journal of Machine Tools and Manufacture, 2008, 48(12–13): 1297–1307
https://doi.org/10.1016/j.ijmachtools.2008.05.009
4 Liu K, Zuo D W, Li X P, et al. Nanometric ductile cutting characteristics of silicon wafer using single crystal diamond tools. Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, 2009, 27(3): 1361–1366
https://doi.org/10.1116/1.3071855
5 Domnich V, Gogotsi Y. Phase transformations in silicon under contact loading. Reviews on Advanced Materials Science, 2002, 3: 1–36
6 Fang F Z, Chen L J. Ultra-precision cutting for ZKN7 glass. CIRP Annals-Manufacturing Technology, 2000, 49(1): 17–20
https://doi.org/10.1016/S0007-8506(07)62887-X
7 King R F, Tabor D. The strength properties and frictional behaviour of brittle solids. Proceedings of the Royal Society of London. Series A, Mathematical and Physical Sciences, 1954, 223(1153): 225–238
https://doi.org/10.1098/rspa.1954.0111
8 Huerta M, Malkin S. Grinding of glass: The mechanics of the process. Journal of Engineering for Industry, 1976, 98(2): 459–467
https://doi.org/10.1115/1.3438907
9 Foy K, Wei Z, Matsumura T, et al. Effect of tilt angle on cutting regime transition in glass micromilling. International Journal of Machine Tools and Manufacture, 2009, 49(3–4): 315–324
https://doi.org/10.1016/j.ijmachtools.2008.10.007
10 Ono T, Matsumura T. Influence of tool inclination on brittle fracture in glass cutting with ball end mills. Journal of Materials Processing Technology, 2008, 202(1–3): 61–69
https://doi.org/10.1016/j.jmatprotec.2007.08.068
11 Matsumura T, Ono T. Cutting process of glass with inclined ball end mill. Journal of Materials Processing Technology, 2008, 200(1–3): 356–363
https://doi.org/10.1016/j.jmatprotec.2007.08.067
12 Takeuchi Y, Sawada K, Sata T. Ultraprecision 3D micromachining of glass. CIRP Annals-Manufacturing Technology, 1996, 45(1): 401–404
https://doi.org/10.1016/S0007-8506(07)63090-X
13 Liu K, Li X P, Liang S Y. The mechanism of ductile chip formation in cutting of brittle materials. International Journal of Advanced Manufacturing Technology, 2007, 33(9–10): 875–884
https://doi.org/10.1007/s00170-006-0531-5
14 Liu K, Li X P, Liang Y S. Nanometer-scale ductile cutting of tungsten carbide. Journal of Manufacturing Processes, 2004, 6(2): 187–195
https://doi.org/10.1016/S1526-6125(04)70073-0
15 Arif M, Rahman M, Wong Y S. Analytical model to determine the critical feed per edge for ductile-brittle transition in milling process of brittle materials. International Journal of Machine Tools and Manufacture, 2011, 51(3): 170–181
https://doi.org/10.1016/j.ijmachtools.2010.12.003
16 Arif M, Rahman M, Wong Y S. Ultraprecision ductile mode machining of glass by micromilling process. Journal of Manufacturing Processes, 2011, 13(1): 50–59
https://doi.org/10.1016/j.jmapro.2010.10.004
17 Swain M V. Microfracture about scratches in brittle solids. Proceedings of the Royal Society of London. Series A, Mathematical and Physical Sciences, 1979, 366(1727): 575–597
https://doi.org/10.1098/rspa.1979.0070
18 Dolev D. A note on plasticity of glass. Journal of Materials Science Letters, 1983, 2(11): 703–704
https://doi.org/10.1007/BF00720408
19 Finnie I, Dolev D, Khatibloo M. On the physical basis of Auerbach’s law. Journal of Engineering Materials and Technology, 1981, 103(2): 183–184
https://doi.org/10.1115/1.3224992
20 Lawn B R, Evans A G. A model for crack initiation in elastic/plastic indentation fields. Journal of Materials Science, 1977, 12(11): 2195–2199
https://doi.org/10.1007/BF00552240
21 Yan J, Yoshino M, Kuriagawa T, et al. On the ductile machining of silicon for micro electro-mechanical systems (MEMS), opto-electronic and optical applications. Materials Science and Engineering: A, 2001, 297(1–2): 230–234
