Metalenses: from design principles to functional applications

doi:10.1007/s12200-021-1201-9

Front. Optoelectron.

2021, Vol. 14

Issue (2) : 170-186 https://doi.org/10.1007/s12200-021-1201-9

REVIEW ARTICLE

Metalenses: from design principles to functional applications

Xiao FU¹, Haowen LIANG^1,²(

), Juntao Li¹

¹. State Key Laboratory of Optoelectronic Materials and Technologies, School of Physics, Sun Yat-sen University, Guangzhou 510275, China
². Southern Marine Science and Engineering Guangdong Laboratory (Zhuhai), Zhuhai 519080, China

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Abstract

Lens is a basic optical element that is widely used in daily life, such as in cameras, glasses, and microscopes. Conventional lenses are designed based on the classical refractive optics, which results in inevitable imaging aberrations, such as chromatic aberration, spherical aberration and coma. To solve these problems, conventional imaging systems impose multiple curved lenses with different thicknesses and materials to eliminate these aberrations. As a unique photonic technology, metasurfaces can accurately manipulate the wavefront of light to produce fascinating and peculiar optical phenomena, which has stimulated researchers’ extensive interests in the field of planar optics. Starting from the introduction of phase modulation methods, this review summarizes the design principles and characteristics of metalenses. Although the imaging quality of existing metalenses is not necessarily better than that of conventional lenses, the multi-dimensional and multi-degree-of-freedom control of metasurfaces provides metalenses with novel functions that are extremely challenging or impossible to achieve with conventional lenses.

Keywords metalens achromatic aberration phase modulation wavefront manipulation

Corresponding Author(s): Haowen LIANG

Just Accepted Date: 03 March 2021 Online First Date: 12 April 2021 Issue Date: 14 July 2021

Cite this article:

Xiao FU,Haowen LIANG,Juntao Li. Metalenses: from design principles to functional applications[J]. Front. Optoelectron., 2021, 14(2): 170-186.

URL:

https://academic.hep.com.cn/foe/EN/10.1007/s12200-021-1201-9
https://academic.hep.com.cn/foe/EN/Y2021/V14/I2/170

Fig.1 Schematic diagram of three phase modulation methods, i.e., resonance phase modulation ((a) and (b)), geometric phase modulation ((c) and (d)), and propagation phase modulation ((e) and (f)). (a) Simulated phase shift of the scattered light for V-antennas with various length h and angle between the rods Δ. (b) Schematic diagram of ordinary and anomalous reflection and refraction for y-polarized excitation. (c) Schematic diagram of a representative meta-atom array considered as model in the simulation. Bottom right: excitation of dipole moment when illuminating one meta-atom. (d) Schematic diagram of ordinary and anomalous refraction when illuminated with left- and right-circularly polarized light, respectively. (e) Side-view scanning electron microscope (SEM) image of a propagation phase-modulated metasurface. An array of nanopillars is indicated by red rectangle. (f) Schematic diagram of focusing a light pulse to the focal distance of a propagation phase-modulated metalens. The time-dependent electric field plots demonstrate that the light passing through the different parts of the metalens requires equal phase delay to arrive at the focal point without dispersion. (a) and (b) Reproduced with permission from Ref. [28]. (c) and (d) Reproduced with permission from Ref. [34]. (e) Reproduced with permission from Ref. [35]. (f) Reproduced with permission from Ref. [36]

Fig.2 (a) Top: schematic diagram of meta-atoms. Bottom: finite difference time-domain (FDTD) simulations of the scattered electric field of the periodic array composed of individual antennas shown above. (b) Schematic diagram of the combination of propagation and geometric phases. (a) Reproduced with permission from Ref. [28]. (b) Reproduced with permission from Ref. [87]

Fig.3 (a) SEM micrograph of the fabricated metalens. Wavelength= 532 nm. (c) Picture of the Nikon objective lens (100× CFI60, NA= 0.8). (b) and (d) Measured focal spot intensity profiles of the metalens in (a) and the commercial objective lens in (c) at the wavelength of 532 nm. (a), (b), and (d) Reproduced with permission from Ref. [68]. (c) From the Nikon website

Fig.4 Multi-wavelength achromatic metalenses. (a) False colored SEM image of achromatic metalens. Inset: schematic side view of metalens designed to focus three different wavelengths into the same focal plane. (b) Schematic diagram of one integrated-resonant unit cell of the broadband achromatic metalens for the incident wavelengths varying from 1200 to 1680 nm. (c) Phase spectra for five different elements schematically shown on the right. The shaded region indicates the design bandwidth of 120 nm. (d) Calculated phase

