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Frontiers of Materials Science

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Front. Mater. Sci.    2015, Vol. 9 Issue (1) : 14-37    https://doi.org/10.1007/s11706-015-0279-7
REVIEW ARTICLE
Semiconductor metal oxide compounds based gas sensors: A literature review
Sunil Jagannath PATIL1,2,Arun Vithal PATIL2,Chandrakant Govindrao DIGHAVKAR2,Kashinath Shravan THAKARE3,Ratan Yadav BORASE3,Sachin Jayaram NANDRE4,Nishad Gopal DESHPANDE5,*(),Rajendra Ramdas AHIRE1,*()
1. Department of Physics, S. G. Patil Arts, Science & Commerce College, Sakri-424304, Dist. Dhule, India
2. Department of Physics, L. V. H. College, Panchavati, Nashik-422003, India
3. Thin and Thick film Laboratory, M. S. G. College, Malegaon Camp, Malegaon-423105, Dist. Nashik, India
4. Department of Physics, Uttamrao Patil College Dahivel, Dist-Dhule, India
5. Department of Physics, Shivaji University, Kolhapur-416004, India
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Abstract

This paper gives a statistical view about important contributions and advances on semiconductor metal oxide (SMO) compounds based gas sensors developed to detect the air pollutants such as liquefied petroleum gas (LPG), H2S, NH3, CO2, acetone, ethanol, other volatile compounds and hazardous gases. Moreover, it is revealed that the alloy/composite made up of SMO gas sensors show better gas response than their counterpart single component gas sensors, i.e., they are found to enhance the 4S characteristics namely speed, sensitivity, selectivity and stability. Improvement of such types of sensors used for detection of various air pollutants, which are reported in last two decades, is highlighted herein.
Keywords gas sensor      semiconductor metal oxide (SMO)      sensitivity      air pollutant      gas response     
Corresponding Author(s): Nishad Gopal DESHPANDE,Rajendra Ramdas AHIRE   
Online First Date: 10 February 2015    Issue Date: 02 March 2015
 Cite this article:   
Sunil Jagannath PATIL,Arun Vithal PATIL,Chandrakant Govindrao DIGHAVKAR, et al. Semiconductor metal oxide compounds based gas sensors: A literature review[J]. Front. Mater. Sci., 2015, 9(1): 14-37.
 URL:  
https://academic.hep.com.cn/foms/EN/10.1007/s11706-015-0279-7
https://academic.hep.com.cn/foms/EN/Y2015/V9/I1/14
Fig.1  Scheme 1 Classification of SMOs.
Fig.2  Schematics of (a) small region on the uniform thin film, (b) microstructure studies (i.e., usually done by SEM/AFM/TEM etc. techniques), and (c) grains, grain boundary region and negatively charged chemisorbed oxygen species.
Fig.3  Schematics of (a) band diagram compared with the grain boundary model (Note: energy scale and the distance along the grains and grain boundaries are not to the scale) and (b)(c) gas sensing phenomena when sensor surface is exposed to reducing gas and oxidizing gas, respectively.
Material Top /°C Sensitivity Concentration /ppm Refs.
TiO2 425 35.8 0.08 vol.% [31]
ZnO–CuO 400 3.8025 1000 [47]
Co–SnO2 350 35 1600 [70]
ZnO–Cu 300 87.3 1000 [80]
TiO2–Pd 240 35 1000 [93]
ZnO–Al 325 89 1 vol.% [94]
NiFe2O4–CO–Mn 180 100 1000 [95]
ZnO–Cr2O3 350 46 100 [96]
BiFeO3–Mn 250 7.2 1000 [97]
Pd–SnO2 325 98 1.6 vol.% [98]
SnO2 190 340 400 [99]
SnO2 350 25 600 [100]
Al–Ni–SnO2 300 16 600 [100]
SnO2 350 30 1000 [101]
SnO2 325 14.4 1000 [102]
SnO2–Cu 264 0.79 500 [103]
SnO2 274 0.511 500 [104]
CuFe2O4 300 43 150 [105]
ZnO–Cu 500 0.9 400 [106]
Tab.1  LPG sensor materials with different operating temperatures, concentrations and gas response/sensitivity
Material Top /°C Sensitivity Concentration /ppm Refs.