https://doi.org/10.1016/S0921-5093(00)01031-5
22 Shimada S, Ikawa N, Inamura T, et al. Brittle-ductile transition phenomena in microindentation and micromachining. CIRP Annals-Manufacturing Technology, 1995, 44(1): 523–526
https://doi.org/10.1016/S0007-8506(07)62377-4
23 Bridgman P, Šimon I. Effects of very high pressures on glass. Journal of Applied Physics, 1953, 24(4): 405–413
https://doi.org/10.1063/1.1721294
24 Sun Y L, Zuo D W, Wang H Y, et al. Mechanism of brittle-ductile transition of a glass-ceramic rigid substrate. International Journal of Minerals Metallurgy and Materials, 2011, 18(2): 229–233
https://doi.org/10.1007/s12613-011-0427-8
25 Clarke D R, Kroll M C, Kirchner P D, et al. Amorphization and conductivity of silicon and germanium induced by indentation. Physical Review Letters, 1988, 60(21): 2156–2159
https://doi.org/10.1103/PhysRevLett.60.2156
26 Gridneva I V, Milman Y V, Trefilov V I. Phase transition in diamond-structure crystals during hardness measurements. Physica Status Solidi (a), 1972, 14(1): 177–182
https://doi.org/10.1002/pssa.2210140121
27 Lawn B R, Wilshaw R. Indentation fracture: Principles and applications. Journal of Materials Science, 1975, 10(6): 1049–1081
https://doi.org/10.1007/BF00823224
28 Nakasuji T, Kodera S, Hara S, et al. Diamond turning of brittle materials for optical components. CIRP Annals-Manufacturing Technology, 1990, 39(1): 89–92
https://doi.org/10.1016/S0007-8506(07)61009-9
29 Shaw M C. New theory of grinding. Institution of Engineers, Australia: Mechanical & Chemical Engineering Transactions, 1972, 73–78
30 Komanduri R. Some aspects of machining with negative rake tools simulating grinding. International Journal of Machine Tool Design and Research, 1971, 11(3): 223–233
https://doi.org/10.1016/0020-7357(71)90027-8
31 Liu K, Li X P, Rahman M, et al. A study of the cutting modes in grooving of tungsten carbide. International Journal of Advanced Manufacturing Technology, 2004, 24(5–6): 321–326
https://doi.org/10.1007/s00170-003-1565-6
32 Puttick K E, Whitmore L C, Chao C L, et al. Transmission electron microscopy of nanomachined silicon crystals. Philosophical Magazine A, 1994, 69(1): 91–103
https://doi.org/10.1080/01418619408242212
33 Bifano T G, Yi Y. Acoustic emission as an indicator of material-removal regime in glass micro-machining. Precision Engineering, 1992, 14(4): 219–228
https://doi.org/10.1016/0141-6359(92)90019-S
34 Li C, Zhang F H, Meng B B, et al. Research of material removal and deformation mechanism for single crystal GGG (Gd3Ga5O12) based on varied-depth nanoscratch testing. Materials & Design, 2017, 125: 180–188
https://doi.org/10.1016/j.matdes.2017.04.018
35 Li C, Zhang F H, Ding Y, et al. Surface deformation and friction characteristic of nano scratch at ductile-removal regime for optical glass BK7. Applied Optics, 2016, 55(24): 6547–6553
https://doi.org/10.1364/AO.55.006547
36 Kovalchenko A M, Milman Y V. On the cracks self-healing mechanism at ductile mode cutting of silicon. Tribology International, 2014, 80: 166–171
https://doi.org/10.1016/j.triboint.2014.07.003
37 Yan J, Zhang Z, Kuriyagawa T. Mechanism for material removal in diamond turning of reaction-bonded silicon carbide. International Journal of Machine Tools and Manufacture, 2009, 49(5): 366–374
https://doi.org/10.1016/j.ijmachtools.2008.12.007
38 Shibata T, Fujii S, Makino E, et al. Ductile-regime turning mechanism of single-crystal silicon. Precision Engineering, 1996, 18(2–3): 129–137
https://doi.org/10.1016/0141-6359(95)00054-2
39 Bifano T G, Dow T A, Scattergood R O. Ductile-mode grinding: A new technology for machining brittle materials. Journal of Engineering for Industry, 1991, 113(2): 184–189