ϕ 0

and dispersion

Δ ϕ = d ϕ d ω Δ ω

for the meta-atom library schematically shown in the inset. (e) Calculated n_eff for all designed meta-atoms. The meta-atoms schematically shown in the inset are chosen to compose the broadband achromatic metalens by selecting the maximum Δn_eff. (a) Reproduced with permission from Ref. [102]. (b) Reproduced with permission from Ref. [88]. (c) Reproduced with permission from Ref. [89]. (d) Reproduced with permission from Ref. [104]. (e) Reproduced with permission from Ref. [105]

radius/mm	NA	wavelength range/nm	$Δ ω$ /Hz	minimum $Δ Φ ′$ /p	focal length/mm	material	focusing efficiency	comment	Ref.
27.775	0.268	1200–1680	7.14 × 10¹³	0.29	100	Au	12%	reflection scheme	[88]
220	0.02	470–670	1.91 × 10¹⁴	0.44	63	TiO₂	20%		[89]
750	0.075	475–700	2.03 × 10¹⁴	N/A^*	9960	TiO₂	35%	refractive lens and metacorrector with air gap	[90]
50	0.24	1300–1650	4.90 × 10¹³	0.32	200	amorphous silicon	20%–58%		[104]
50	0.24	1200–1650	6.82 × 10¹³	0.44	200
100	0.13	1200–1650	6.82 × 10¹³	0.47	800
50	0.88	1200–1400	3.57 × 10¹³	1.13	30		N/A
25	0.106	400–660	2.95 × 10¹⁴	0.42	235	GaN	40%		[106]
16.67	0.36	1310–1550	3.55 × 10¹³	0.12	38	Si	50.07%–55.53%	theoretical work	[109]
13.2	0.2	460–700	2.24 × 10¹⁴	0.32	67	TiO₂	30%		[110]
7	0.086	430–780	3.13 × 10¹⁴	0.10	81.5	SiN	36%–55%		[105]
32	0.81	1470–1590	1.54 × 10¹³	0.27	22.95	Si	21%–27%	theoretical work	[112]
6.25	0.1	450–700	2.38 × 10¹⁴	0.08	60	TiO₂	43%–78%	theoretical work	[113]
	0.9			0.99	3		13%–32%
	0.99			1.37	0.9		23%–36%

Tab.1 Summary of broadband achromatic metalenses

Fig.5 Simulated maximum focusing efficiency of a metalens designed by the unit-cell approach for diffraction order N_d is equal to 1 (black), 3 (red), and 5 (blue), respectively. Inset: maximum efficiency as a function of unit-cell periods L divided by the wavelength l. Reproduced with permission from Ref. [113]

Fig.6 High-resolution metalenses. Vertical cuts of the measured focal spot intensity profile of the metalens designed at 532 nm with (a) NA= 0.80, (b) NA= 0.98, and (c) NA= 1.48 in immersion oil, respectively. (d) Diffraction-limited image (left) and super-oscillatory image with the application of metasurface filter (right). (e) Schematic illustration of the designed resolution-enhanced metalens described in Ref. [118]. (a) Reproduced with permission from Ref. [68]. (b) and (c) Reproduced with permission from Ref. [100]. (d) Reproduced with permission from Ref. [119]. (e) Reproduced with permission from Ref. [118]

Fig.7 (a) Schematic diagram of the working principle of the bifocal lens proposed in Ref. [120]. (b) Schematic diagram of the working principle of the designed bifocal metalens [92]. Bottom right: top view of the designed metalens consisting of nano-fins with same height but different cross sizes and orientations. (c) Schematic diagram of the multispectral chiral imaging metalens where the left-circularly polarized (LCP) light and right-circularly polarized (RCP) light from the same object are focused into two spots. Spiral arrows indicate helicity of the incident light. Blue and green nano-fins (top view) impart the phase profile required to focus RCP light and LCP light, respectively. The upper half of the image is formed by focusing the LCP light reflected from the beetle, whereas the lower half of the image is formed by focusing the RCP light reflected from the beetle. (d) Schematic diagram of the twofold polarization-selective metalens indicated in Ref. [121]. (e) Left: under the illumination of linearly polarized THz waves, two longitudinally distributed polarization-rotated focal points are demonstrated. Right: under the illumination of x-polarized THz waves, two transversely distributed focal points are demonstrated. (f) Measured point spread function of the achromatic varifocal metalens by rotating the polarization of linearly polarized input light of visible wavelengths. (a) Reproduced with permission from Ref. [120]. (b) Reproduced with permission from Ref. [92]. (c) Reproduced with permission from Ref. [122]. (d) Reproduced with permission from Ref. [121]. (e) Reproduced with permission from Ref. [123]. (f) Reproduced with permission from Ref. [124]

Fig.8 (a) Schematic diagram of the MEMS-assisted metasurface triplet operating as a compact focus tunable microscope. (b) Schematic diagram of the rotationally tunable multifocal Moiré metalens. (c) Schematic diagrams of the rotationally tunable metalens doublet showing negative focal length variation (left), no focus (middle), and positive focal length variation (right). (a) Reproduced with permission from Ref. [125]. (b) Reproduced with permission from Ref. [126]. (c) Reproduced with permission from Ref. [127]

Fig.9 (a) Left-hand side: schematic diagram of the principle of QPGM. Right-hand side: phase gradient image (PGI) formed by combining three DIC images (I₁, I₂, and I₃). (b) LCP incident on the metasurface results in an output beam with Gaussian intensity distribution and a bright-field image. RCP incident on the same metasurface results in an output beam with donut-shaped intensity distribution and a spiral phase contrast image. (c) Microscopic spectral tomography images of frog egg cells with aplanatic metalens at different wavelengths. (d) Schematic diagram of the metalens-array-based quantum source. (a) Reproduced with permission from Ref. [129]. (b) Reproduced with permission from Ref. [130]. (c) Reproduced with permission from Ref. [131]. (d) Reproduced with permission from Ref. [132]

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