CuO–WO3 100 40.85 1 [22]
Ba–Sr–TiO2 350 45 1000 [49]
TiO2–Al2O3–Pd 225 88 200 [50]
Ba–Sr–TiO3 300 114 300 [56]
Ni–Ba2CrMoO6 200 0.8 1000 [59]
WO3 400 50 1000 [61]
WO3–CuO R.T. 726 1 [61]
CuO–BaSrSnTiO3 R.T. 13 50 [63]
TiO2–Nb2O5 200 98.78 1000 [68]
ZnO–Cr2O3 300 99.12 1000 [69]
Al–TiO2 200 99.23 1000 [78]
WO3–Cr2O3 250 230 280 [79]
ZnO 250 25.01 100 [81]
SnO2 100 96 80 [82]
Cr–BaZrO3 300 15.48 100 [85]
CdO–In2O3 150 89.71 10 [86]
MoO3 350 12.72 1000 [89]
BaTiO3 350 53 100 [107]
SnO2 250 33 10 [108]
SnO2 200 2.5 100 [109]
SnO2–CuO 160 25 100 [109]
SnO2–NiO 180 150 100 [109]
SnO2 100 0.03 100 [110]
SnO2–CuO 100 0.95 100 [110]
SnO2 200 7.8 50 [111]
SnO2–CuO 200 35 50 [111]
SnO2–CuO 350 10 300 [112]
SnO2 350 10 300 [112]
SnO2–CuO 150 73 20 [113]
SnO2–CuO 90 210 50 [114]
SnO2 200 25 50 [115]
Tab.2  H2S gas sensor materials with different operating temperatures, concentration and gas response/sensitivity
Material Top /°C Sensitivity Concentration /ppm Refs.
CrTiO3 300 70 500 [23]
Ti–SnO2 550 90 1000 [46]
ZnO–RuO2 250 3.86 1000 [51]
BaSrTiO3 300 84 300 [56]
Polypyrol R.T. 20 40 [62]
TiO2–Cr2O3 250 88.23 1000 [67]
BaZrO3 300 11.33 100 [85]
CO3O4 R.T. 2.557 121 [87]
ZrO2 300 7.17 100 [90]
ZnO–CuO 400 35 1000 [116]
Au–MoO3–WO3 400–500 11 1–50 [117]
ZnO–Fe2O3 350 5.73 300 [118]
Tab.3  NH3 gas sensor materials with different operating temperatures, concentration and gas response/sensitivity
Material Top /°C Sensitivity Concentration /ppm Refs.
Ag–CuO–BaTiO3 430 1.59 5000 [33]
CuO–BaTiO3 450 80 100 [119]
Li2CO3 400–450 – 40–2000 [120]
Lithium solid electrolyte 650 – 80 [121]
TiO2–Pt R.T. high 5000 [122]
Tab.4  CO2 gas sensor materials with different operating temperatures, concentration and gas response/sensitivity
Material Top /°C Sensitivity Concentration /ppm Refs.
TiO2 350 1.02 20 [18]
Pt–TiO2 190 14 100 [19]
Nb–TiO2 600 high 100 [25]
Nb–TiO2 420 1.5 10 [26]
TiO2–Cr2O3 500 1.35 50 [38]
WO3 200 57 0.5 [43]
ZnO 250 23 1000 [71]
Tab.5  NO2 gas sensor materials with different operating temperatures, concentration and gas response/sensitivity
Material Top /°C Sensitivity Concentration /ppm Refs.
TiO2 400 36 2000 [16]
WO3 200 60 1000 [30]
Cr–TiO3 575 3.08 80 [39]
WO3 400 1424.6% 50 [55]
Cu–TiO2 300 84.16 1000 [77]
ZnO 380 8.8 100 [83]
Nb2O5–ZnO 300 84 1000 [84]
In2O3 350 90 100 [86]
MoO3 200 11.1 1000 [89]
Fe2O3 350 180 250 [92]
CoFe2OPd 100 0.9 100 [123]
Al2O3–ZnO 300 73 1000 [124]
SnO2–Pd-Pt 450 560% 1000 [125]
Tab.6  Ethanol gas sensor materials with different operating temperatures, concentration and gas response/sensitivity
AFMatomic force microscopy
ARanalytical reagent
BCAbutyl carbitol acetate
BSSTBaSrSnTiO3
BSTBa0.67Sr0.33TiO3
CNGcompressed natural gas
DCdirect current
FIBfocused ion beam
IRinfrared
LPGliquefied petroleum gas
MEMSmicro-electro-mechanical systems
MICmethyl isocyanate
MOCVDmetal organic chemical vapor deposition
NCnanocrystalline
NTCnegative temperature coefficient
PLDpulsed laser deposition
PVDphysical vapor deposition
RFradio frequency
RHrelative humidity
R.T.room temperature
SCCMsquare cubic centimeter per minute
SEMscanning electron microscopy
SMOsemiconductor metal oxide
SPDspray pyrolysis deposition
TCRtemperature coefficient of resistance
TEMtransmission electron microscopy
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