https://doi.org/10.1115/1.2899676
40 Arefin S, Li X P, Cai M B, et al. The effect of the cutting edge radius on a machined surface in the nanoscale ductile mode cutting of silicon wafer. Proceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture, 2007, 221(2): 213–220
https://doi.org/10.1243/09544054JEM568
41 Blake P N, Scattergood R O. Ductile-mode machining of germanium and silicon. Journal of the American Ceramic Society, 1990, 73(4): 949–957
https://doi.org/10.1111/j.1151-2916.1990.tb05142.x
42 Blackley W, Scattergood R O. Ductile-regime machining model for diamond turning of brittle materials. Precision Engineering, 1991, 13(2): 95–103
https://doi.org/10.1016/0141-6359(91)90500-I
43 Liu K, Li X P, Liang S Y, et al. Nanometer-scale, ductile-mode cutting of soda-lime glass. Journal of Manufacturing Processes, 2005, 7(2): 95–101
https://doi.org/10.1016/S1526-6125(05)70086-4
44 Liu K, Li X P, Rahman M, et al. CBN tool wear in ductile cutting of tungsten carbide. Wear, 2003, 255(7–12): 1344–1351
https://doi.org/10.1016/S0043-1648(03)00061-9
45 Liu K, Li X P, Rahman M, et al. A study of the effect of tool cutting edge radius on ductile cutting of silicon wafers. International Journal of Advanced Manufacturing Technology, 2007, 32(7–8): 631–637
https://doi.org/10.1007/s00170-005-0364-7
46 Jasinevicius R G, Duduch J G, Pizani P S. Structure evaluation of submicrometre silicon chips removed by diamond turning. Semiconductor Science and Technology, 2007, 22(5): 561–573
https://doi.org/10.1088/0268-1242/22/5/019
47 Yan J W, Gai X H, Kuriyagawa T. Fabricating nano ribbons and nano fibers of semiconductor materials by diamond turning. Journal of Nanoscience and Nanotechnology, 2009, 9(2): 1423–1427
https://doi.org/10.1166/jnn.2009.C170
48 Jasinevicius R G, Porto A J V, Duduch J G, et al. Multiple phase silicon in submicrometer chips removed by diamond turning. Journal of the Brazilian Society of Mechanical Sciences and Engineering, 2005, 27(4): 440–448
https://doi.org/10.1590/S1678-58782005000400013
49 Tanikella B V, Somasekhar A H, Sowers A T, et al. Phase transformations during microcutting tests on silicon. Applied Physics Letters, 1996, 69(19): 2870–2872
https://doi.org/10.1063/1.117346
50 Morris J C, Callahan D L, Kulik J, et al. Origins of the ductile mode in single-point diamond turning of semiconductors. Journal of the American Ceramic Society, 1995, 78(8): 2015–2020
https://doi.org/10.1111/j.1151-2916.1995.tb08612.x
51 Puttick K E, Whitmore L C, Zhdan P, et al. Energy scaling transitions in machining of silicon by diamond. Tribology International, 1995, 28(6): 349–355
https://doi.org/10.1016/0301-679X(95)00019-Z
52 Yan J, Asami T, Harada H, et al. Fundamental investigation of subsurface damage in single crystalline silicon caused by diamond machining. Precision Engineering, 2009, 33(4): 378–386
https://doi.org/10.1016/j.precisioneng.2008.10.008
53 Yan J, Asami T, Harada H, et al. Crystallographic effect on subsurface damage formation in silicon microcutting. CIRP Annals, 2012, 61(1): 131–134
https://doi.org/10.1016/j.cirp.2012.03.070
54 Yu D P, Wong Y S, Hong G S. A novel method for determination of the subsurface damage depth in diamond turning of brittle materials. International Journal of Machine Tools and Manufacture, 2011, 51(12): 918–927
https://doi.org/10.1016/j.ijmachtools.2011.08.007
55 Liu K, Li X P, Rahman M, et al. Study of surface topography in nanometric ductile cutting of silicon wafers. In: Proceedings of Electronics Packaging Technology Conference. Singapore: IEEE, 2002, 200–205
https://doi.org/10.1109/EPTC.2002.1185668
56 Pei Z J, Billingsley S R, Miura S. Grinding induced subsurface cracks in silicon wafers. International Journal of Machine Tools and Manufacture, 1999, 39(7): 1103–1116
https://doi.org/10.1016/S0890-6955(98)00079-0
57 Arefin S, Li X P, Rahman M, et al. The upper bound of tool edge radius for nanoscale ductile cutting of silicon wafer. International Journal of Advanced Manufacturing Technology, 2007, 31(7–8): 655–662
https://doi.org/10.1007/s00170-005-0245-0
58 Shibata T, Ono A, Kurihara K, et al. Cross-section transmission electron microscope observations of diamond-turned single-crystal Si surfaces. Applied Physics Letters, 1994, 65(20): 2553–2555
https://doi.org/10.1063/1.112633
59 Schinker M G. Subsurface damage mechanisms at high-speed ductile machining of optical glasses. Precision Engineering, 1991, 13(3): 208–218
https://doi.org/10.1016/0141-6359(91)90100-W
60 Liu K, Li X P, Rahman M. Characteristics of high speed micro cutting of tungsten carbide. Journal of Materials Processing Technology, 2003, 140(1–3): 352–357
https://doi.org/10.1016/S0924-0136(03)00758-1
61 Li X P, He T, Rahman M. Tool wear characteristics and their effects on nanoscale ductile mode cutting of silicon wafer. Wear, 2005, 259(7–12): 1207–1214
https://doi.org/10.1016/j.wear.2004.12.020
62 Born D K, Goodman W A. An empirical survey on the influence of machining parameters on tool wear in diamond turning of large single-crystal silicon optics. Precision Engineering, 2001, 25(4): 247–257
https://doi.org/10.1016/S0141-6359(00)00069-6
63 Zong W J, Sun T, Li D, et al. XPS analysis of the groove wearing marks on flank face of diamond tool in nanometric cutting of silicon wafer. International Journal of Machine Tools and Manufacture, 2008, 48(15): 1678–1687
https://doi.org/10.1016/j.ijmachtools.2008.06.008
64 Yan J W, Syoji K, Tamaki J. Some observations on the wear of diamond tools in ultra-precision cutting of single-crystal silicon. Wear, 2003, 255(7–12): 1380–1387
https://doi.org/10.1016/S0043-1648(03)00076-0
65 Sharif Uddin M, Seah K H W, Li X P, et al. Effect of crystallographic orientation on wear of diamond tools for nano-scale ductile cutting of silicon. Wear, 2004, 257(7–8): 751–759
https://doi.org/10.1016/j.wear.2004.03.012
66 Uddin M S, Seah K H W, Rahman M, et al. Performance of single crystal diamond tools in ductile mode cutting of silicon. Journal of Materials Processing Technology, 2007, 185(1–3): 24–30
https://doi.org/10.1016/j.jmatprotec.2006.03.138
67 Wilks J. Performance of diamonds as cutting tools for precision machining. Precision Engineering, 1980, 2(2): 57–72
https://doi.org/10.1016/0141-6359(80)90056-2
68 Paul E, Evans C J, Mangamelli A, et al. Chemical aspects of tool wear in single point diamond turning. Precision Engineering, 1996, 18(1): 4–19
https://doi.org/10.1016/0141-6359(95)00019-4
69 Cai M B, Li X P, Rahman M. Characteristics of “dynamic hard particles” in nanoscale ductile mode cutting of monocrystalline silicon with diamond tools in relation to tool groove wear. Wear, 2007, 263(7–12): 1459–1466
https://doi.org/10.1016/j.wear.2006.11.030
70 Cai M B, Li X P, Rahman M. Study of the mechanism of groove wear of the diamond tool in nanoscale ductile mode cutting of monocrystalline silicon. Journal of Manufacturing Science and Engineering, 2007, 129(2): 281–286
https://doi.org/10.1115/1.2673567
71 Komanduri R, Raff L M. A review on the molecular dynamics simulation of machining at the atomic scale. Simulation, Proceedings of the Institution of Mechanical Engineers Part B: Journal of Engineering Manufacture, 2001, 215(12): 1639–1672
72 Alder B J, Wainwright T E. Studies in molecular dynamics I: General method. Journal of Chemical Physics, 1959, 31(2): 459–466
https://doi.org/10.1063/1.1730376
73 Alder B J, Wainwright T E. Studies in molecular dynamics II: Behavior of a small number of elastic spheres. Journal of Chemical Physics, 1960, 33(5): 1439–1451
https://doi.org/10.1063/1.1731425
74 Belak J F, Boercker D B, Stowers I F. Simulation of nanometer-scale deformation of metallic and ceramic surfaces. MRS Bulletin, 1993, 18(5): 55–60
https://doi.org/10.1557/S088376940004714X
75 Belak J F, Stowers I F. A molecular dynamics model of the orthogonal cutting process. In: Proceedings of American Society of Photoptical Engineers Annual Conference. Rochester: Lawrence Livermore National Lab, 1990, 76–80
76 Stowers I F, Belak J F, Lucca D A, et al. Molecular dynamics simulation of the chip forming process in single crystal copper and comparison with experimental data. In: Proceedings of American Society of Photoptical Engineers Annual Conference. Stanford, 1991, 100–104
77 Goel S, Luo X, Reuben R L. Wear mechanism of diamond tools against single crystal silicon in single point diamond turning process. Tribology International, 2013, 57: 272–281
https://doi.org/10.1016/j.triboint.2012.06.027
78 Cai M B, Li X P, Rahman M. Molecular dynamics modelling and simulation of nanoscale ductile cutting of silicon. International Journal of Computer Applications in Technology, 2007, 28(1): 2–8
https://doi.org/10.1504/IJCAT.2007.012325
79 Cai M B, Li X P, Rahman M. Study of the temperature and stress in nanoscale ductile mode cutting of silicon using molecular dynamics simulation. Journal of Materials Processing Technology, 2007, 192–193: 607–612
https://doi.org/10.1016/j.jmatprotec.2007.04.028
80 Zhang Z G, Fang F Z, Hu X T, et al. Molecular dynamics study on various nanometric cutting boundary conditions. Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, 2009, 27(3): 1355–1360
https://doi.org/10.1116/1.3049513
81 Komanduri R, Chandrasekaran N, Raff L M. Effect of tool geometry in nanometric cutting: A molecular dynamics simulation approach. Wear, 1998, 219(1): 84–97
https://doi.org/10.1016/S0043-1648(98)00229-4
82 Cai M B, Li X P, Rahman M. Study of the mechanism of nanoscale ductile mode cutting of silicon using molecular dynamics simulation. International Journal of Machine Tools and Manufacture, 2007, 47(1): 75–80
https://doi.org/10.1016/j.ijmachtools.2006.02.016
83 Cai M B, Li X P, Rahman M, et al. Crack initiation in relation to the tool edge radius and cutting conditions in nanoscale cutting of silicon. International Journal of Machine Tools and Manufacture, 2007, 47(3–4): 562–569
https://doi.org/10.1016/j.ijmachtools.2006.05.006
84 Cai M B, Li X P, Rahman M. Molecular dynamics simulation of the effect of tool edge radius on cutting forces and cutting region in nanoscale ductile cutting of silicon. International Journal of Manufacturing Technology and Management, 2005, 7: 455–466
https://doi.org/10.1504/IJMTM.2005.007697
85 Zhang L C, Tanaka H. Atomic scale deformation in silicon monocrystals induced by two-body and three-body contact sliding. Tribology International, 1998, 31(8): 425–433
https://doi.org/10.1016/S0301-679X(98)00064-4
86 Zhang L C, Tanaka H. On the mechanics and physics in the nano-indentation of silicon monocrystals. JSME International Journal. Series A, Solid Mechanics and Material Engineering, 1999, 42(4): 546–559
https://doi.org/10.1299/jsmea.42.546
87 Cheong W C D, Zhang L C. Molecular dynamics simulation of phase transformations in silicon monocrystals due to nano-indentation. Nanotech, 2000, 11(3): 173–180
https://doi.org/10.1088/0957-4484/11/3/307
88 Cai M B, Li X P, Rahman M. High-pressure phase transformation as the mechanism of ductile chip formation in nanoscale cutting of silicon wafer. Proceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture, 2007, 221(10): 1511–1519
https://doi.org/10.1243/09544054JEM901
89 Inamura T, Shimada S, Takezawa N, et al. Brittle/ductile transition phenomena observed in computer simulations of machining defect-free monocrystalline silicon. CIRP Annals, 1997, 46(1): 31–34
https://doi.org/10.1016/S0007-8506(07)60769-0
90 Tanaka H, Shimada S, Anthony L. Requirements for ductile-mode machining based on deformation analysis of mono-crystalline silicon by molecular dynamics simulation. CIRP Annals-Manufacturing Technology, 2007, 56(1): 53–56
https://doi.org/10.1016/j.cirp.2007.05.015
91 Goel S, Luo X, Agrawal A, et al. Diamond machining of silicon: A review of advances in molecular dynamics simulation. International Journal of Machine Tools and Manufacture, 2015, 88: 131–164
https://doi.org/10.1016/j.ijmachtools.2014.09.013
92 Liu K, Li X P. Ductile cutting of tungsten carbide. Journal of Materials Processing Technology, 2001, 113(1–3): 348–354
https://doi.org/10.1016/S0924-0136(01)00582-9
93 Li X P, Rahman M, Liu K, et al. Nanoprecision measurement of diamond tool edge radius for wafer fabrication. Journal of Materials Processing Technology, 2003, 140(1–3): 358–362
https://doi.org/10.1016/S0924-0136(03)00757-X
94 Liu K, Li X P, Rahman M, et al. Study of ductile mode cutting in grooving of tungsten carbide with and without ultrasonic vibration. International Journal of Advanced Manufacturing Technology, 2004, 24(5–6): 389–394
https://doi.org/10.1007/s00170-003-1647-5
95 Moriwaki T, Shamoto E, Inoue K. Ultraprecision ductile cutting of glass by applying ultrasonic vibration. CIRP Annals-Manufacturing Technology, 1992, 41(1): 141–144
96 Liu K, Li X P, Rahman M. Characteristics of ultrasonic vibration assisted ductile cutting of tungsten carbide. International Journal of Advanced Manufacturing Technology, 2008, 35(7–8): 833–841
https://doi.org/10.1007/s00170-006-0761-6
97 Zhang X Q, Arif M, Liu K, et al. A model to predict the critical undeformed chip thickness in vibration-assisted machining of brittle materials. International Journal of Machine Tools and Manufacture, 2013, 69: 57–66
https://doi.org/10.1016/j.ijmachtools.2013.03.006
98 Ravindra D, Ghantasala M K, Patten J. Ductile mode material removal and high-pressure phase transformation in silicon during micro-laser assisted machining. Precision Engineering, 2012, 36(2): 364–367
https://doi.org/10.1016/j.precisioneng.2011.12.003
99 Ma J F, Pelate N, Lei S T. Thermally assisted high efficiency ductile machining of nanocrystalline hydroxyapatite: A numerical study. Ceramics International, 2013, 39(8): 9377–9384
https://doi.org/10.1016/j.ceramint.2013.05.054
100 Zheng H Y, Liu K. Handbook of Manufacturing Engineering and Technology: Machinability of Engineering Materials. London: Springer, 2014, 2: 899–939
101 Fang F Z, Chen Y H, Zhang X D, et al. Nanometric cutting of single crystal silicon surfaces modified by ion implantation. CIRP Annals-Manufacturing Technology, 2011, 60(1): 527–530
https://doi.org/10.1016/j.cirp.2011.03.057
102 To S, Wang H , Jelenković E V. Enhancement of the machinability of silicon by hydrogen ion implantation for ultra-precision micro-cutting International Journal of Machine Tools and Manufacture, 2013, 74: 50–55
https://doi.org/10.1016/j.ijmachtools.2013.07.005
[1] Zhigang DONG, Qian ZHANG, Haijun LIU, Renke KANG, Shang GAO. Effects of taping on grinding quality of silicon wafers in backgrinding[J]. Front. Mech. Eng., 2021, 16(3): 559-569.
[2] Xiaoguang GUO,Qiang LI,Tao LIU,Renke KANG,Zhuji JIN,Dongming GUO. Advances in molecular dynamics simulation of ultra-precision machining of hard and brittle materials[J]. Front. Mech. Eng., 2017, 12(1): 89-98.
Viewed
Full text


Abstract

Cited

  Shared   
  Discussed